Flow Sensor Series PFMV 2 x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.
External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.
Terminal no. 16 16 43 43 Length indication label Length indication label 10 11 19 10 9 2 1 2 1 20 SMC SMC 33.4 33.4 030 015 41 41 25 Approx. 10 Approx. 10 17 8 18 8 7 6 14 26 15 9 2 x M2.6 x 0.45 For N, 2 x No. 4-40 UNC For N, 2 x No. 4-40 UNC 2 x M2.6 x 0.45 Socket section Socket section D-sub Connector Cable Assembly D-sub Connector Cable Assembly Cable length L Assembly part no.
IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5
Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,
C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM
Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 505 Applicable Fluids Material and fluid compatibility check list for High
Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)
10 7.5 10{8.7} 6.1 7.3 7.3 6.3 8.1{7.4} 5.6 8.9 8.9 7.1 14{8.3} 5.7 12 12 7.4 13{8.9} 6.1 2.2 2.2 1.8 0.33 0.34 0.43 0.43 0.43 0.33 0.34 0.43 0.43 0.43 0.51 0.52 0.66 0.66 0.66 0.51 0.52 0.66 0.66 0.66 0.56 0.57 0.71 0.71 0.71 VFA5120-02 2 1 4 3 VFA54 20-02-X1 5 0.45{0.47} 0.37 0.49 0.49 0.38 2.2{2.1} 1.4 2.9 2.9 1.9 Base mounted (1) Body ported 0.51{0.50} 0.44 0.44 0.43 0.40 2.0{0.78} 2.4
(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s
(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s
20 Suction flow rate Suction flow rate 20 20 20 20 10 10 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 14 12 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] Dimensions 2 x Applicable tubing O.D. 6 10.4 9.7 L1 L2 13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection
Mtrual opralor assmbly $llh Odng PA0@1 PBO{01 I 1 Raplacdr3nl coll only-4.C. sol6nold 1Al0 aot@ 1O/@ cl2A{9 cl2A-10 cl2A.1t 10 I Sol6noi, aBsmbly-4,C. conplst wllh coll, 120/ao 24(m0 a0,t0 @14O9 @ta-10 cora-1t At2A{9 412A,10 1 l '| NXT01010 NXT0307.3 12 1 NXTO1G12 NXTO1G12 13 @t|vo scr6w .nd locl wa5hsr xTt)10-21 xT010.21 DIRECTIONAL AIR YALVE MANIFOLD ASSEMBLY SERIES NVS 3115, 3125 NVS 3135
8.5 11 23 38 10 VXZ2230-02 VXZ2230-03 VXZ2240-04 VXZ2350-06 1.9 2.4 5.3 9.2 46 58 130 220 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 0.7 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.0 1.5 10 15 20 0 VC Effective area Air Flow characteristics AC DC AC DC AC Water Air Max. operating pressure differential (MPa) Oil DC VXZ2360-10 25 1.0 0.7 1.0 0.7 0.7 0.7 290 12 215 1.5 1480 0 1 Min. operating
28 'Vacuuh to 30o FSIG (20 Kglrcm?).
28 'Vacuuh to 30o FSIG (20 Kglrcm?).
1.2 Weight (kg) 0.10 0.28 1.3 Particulate Generation Characteristics Flow-through Characteristics Particle concentration (particles/mL) Particle diameter: 0.1 m or larger 400 1000 350 Value of specific resistance to that of supplied DI water Resistivity (km) 300 100 250 200 150 10 100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time (min) Test method
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Note) Bolts (M4 x 0.7 x 20, 2 pcs.) Model Applicable manifold type VO317 Common or individual exhaust Note) It is not applied to Continuous duty type. Refer to the accessories on page 4-7-14. 4-7-9 10 Series VT317 Standard Specifications Type of actuation Direct operated type 2 position single solenoid Air Fluid Operating pressure range 0 to 0.9 MPa 10 to 50C (No freezing.