CEx-OMQ0011

No.CE*-OMQ0011-A : : ML2B CEU2 SMC 1 4 2 2-1. 10 2-2. 11 2-3. 11 2-4. 11 3 3-1. 1213 3-2. 14 3-3. 1516 4 4-1. 17 4-2. 1819 4-3. 2021 5 5-1. () 22 5-2. 22 5-3. 23 6 6-1. () 24 6-2 24 6-3 25 7 7-1 26 7-2 27 7-3 28 8 8-1 29 8-2 29 - 9 9-1 9-1-1. 3031 9-1-2. 32 9-2. 9-2-1. 32 9-2-2. 32 9-3. 9-3-1. 33 9-3-2. 34 9-3-3.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

However, in case of size 1, the tubing cannot be changed by reducing. 17-5-97 2 Series LQ1 How to Order Tubing connection E 11 LQ1 Class Combination of different diameter (on B side) No. 1 1 2 2 3 3 3 4 4 5 5 6 6 Class 1/8" x 0.086" 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" No. 1 2 2 2 3 3 4 4 5

Hygienic Design Cylinder Series HY

DBore size X Y LD LH LC LQ LT LX LY LZ ZA ZB 107 115.5 133.5 134 ZC 129 139.5 165.5 166 ZB 122 130.5 148.5 149 ZC 144 154.5 180.5 181 HY-L032SUS HY-L040SUS HY-L050SUS HY-L063SUS 32 40 50 63 M6 x 1 x 18L M6 x 1 x 18L M8 x 1.25 x 20L M8 x 1.25 x 20L 100 120 210 260 24 28 32 32 11 10 11 11 7 9 9 9 32 36 45 50 142 161 170 185 109 121.5 140.5 141 4 4 5 5 32 36 45 50 57 65 80 92 49.5 57.5 69 84

Rubber seal 5 Port Solenoid Valve Series SYJ5000

3 4 5 DIN terminal (D): SYJ5 20-D-M5 3 4 5 M8 connector (W0): SYJ5 20-W0-M5 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 Max. 10 28.1 [35.1] 60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6

Servo Motor Controller (24 VDC)

(11)BUSY is turned OFF. (The actuator stops.) INP is turned ON. 43 - 11. Option 11.1 Actuator cable LE CA Cable length (L) signal Tarminal no. Cable color Tarminal no. 1 1.5m U 1 Red 1 V 2 White 2 3 3m W 3 Black 3 5 5m Shield signal Tarminal no.

CLQ

B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double end tapped: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Standard type (through

CG5-S

7 11 4 22 40 38.4 29 4 70.5 56 40 188 170 CG-E032SUS 50 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 63 14 189 12 15 5 25 50 59.6 35 6 106.5 84 50 224 204 CG-E050SUS 80 22 234 14 23 6 40 80 87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed before shipment from factory.

EXxx-OMN0037CN

21 79E8 79E8 31208 10 5 20 3CF4 3CF4 15604 5 2.5 10 0 0 0 0 0 0 BCF4 C30C -15604 -5 -2.5 -10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

One-touch fitting No Refer to One-touch fitting part number information on page 51. 9 SX3000-115-2 Clip 10 11 Series SZ3000 JIS symbol SZ3A60 [N.C. valve x 2pcs.] 4 position dual 3 port valve SZ3A60 [N.C. valve x 2pcs.] 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 1 (P) SZ3A60K/With back pressure check valve 4 (A) 2 (B) SOL.b 5 (R) SOL.a 3 (R) 5 (R) 1 (P) 3 (R) 1 (P) SZ3B60 [N.O.valve x 2pcs.]

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

11 SOL.b Station 20 Station 20 24 11 24 24 SOL.a 3 SOL.b Station 5 3 SOL.b Station 5 SOL.a Station 4 15 SOL.a Station 4 15 Station 2 SOL.b 15 2 SOL.a Station 3 2 SOL.a Station 3 SOL.a 2 SOL.a Station 2 14 SOL.a Station 2 14 Station 1 SOL.b 14 1 SOL.a Station 1 1 SOL.a Station 1 SOL.a 1 The common polarity should be the same as the common specifications of the valve to be used.

VQ5000

A Unused A Unused A Unused A Unused A Unused A B A B A B A B A B A A A B A B A B A A A A 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 6 7 8 9 10 11 12 13 14 15 0 0 1 2 3 4 5 Type SC OMRON Corporation SYSBUS Wire System Type SD SHARP Corporation Satellite I/O Link System ADDRESS NO. STATION NO.

DOC1001322

display . 5-11 Pump operating condition display . 5-11 Tank fluid level . 5-12 Circulating fluid flow rate Circulating fluid flow rate . 5-12 Circulating fluid discharge pressure Press PV . 5-12 Compressor circuit High pressure side High Press. . 5-12 Compressor circuit Low pressure side Low Press. 5-13 Circulating fluid electrical conductivity DI PV . 5-13 Key lock condition display KEYLOCK

VFS

Flow Characteristics at the Number of Manifold Stations (Operated individually) Model Passage/Stations Station 1 Station 5 Station 10 b C [dm3/(sbar)] 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 1 4/2 (P A/B) Non plug-in type: 6 stations (Manifold base) VV5FS4-10-061-04 1 (2 position single) VFS4110-5D 5 (3 position exhaust center) VFS4410-5D 1 (Individual

15

20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 6.5 3.3 8 5 26 3 19 2 5 40 30 27 3.5 6 CY1S10-Z 7.5 12 31.5 6.5 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 8 4.4 10 5 33 6 28 2.5 6 40 34 45 4.6 6 CY1S15-Z 7.5 9.5 16.6 38 6.5 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 5.4 12 2 5 6 52 39 11 60 5.8 28 40 8 CY1S20-Z M6 x 1 M6 x 1 10 9.5 21.6 44 8.5 36 37.5 24 19 20 10.5 22 5.4 16 2 5.5 8

CHKD/CHKG

CHS CH2 Minimum Auto Switch Mounting Stroke CHA (mm) Related Products D-M9 D-M9V D-Y59 D-Y69 D-Y7P D-Y7PV D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-Z7 D-Z80 Auto Switch Mounting Number DD-Y7W D-Y7WV D-Y7BA 1 pc. 2 pcs. 5 5 10 10 15 5 10 10 15 15 Operating Range (mm) Auto switch models Bore size 20 25 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 4.5 4.5 4 7 5 5.5 7.5 11 D-Y59/Y69 D-Y7/Y7V

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

5 !6 Component Parts Component Parts No.

RHC

D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15 60 60 + 45 (n2) MI W S D-H7C 7 D-A3/A44 D-G39/K39 8 CEP1 D-C73C D-C80C D-H7C 10 15 65 9 9 9 15 + 50 ( ) n2 2 65 + 50 (n2) D-G5

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

CEx-OMG0106

Outputs Wiring 35 9-3-5. Solenoid Valve Wiring 36 Chapter 10: Timing Chart 3744 Chapter 11: Data Setting 11-1. Data Presetting 11-1-1. Data Classification & Content 45 11-1-2. Input Method 4548 11-1-3. Confirmation of Set Data 48 11-2. Program Setting 11-2-1. Input Method 4952 11-2-2. Confirmation of Input Data 52 11-3. Selection of Dip Switch 53 Chapter 12: Driving 12-1.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !