CG5-S

6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 23 130 32 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 CG-E080SUS 258 23 131 32 Plug bolts are installed before shipment from factory.

Vacuum Pad

) Model D A 34 40 50 B 11 14.5 20.5 ZP3B-Y2B3-B5 ZP3B-Y2B6-B5 ZP3B-Y2B10-B5 16.5 19 23 8 Lateral 8 Note) The symbol "" indicates buffer type "J" or "K".

Vacuum Pad

) Model D A 34 40 50 B 11 14.5 20.5 ZP3B-Y2B3-B5 ZP3B-Y2B6-B5 ZP3B-Y2B10-B5 16.5 19 23 8 Lateral 8 Note) The symbol "" indicates buffer type "J" or "K".

Vacuum Pad

) Model D A 34 40 50 B 11 14.5 20.5 ZP3B-Y2B3-B5 ZP3B-Y2B6-B5 ZP3B-Y2B10-B5 16.5 19 23 8 Lateral 8 Note) The symbol "" indicates buffer type "J" or "K".

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

KA

21.5 20 14 12.8 10 6 23.5 1 4 KAL06-U02 10 11.4 11.4 15 Applicable tubing 24.5 23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26 22.5 24.5 11 16 14 12 15.2 8 23 14.9 18.5 14.9 3 8 KAL08-U03 17 25.5 27 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 1 4 3 8 KAL10-U02 KAL10-U03 30 30.5 17 26.5 17 18.5 10 21 25.0 25.0 1 2 KAL10-U04 30 31.5 45 23 27 22 1 4 3 8 KAL12-

MY2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) D-F9N D-F9NV D-F9P D-F9PV D-F9B Perpendicular D-F9BV Auto switch part no.

Compact Guide Cylinder Series MGQ

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7WV D-M9V D-M9WV D-A9V Bore size (mm) Hs Hs Hs Hs 12 16 20 25 32 40 50 63 80 100 16 18.5 20.5 17 18.5 21 23 19.5 19.5 22.5 24.5 20.5 21 23.5 26 22 24.5 27 28.5 25.5 24 26 27.5 25 28 30 31.5 29 34.5 36.5 39.5 35.5 44 46.5 48.5 45 52 54 56 52.5 350 Compact Guide Cylinder Series MGQ

New

D-DN

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-A9, A9V D-F9BAL Bore size (mm) A 27 27 25 A 24 24 22 B 7 7 8 B 6 6 7 B 3 3 4 0 to 1 A B 20 25 32 D-Z7/Z80 D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL A 23 23 32 37 Bore size (mm) B 0 0 0 4 40 50 63 80 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Minimum Stroke for

SFOD-OMT0005CN

OFF (SVRE OFF )[LK RLS]DC24V LK RLS LK RLSDC24V LK RLS (EMG) /(LEC ) -73- 18 18.1. / JXC91EEPROM1,000,000 -74- 18.2 ON 5 () -75- 18.3 18.4 () -76- 18.5 18.6 D(100) 18.7 -77- 19 ,, (), YES NO JXC LED 1 MSNS 2 ALM 3 (LEC-W2) 4 5 -78- No. 3(P.12) 5(P.23) SVON ON PWR() 1 LED 5. (P.23) 6.

Slider Type/Ball Bushing Bearing

B A (mm) Applicable auto switch D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV D-F79F Other than the models listed in How to Order, the following auto switches are applicable. For detailed specifications, refer to page 1627.

Compact Rotary Actuator Series CRQ2

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

AC Servo Motor Driver (Pulse input type/Positioning type)

/Program No. selection 1 5 DI0 19 20 LZR LZ Encoder Z -phase pulse 23 DI1 Point table No.

2/3 Port Valve for Various

" # $ # VX21/22/23 VXD21/22/23 $ $ $ $ $ $ VXP21/22/23 VXR21/22/23 % $ $ && &'& && &'& && &'& ($ )* && &'& && &'& !