High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Thermo-chiller

flow, r Power supply: 200 VAC 7 Standard Type Thermo-chiller Water-cooled 200 V Type Series HRS100/150 RoHS How to Order 100 W 20 HRS Cooling capacity Option 100 10 kW 150 15 kW Cooling method Note) This is a manual fluid fill port that is different from the automatic fluid fill port.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

200 1003 5 10 20 30 1003 5 10 20 30 50 100 200 60 50 100 200 Horizontal Vertical (downward) Vertical (upward) m2 max. m1 max. m3 max. m1, m2, m3 max.

KJ

28 33.5 29 28 39 35 46.0 8 19 12 44.5 22 60.0 10 22 10 12 (81) (96) 81 113 24 25.7 25 16 Reference dimensions after R thread installation.

CE2

Relay, PLC 100 V Reed switch Solid state switch PLC 100 V, 200 V Relay, PLC 12 V Yes Yes 24 V 2-wire Terminal conduit PLC 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V 24 V IC circuit Grommet 100 V, 200 V 2-wire 12 V IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC 12 V 3-wire (NPN

Clean Gas Filter

-03 ZFC SF SF SFC105-02: URJ 1/4 (Union Ring Joint) SFC105-03: URJ 3/8 (Union Ring Joint) SFD 2 x A LLB AD IN 76 B GD C Width across flats 127 Model A URJ 1/4 URJ 3/8 B 22 26.5 C 19 22 SFC105-02 SFC105-03 311 SF Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Short Stroke Electric Actuator Series LX

200 0.7 0.5 0.2 0.1 0.6 0.4 0.2 0.1 For transfer load of 1kg Positioning time (sec) Positioning distance (mm) 100 50 10 1 50 2.1 1.1 0.3 0.1 Speed (mm/s) 100 1.1 0.6 0.2 0.1 200 0.7 0.4 0.2 0.1 Refer to page 302 for acceleration time. 217

SMC

22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA 162 218 258 13-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30 13-/22-MXS25-40 13-/22-MXS25-50 13-/22-MXS25-75 13-/22-MXS25-100 13-/22-MXS25-125 13-/22-MXS25-150 795 MXS 1322Air Slide Table Dimensions: MXS25 1322Axial piping

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 NA P S TA TB ZZ 11 11 77 1/8 24 114 Up to 200 11 11 77 1/8 29 119 Up to 300 11 11 79 1/8 35.5 121 Up to 300 12 12 87 1/8 44 139 Up to 300

Process Valve

32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122 85 100 19 15 25 to 1800 Rod series Tolerances (mm) B series rod C series rod Bore size (mm) Bore size (mm) LH LX E E A MA D K G H ZZ MM A MA D K G H ZZ MM 32 32 34 25 22 18 7 14 66 220

High Purity Fluoropolymer

A L1 L2 H G F M N E B LQ2R4C-M LQ2R4B-M LQ2R4A-M LQ2R3D-M LQ2R3C-M LQ2R3B-M LQ2R3A-M LQ2R2F-M LQ2R2E-M LQ2R2D-M LQ2R2C-M LQ2R2B-M LQ2R2A-M 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1/8" 18.5 4 19 18 19.9 12 34.5 22 6 1/4" 16.5 43 23.5 1/4" 42.5 43 5 24 26.2 18 29.5 9 22 23 3/8" 42.5 52 51 52 51 59.5 58.5 59.5 58.5 30 3/8" 6 30 33.1 22 36

Electric Slide Table / High Precision Type 《 AC servo motor 》

to 230 200 to 240 200 to 230 200 to 240 200 to 240 200 to 240 200 to 240 200 to 240 A1 LECSA1-S A 10 A2 LECSA2-S * The length of the encoder, motor and lock B2 LECSB2T cables are the same.

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Bore size (mm) A B A B A B MK(2) 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 RS Q G 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

MGC

44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 25 38 80 60 MGP 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 32 46 95 70 75, 100 125, 150 200, 250 300 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 32 50 105 80 MGQ 70 40 160 37 M8 165 85 12 9 125 110 176 160 16 18 107 38 60 125 95 45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W

RSH/RS1H

22 13.5 22 6 63 15.5(14) 24.5 24.5 17 24.5 9.5 RS H A 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Refrigerated Air dryer Series IDU/IDF

/200 to 220VAC (50/60Hz) Single phase, 220, 240/200 to 240VAC (50Hz) Power source 225 275 205 240 182 189 250 350 220 280 265 275 305 380 300 350 280 295 340 415 325 375 332 50Hz 60Hz 50Hz 60Hz 50Hz 50Hz 50Hz 100 VAC 200 VAC Power consumption (W) 220 to 240VAC 220VAC 240VAC JIS Symbol 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Circuit breaker (A) Note 3) Refrigerated air dryer