VEX1

1 1 DO DIN terminal, without connector 70 1 4 11 4 G Grommet, Lead wire length 300 mm 1 H 50 70 90 Grommet, Lead wire length 600 mm 11 4 90 2 E Grommet terminal 2 T Conduit terminal D DIN terminal Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B Option Operation type (Only bracket or foot may be mounted.) 0 1 2 Air operated External pilot solenoid Internal pilot solenoid Nil

Refrigerated Thermo-chiller

SG Connector location P3: Not used for the maintenance purpose port D-sub9 (Male receptacle) P2: Serial RS-485 D-sub9 (Female receptacle) P1: Contact input/output D-sub25 (Female receptacle) Power cable entry E S O L C SMC N E P O Rear side 93 Series HRZ Operation Panel Display Description No.

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

VEX1

1 1 DO DlN terminal, without connector 1 4 11 4 70 G Grommet, 300mm lead wire 1 H 50 Grommet, 600mm lead wire 11 4 2 90 70 E Grommet terminal 2 T Conduit terminal 90 D DlN connector Body ported VEX3 12 0 01 5 D B Base mounted VEX3 22 0 01 5 D B B Bracket (Except VEX332) Option 0 Air operated Operation F Foot (Only VEX312, VEX332) 1 External pilot solenoid N Silencer for pilot exhaust (P2)

Slider Type Ball Screw Drive/11-LEFS Series

0 Driver type * Select D for the vacuum port for suction of 50 L/min (ANR) or more. o Cable length Note 3) !

JXCx-OMU0004

RESET B 8.3 P.41 RESET C OFF I/O STOP OFF OFF 8.5 ONP.44 RESET C D RESET C RESET D 66 No.JXC-OMU0004-A (M24V) RESET D RESET D 3.4 P.14 (C24V) RESET D RESET D ( E ) 67 No.JXC-OMU0004-A E ON E BK RLS E EEPROM EEPROM E 10 CPU CPU E 68 No.JXC-OMU0004-A 13. / 50mm ( ) 5m 5m 10% 15m 20% 69 No.JXC-OMU0004-A 14. / 14.1.

Programless controller Step motor (servo 24 VDC)

C c OFF OFF OFF ON OFF D d OFF OFF OFF OFF ON Power off Turn on the power E E OFF OFF OFF OFF OFF again When multiple alarms in alarm groups A to D occur, the relevant OUT 0 to 3 will be ON.

1.1

IDF-TR4000-5 IDF-TR4000-6 IDF-TR4000-7 Mass (kg) 275 259 355 299 320 35 355 299 320 42 IDF-TR-8 E C G B D A 4 x F (mm) A 540 B 400 C 260 D 300 E 11 F 30 G 94 Transformer part no.

Power Valve: Economy Valve Series VEX5

Port 3 (R) 1/4 (P1) Refer to page 2449. 2 x port size Port 2 (A),1 (P) 2 x d Mounting hole A (Air operated) For bracket mounting Max. O Min.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ Conduit terminal

2 PORT SOLENOID VALVE FOR DUST COLLECTOR

Note Diaphragm Assembly Note4) Tightening torque(N.m) Product number At normal At high At normal At high temperature temperature temperature temperature VXF(A)21A(A,B,C,D) VXF-21AA VXF-21AC 5.26.3 6.37.3 VXF(A)22A(A,B,C,D) VXF-22AA VXF-22AC VXF(A)23A(A,B,C,D) VXF-23AA VXF-23AC 24.529.5 29.534.3 VXF(A)24A(A,B,C,D) VXF-24AA VXF-24AC VXF(A)25A(A,B,C,D) VXF-25AA VXF-25AC 12.515 1517.5 VXF(A)26A

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

VP3145/3165/3185

DIN terminal: VP3185-D Conduit terminal: VP3185-T A B A B VQZ VZ Conduit terminal with indicator light (TL) G 1/2 Max. 11 Applicable cable 6 to 12 VS Light Light VFN Rc 1/4 G 1/2 Rc 1/4 ( ): With indicator light (TL) 4-10-7 8 Made to Order Specifications: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 80 Type of actuation Body size

Digital Flow Switch (Remote type sensor unit)

D: Contents revised in several places. E: Contents are added. F: Contents are added. G: Contents revised in several places. H: Contents are added. I: Contents revised in several places.[March 2017] J: Contents revised in several places.

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

Note) A: Non-locking push type A (projecting) 1 6A 8A 10A 10A 15A 20A 25A 32A 40A 50A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 4 Note 2) Valve size 1 to 4 10 5 6 Note 2) Note) B: Slotted locking type B (tool required) 7 Note 2) 2 15 Note 1) CE-compliant: For D or DZ only Note 2) Semi-standard Note 3) For other rated voltages, please consult with SMC. 3 20 25

Process Valve: 2 Port Valve For Flow Control VNB Series

consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F 33 50 Flange G GS E EZ T TZ D DZ Grommet Grommet

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ VP Conduit terminal