Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

PF2A/PF2W

CM01-8DP4S DDK Ltd. 16-11-15 12 Series PF2D Dimensions PF2A703H/706H/712H Internal circuit and wiring example to are terminal numbers.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

M3 x 0.5 (P, R port) 2 (Bracket) 15 11 10 P R 22.1 6.7 7 9.2 L plug connector (L): 10-SYJ32M-L-M3 M plug connector (M): 10-SYJ32M-M-M3 M8 connector (WO): 10-SYJ32M-WO-M3 58.5 [60.7] Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15 39.1 [46.1] Approx. 300 (Lead wire length) 48.7 [50.9] 57.6 (2) 50.2 43.7 (2) (2) 13.5 13.5 13.5 15 15 15 22.1 22.1 22.1 Refer to page 646 for dimensions

IDU/IDF

15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Vacuum Unit Ejector / Vacuum Pump System

Refer to Fig.1) 3) Remove the junction box B (top) for all stations using a precision screwdriver. (Refer to Fig.2) (Remove the junction box B from D side.) 4) Remove all connectors mounted to the junction box B.

Step Motor Controller (Servo / 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

Environment

C A B C A B C Work load [kg] 2.5 5 10 4.5 9 18 1.2 2.5 5 Pushing force 65% 85% 95% Set value of pushing force [%] Ambient temperature Set value of pushing force* [%] Duty ratio [%] Continuous pushing time [minute] 25C or less 85 or less 100 40C 65 or less 100 85 50 15 * Set values for the controller. 230 AC Servo Motor Electric Actuator/Rod Type LEY/LEY-X5 Series Dust-tight/Water-jet-proof

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

RD 49 24 INP RA4 PULSE F + 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R + 17 S/S NG 36 PULSE R 18 4 LA A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common Plate SD 34 LG Control common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD

One-touch Fittings

9 1/2 15 to 30 14 to 15 2) The gasket can be reused up to 6 to 10 times.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

(Refer to pages 15-6-3 to 15-6-5 for details.)

CQM

16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

16 17 12 13 14 15 16 (DIN rail dimension) (7.5) Manual override In case of locking type, ( turn after pushing in. ) 2-One-touch fitting (ports P, R) Applicable tube O.D.: 8 (L4) L3 8 U side D side 52.9 <53.6> 2n1-M5 x 0.8 (ports A, B) [46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5

Air Slide Table Series MXJ

Reed Auto Switch: D-A9 (mm) Stroke B A Stroke C Stroke Model 5 10 15 20 5 5 10 10 15 15 20 20 MXJ4 MXJ6 MXJ8 9 4 14 0.5 14 0.5 3 9 4 14 0.5 14 0.5 18 -0.5 10 5 25 0.5 9 4 14 -0.5 14 -0.5 25 0.5 Solid State Auto Switch, 2-Color Indication Solid State Auto Switch: D-M9, D-M9W (mm) Stroke B A Stroke C Stroke Model 20 15 10 5 20 15 10 5 15 20 10 5 MXJ4 MXJ6 MXJ8 4.5 4.5 18 18 8 13 7 3.5

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 3 5 11-/22-MXP12 11-/22-MXP12 11-/22-MXP16 11-/22-MXP16 99 Air slide table MXP/MXPJ6 11221122Dimensions / MXPJ6 5 C 11-/22-MXPJ6-5 Depth 2.5 2.5 7 H 5 10.05 3 3.5 4M3 x 0.5 depth 3 +0.030 0 D B 16.5 3.5 18 14 13 20 6 +0.030 0 Depth 2.5 2.5 6 E 5 2-M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Auto switch operating range Auto switch operating range 15 40.5 20.5 Model Model 25 50.5 30.5 30 59 39 10 35 15 25 46.5 34.5 30 55 43 10 31 19 15 36.5 24.5 A B A B A B A B A B A B 11-/22-MXP10 11-/22-MXP10 11-/22-MXP12 11-/22-MXP12 3 5 11-/22-MXP16 11-/22-MXP16 832 Air Slide Table MXP/MXPJ6 11221122Dimensions: MXPJ6 5 C 11-/22-MXPJ6-5 depth 2.5 2.5 7 H 5 3 3.5 4 x M3 x 0.5

HRX-OM-Y120

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure *1 Alarm flag 1 6 Air exhaust fan failure *2 7 Reservation 8 CH1 abnormal rise of circulating fluid