Modular Type Regulator Series AR

Note 2) Mounting thread for pressure gauge: 1/8 for AR20 to 30; 1/4 for AR40 to 60 Optional specifications Symbol 1 Note 3) N R Y Z Note 4) Description 0.02 to 0.2MPa setting Non-relieving type Flow direction: Right to left Upward handle Applicable model AR25 to 60 AR25 to 60 AR25 to 60 AR25 to 60 AR25 to 60 Optional specifications Symbol N R Y Z Note 3) Description Non-relieving Flow direction

Air Pilot Operated Series NVSA

U , (14r) (179) a'|A, a1A 10,,{, (255) 1 1 % r @3) 1A h. (31) 14'1Az (3691 16 t, t4071 L. (12() (154) tl60r 9 % r QUI 10 "ti a2 12 t, 1310) 13 "1, B{a) 1 5 t , 86) 16 rxr t4211 L r = 3 8 N + z z L z = 3 8 N + + l 13 DIRECTIONAL AIR VALVE INTERFACE SPEED CONTBO PILOTINDICATORS SERIES NVSA 4(914 INIERFACE SPEED CONTBOL FEATURES 1Eliminates expense ol Plping and "External" Flow Conlrols. 2.

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

PF-OMN0009_C

-11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F N M8 M8 R / ZS-40-K PF3W504/520 4 3X8 ZS-40-L PF3W540 4 3X8 ZS-40-M PF3W511

SZ3000

21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle mark Triangle mark

Basic Type/Direct Mount Type

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked are produced upon receipt of order. Other than the applicable auto switches listed in How to Order, the other auto switches can be mounted. For detailed specifications, refer to page 1479.

3 Way,3 Port Solenoid Valve NVZ Series

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

NVZseies

NVZsO4R-OM Lead wire length Tgpe 20 Manifold,/ Top Ported inch (mm) Gromm{ (G), (H) % NPTF 4 ports L type dug connectot(L) M type plug connector(M) 21 Manifold,/ Top Ported' inch (mm) Grommet (G), (H) 2 Mounting holes L Vpe dug cmnecto.

Vacuum Unit

Select this type when energy saving switch is used. 1 The characteristics are satisfied when tested for 2 hours in each of the X, Y and Z directions at 10 to 500 Hz without energization. (Initial value) 2 The characteristics are satisfied when tested one time in each of the X, Y and Z directions without energization.

MHZ2/MHZJ2

Indication of lead wire length (Example) D-F9P L 2 wire 3 wire New New Old Old Lead wire length Brown Brown Output (+) Red Power supply (+) Red Nil L Z 0.5m 3m 5m Blue Blue Black Power supply GND Black Output () Output White Black Note 1) Lead wire length Z: Auto switch with 5m length Solid state: All models produced upon receipt of order (standard procedure).

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A SOL.A Triangle mark 1 1 1 Triangle mark Triangle mark

OMU0023

15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F ?

PSxx-OMV0003CN

<> UPDOWN[F 2] SET UP DOWN OFF SET UP DOWN [OFF] OFF SET SET 21 [Err] SET [P_2] [P2L][P2H] [P_2][n_2] "P""n" (55) SET -32No.PS-OMV0003CN-G 21 [H_2] [WH2] (55) SET 23 ON OFF SET UP DOWN ON ON ON ON OFF OFF OFF OFF OUT1 OUT1 OUT2 OUT2 SET [F 2] OUT2 1SET 2SETSET2 -33No.PS-OMV0003CN-G [F 3] 0.01 sec.0.0030.00 sec. <> UPDOWN[F 3] SET UP DOWN SET [F

LECA6_C

CN1:. 18 5.1 . 18 5.2 . 18 5.3 . 19 (1) . 19 1 - (2) . 19 (3) . 19 5.4 . 20 1. 20 2. 21 (3) (). 22 6.

Slider Type Ball Screw Drive/11-LEFS Series

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Y m x g m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Horizontal m Static load m M m x g x X m x g x X m x g x Z M Static moment M m x g x Y m x g x Y m x g x Z M z y Y Z m x g x X m x g x Y M m x g Note) m is a mass movable by thrust.

CLQ

With auto switch Without auto switch B A B D Stroke range Bore size (mm) BP C E F G H I J K L M N Q O OA OB P RA RB S T U V Z A 82 36 10 to 50 Rc 1/8 15.6 14 Rc 1/4 63 16.5 46 92 8 1.6 15 20 38 M10 x 1.5 103 17 60 M8 x 1.25 53 16 4.2 47.5 19 93 7 9 10.5 77 92 46 depth 12 depth 10.5 75, 100 96.5 43.5 10 to 50 19.6 17.5 Rc 3/8 Rc 1/4 80 106.5 53.5 18.5 10 2 21 25 43 M16 x 2.0 132 22 77 M10

Booster Regulator Series VBA1110 to 4200 1

T [s] = (V/10) x (T2 T1 )/(Z) T [s] = (5/10) x (12 3.7) = 4.2 Increase number of booster regulators (Z) to decrease T. NO NO Extend stop time Ts up to charge time T or more. Judgement of charge time T Ts 4.2 29 YES YES When running continuously for a longer period of time, confirm the life expectancy.

e-Rodless Actuator

Applicable auto switches/For detailed auto switch specifications, refer to page 17 through 21. Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Auto switch part no.

MXW

Dimensions B A D C M (mm) Stopper bolt Stroke adjustable range (mm) 5 Applicable size B A C D M Model Lock nut MXW-A812 21 MXW8 8 M5 x 0.5 2.5 6 MXW-A812-X11 15 31 MXW-A1212 5 23.5 MXW12 8 M5 x 0.8 2.5 6 Avoid operating within 1 mm. The effectiveness of the shock absorber and urethane damper will not be brought into full play, and could be adversely affected.