Process Pump Series PA3000/5000/PAX1000 Series PB1000

10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.

Compact Guide Cylinder

V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 21 Model Selection MGPK Series

Auto Switch Guide

Contact protection box CD-P11 LED Brown OUT Brown Choke coil Resistor Reed switch Zener diode Surge absorber OUT Blue Blue Weight (g) D-A73 D-A72 D-A73 D-A80 Auto switch model 10 10 10 0.5 Lead wire length (m) 47 47 47 3 LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 77 5 Resistor Reed switch Zener diode Dimensions OUT () Blue Blue Indicator light D-A80 without indicator

CE

) 24VDC (10%) 24VDC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 24VDC (10%) 100 to 240VAC (10%) Power consumption 20VA or less 10W or less 20VA or less 10W or less 20VA or less 10W or less 10W or less 20VA or less Between case and AC line: 1500VAC for 1 min.

Table of Contents - Tubing

TUB-21 Related Equipment .

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-9 10 Series VP3145/3165/3185 Dimensions VP3165-DZA1-X81 21 MAX.10 146.5 113 87.4 21 EXH.1 51 71 EXH.2 95 Manual override (Non-locking) Applicable cable O.D. 6 to 8 Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) 2-8.5 (Mounting hole) EXH Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

VQ4000

38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External pilot port 19.5 (21) 19.5 (21) Rc1/8 PE port Rc1/8 PE port 19.5 (21) 19.5 (21) 31 31 5

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Residual pressure relief 3 port solenoid valve Applicable air combination Spacer Spacer with bracket Piping adapter Silencer wAC30-A Air filter + Mist separator + Regulator (AF30-A) (AFM30-A) (AR30-A) VP517 AC25-A, AC30-A Y300-A Y300T-A E300-03-A AN30-03 AN302-03 *1 Connection threads are not available for the residual pressure relief 3 port solenoid valve.

VKF300

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing August, 1998 D-SMC.L.A. P-69.5 (JT)

Title not found

s1 be a 3 pos lon vave assembly Individual SUP/EXH spacer Series SVl000 sv1000 Spacer type Port s ze for Ser es SV2000/3000/4000 sx3000-22 I (M2 x 39 5) sv2000-21-6 ([I3 x 46) sv3000 21-3 (N44 x 5s) sY7000-r 1-r 1 sv2000 sv3000 sY5000 1r 15 sY9000-11-2 5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported flow Cv p c h (mm) I\Ietal seal vQz10m Up to o5L) voz2m0 Up to o80 Up 10 ol00 voz300o

1

Mounting bracket Minimum order quantity Bore size [mm] Contents 20 25 32 40 Mounting nut (M5, Rc1/8, NPT1/8) *1 1 JSN-020B JSN-032B JSN-040B 1 mounting nut Rod end nut 1 NT-02 NT-03 NT-04 1 rod end nut * Refer to page 10 for dimensions. *1 Can be used for M and MZ only.

Air Cylinder NCQ7 Series Compact Cylinder

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

asilltr

(Applicable to all models) (Ex.)A731 D-A731 Ac ces s sorie sl Part s Li st 056 (e^6) 075 (3/4) 106 0n/16) 150 (1-1/2') 2OO (2') 25O (2-1t2',) 300 (3') 400 (4"' Jam Nd JM.O1 JM-02 JM-03 JM.O4 JM.O5 JM-05 JM-08 JM-10 Single Rod Clevis RCS-015 BCS-02 RCS-03 RCS-04 HCS-o5 RCS-05 RCS-08 RCS-10 Double Rod Clevis RDS-o15 RDS-02 RDS-03 RDS-04 RDS-05 RDS{5 RDS.08 RDS-10 w/ dn(l). rcteinino rin6{21

Residual Pressure Release Valve

12 D L1 L2 Q W M AQ 0.2 KEA06 KEA08 KEA10 KEA12 12.8 15.2 18.5 20.9 24 27 29 31 21 23 26.5 28.5 5.3 6 6.8 7.5 13 15.4 18.7 21.1 17 18.5 21 22 10 15 22.5 29.5 ASV 0.05 MPa 0.1 0.05 AK 10 8 7 6 4 2 0 With One-touch fitting with a push button guard: KEB Release time S Release time of pressure in the cylinder Body (Red) Residual pressure release push button (Red) VCHC D With One-touch fitting

Dedicated Controller Series LC1 Uniaxial Type

1-RD 12 7.5 7.5 20 21 29 30 Cable length 02 2m 04 4m 03 3m 05 5m PC Controller Controller connector The connector used for CN1 (control terminal) and CN2 (generalpurpose input/output).

CEx-OMQ0010

(4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () ()

Auto Switch Guide

D-A73H LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Zener diode Weight OUT () Blue Blue (g) D-A72H D-A73H D-A76H D-A80H Auto switch model D-A76H 10 10 11 10 0.5 Lead wire length (m) 47 47 52 47 3 DC (+) Brown 77 5 LED (+) Resistor Load Reed switch DC power supply OUT Black Reverse current prevention diode Dimensions () DC () Blue D-A7H, D-A80H D-A80H