VQ7-6/7-8

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

High Power Cylinder:

to 700 200 to 700 200 to 1000 200 to 1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 H1 5 6 6 8 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53 A 18 22 22 24 Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

YES Hysteresis mode OFF n_1 n_2 Large pressure and vacuum pressure [n] H (Fix hysteresis) = 3 digits H H ON Window comparator mode NO OFF n_1 n_2 Large pressure and vacuum pressure 3 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Example of Internal Circuit and Wiring ZSE F/ISE --22(L)-(M) 50 60 50 60 ZSE F/ISE --30(L)-(M) 50 60 50 60 With analog output

One-touch Fittings Series KQ2

1 2 3 8 1 2 20.9 12 28.5 22 17 39.7 50.2 22 (71) (84) 71 100 26.5 22 20.9 34 25 16 Reference dimensions after R(PT) thread installation.

KG

26.5 22 30 33.5 24 20.5 15.5 26 27.5 14 26.1 8 18.5 18.0 17 Applicable tubing 17 41.5 10 21 29.5 3 8 KGH10-03 29 22.5 30 1 2 KGH10-04 27 19 53 42 34 22 1 4 3 8 KGH12-02 KGH12-03 34.5 28.5 19 12 23.5 22 58.3 46.1 30 1 2 3 8 1 2 KGH12-04 KGH16-03 KGH16-04 51 61 47 22 22 39.5 32 35.5 26.5 81 (81) 113 (96) 16 24 24 Connection thread Reference dimensions after R thread installation

3 Position Cylinder Series RZQ

clevis CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW 112.5 82.5 10 102.5 5 14 20 32 10 6 14 22 124 92 114 40 14 7 20 28 134.5 96.5 124.5 50 146 102 14 132 8 20 30 63 CU Bore size (mm) L B + Full stroke RR CW CX+0.2 +0.4 CX CZ RR CL + Full stroke CZ -0.3 -0.1 18 36 10 32 A + Full stroke 18 36 10 40 22 44 14 50 22 44 14 63 10 Series RZQ Auto Switches Proper Mounting Position

LX

For transfer load of 0kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 50 50 2.1 2.1 1.1 1.1 0.3 0.3 0.1 0.1 Speed (mm/s) Speed (mm/s) 100 100 1.1 1.1 0.6 0.6 0.2 0.2 0.1 0.1 200 200 0.7 0.6 0.5 0.4 0.2 0.2 0.1 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other VFS VFR 4 5 6 VQ7 7 Option Body Option Pilot type 0 1 Standard Direct manual override Nil R Internal pilot External pilot Option Option How to Order Pilot Valve Assembly SF4 F 1 22 Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50

Micro Mechanical Valve Series VM1000

32 16 30 25 2 x 1/4 2 x 5.5 mounting hole 40 * 0.5 MPa supply F .O.F .* 52 N T.T. 5.8 mm 22 Series VM100/200 Specific Product Precautions 1 Be sure to read before handling.

HRX-OM-X071

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

LEYx-OMZ0015

Scket width across flats Rod end nut Max.thread Model Bolt tightening length [mm] torque [Nm] [mm] LEY25 M14x1.5 50 20.5 17 LEY32 M14x1.5 50 20.5 22 Soke LEY63 M18x1.5 97 26 36 Mounting / Body bottom tapped style (When Body bottom tappde is selected Rod end nut thread Width Model depth of Length [mm] across flats bracket[mm] [mm] LEY25 22 8 8 or more Thread depth of bracket LEY32 22 8 8 or

Step Motor Controller

motor (S3) 200 W AC servo motor (S2) 200 to 230 VAC 50/60 Hz AC servo motor (S4) 400 W AC servo motor (S3) Power supply voltage AC servo motor (S6) 100 W AC servo motor (S4) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz Absolute AC servo motor (S7) 200 W AC servo motor (S6) 100 to 120 VAC 50/60 Hz AC servo motor (S8) 400 W AC servo motor (S7) Pulse input type (For absolute encoder

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

45 FX FT L B + Stroke 16 10 to 60 54 34 6.6 8 39 48 FZ 20 10 to 60 57.5 37.5 6.6 8 42 52 A + Stroke 2-FD 25 10 to 50,75,100 64 42 5.5 8 48 56 30 10 to 50,75,100 70.5 48.5 5.5 8 54 62 25, 30, 40 40 10 to 50,75,100 72 50 6.6 9 67 76 Bore size (mm) FZ L M FV 10 55 18 FX FT L B + Stroke 16 60 20 FZ 20 64 20 A + Stroke 4-FD 25 65 22 34 30 72 22 40 40 89 22 50 Rear flange type: MQQTG 10, 16,

CNS

For details, refer to page 9-8-22.

1.63

100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.1 0.1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) 508 Model Selection MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20 to 25 (21) L = 50 mm, V = 200 mm/s or less (22) L = 100 mm, V = 200 mm/s or less

KP/KPQ/KPG

-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 L2 A D2 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17 17 12 25 31.4 40 20.9 50 22 Reference dimension

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

High Vacuum Angle Valve, XL Series

Rated voltage 100VAC, 50/60Hz 1 200VAC, 50/60Hz 2 110VAC, 50/60Hz 3 220VAC, 50/60Hz 4 24VDC 12VDC 5 Auto switch type 6 Nil Without auto switch (without built-in magnet) Solid state auto switches Switch quantity/Mounting position F9N F9P D-F9N D-F9P Symbol Quantity Mounting position Nil 2pcs. F9B D-F9B A Valve open/closed B C Note 1) The standard lead wire length is 0.5m.

Modular F.R.L. Unit

5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4 117.5 11 11 20 50 98 70 316 3.3 280 46 20 196 44.5 84

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

SJ3000-50-1A-ll SJ3000-50-1AS-ll SJ3000-50-1AR-ll X, PE port: Metric size 4 Inch size 5/32" Internal pilot (Metric size) C6: With 6 one-touch fitting (straight) C8: With 8 one-touch fitting (straight) L6: With 6 one-touch fitting (elbow upward entry) L8: With 8 one-touch fitting (elbow upward entry) B6: With 6 one-touch fitting (elbow downward entry) B8: With 8 one-touch fitting (elbow downward