AC Servo Motor Driver (Pulse input type/Positioning type)

Servo amp lifier Driver (Note 7) (Note 7) CN1 CN1 (Note 2) 24VDC RA1 (Note 4, 9) 2 OPC 9 ALM Trouble (Note 6) 1 DICOM Travel completion 10 MEND RA2 13 DOCOM (Note 9, 11) (Note 13) Ready EM1 SON MD0 8 4 3 (Note 3, 5) Forced stop 11 RD RA3 Servo-on Electromagnetic brake interlock 12 MBR RA4 Automatic/manual selection DOG (Note 9, 10, 12) 25 Proximity dog 10m max. Point table No.

Manifold Specifications

L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 333.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360 13 19 398 387.5 376 11 20 423 412.5 392 15.5 L1 L2 L3 L4 3-3-93

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

CRBU

11-3-4.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

EXxx-OMZ0016

External terminals (including the FE terminal) and enclosure screws Insulation resistance 10 M or more 500 VDC External terminals (including the FE terminal) and enclosure screws EN61131-2 compliant 5f<8.4 Hz 3.5 mm Vibration resistance 8.4f<150 Hz 9.8 m/s2 Impact resistance EN61131-2 compliant, 147 m/s2, 11 ms Mounting Through hole for M4 screw (2 pcs.)

Micro Mechanical Valve Series VM1000

, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port) Symbol (B) 2 (A) 4 12 14 3 (EB) 1 (P) 5 (EA) 0.5 MPa supply 3.5 mm T.T. 2.0 mm O.T. 1.5 mm P.T. 20 N F.O.F. 3 x 4.5 mounting hole 5 x Rc 1 4 Roller plunger VFM250-02-06 VFM250-02-06S Panel mounting hole 15 polyacetal or head steel roller M18 x 1 Hexagon nut thick 11, across flats 27 Min. 3 Max. 11 M5 x 0.8 (Pilot exhaust port

CLA

1 14 40 " 56.5 15 25 SO 226 a 11 6 13.5 18 150 92 180 72 315 80 15 Series eLA Dimensions Rear Flange Type/CLAG Name plate \0 indICate locl

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

CE

94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

XM, XY

) 1 x 10-6 up to atmospheric pressure Operating pressure (Pa)(abs) Main exhaust valve 14 45 80 160 200 Conductance (L/s) Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10 {1 x 10-10} at ambient temperatures, excluding gas permeation (Standard material: FKM) Internal Leakage (Pam3/s) 1.3 x 10-11 {1 x 10-11} at ambient temperatures, excluding gas permeation

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

MU

x 0.8 depth 7.5 M5 x 0.8 depth 11 M6 x 1 depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Formulae L1 = 11n + 15.5 L2 = 11n + 55 n: Stations (max. 16 stations) L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 191.5 231 262.5 273 16 L1 L2 (L3 ) (L4 ) 26.5 66 87.5 98 37.5 77 100 110.5 48.5 88 112.5 123 59.5 99 125 135.5 70.5 110 137.5 148 81.5 121 150 160.5 92.5 132 162.5 173 103.5 143 162.5 173 114.5 154 175 185.5 125.5 165 187.5 198 136.5 176 200 210.5 147.5 187 212.5 223 158.5

MY2

6.5 31 129 4 30 130 4 57 153 61 149 60 150 11 8.5 8.5 90.2 239.8 94.2 235.8 93.2 236.8 Auto Switch Mounting When mounting an auto switch, insert it into the cylinders switch groove from the direction shown in the drawing to the right.

Air Slide Table Series MXQ

Maximum allowable moment: Mmax (Nm) Table 4 0.4 Pitch/Yaw moment: Mpmax/Mymax Stroke (mm) Roll moment: Mrmax 0.3 Stroke (mm) Model 10 20 30 40 50 75 100 125 150 84 10 20 30 40 50 75 100 125 150 0.2 MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 1.4 1.4 1.4 2.8 2.8 3.5 3.5 3.5 5.1 5.1 2.0 2.0 2.8 3.7 7.9 5.1 5.1 6.0 6.9 7.4 7.9 7.4 50 100 200 300 500 700 4.7 4.7 4.7 7.2 7.2 11 11 11 13 13 15 14

IMPACT BLOW GUN

.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

to 16 stations: W = 26n + 199 Note 3) SX3000 Weight W (g) n: Stations Lubrication Not required Unrestricted 150/30 Dust proof 2 to 10 stations : W = 54n + 227 11 to 16 stations: W = 54n + 264 SX5000 Mounting orientation Impact/Vibration resistance m/s Note) Note 1) Available with up to 16 solenoids.