High Vacuum Angle Valve, XL Series

Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)

Turntable Cylinder Series MGT

Series MGT Turntable Cylinder Operating Conditions Allowable eccentric load 300 200 l 200 P = 0.5MPa MGTL63 P = 0.5MPa 100 MGTM63 m 100 Larger than 100st 50 Load weight m(kg) Load weight m(kg) 40 50st or smaller 75, 100st 30 Larger than 50st 20 50 40 25, 50st 10 30 5 4 3 2 20 10 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) Eccentric distance

CNG

18 5.5 6 4 8 5 26 20 to 200 15.5 to 200 22 17 45 103 1/8 66 16.5 10 14 2 96 10 25 6.5 9 7 10 6 31 20 to 300 19.5 to 300 22 17 45 104 1/8 67.5 20 12 18 2 97 10 25 6.5 9 7 10 6 38 20 to 300 19.5 to 300 30 19 52 112 1/8 75 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 20 to 300 301 to 500 301 to 500 27 to 300 (mm) Bore size (mm) 20 25 32 40 P K KA MM NA PG PH PL S TA TDe8 TE TF TH TR TZ TS

Refrigerated Air dryer Series IDU/IDF

(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95

Electric Rotary Table

(mm) Size Max. work load (kg) Stroke (mm) High torque Basic 0.2 0.8 6.6 280 High torque Basic 10 30 50 0.3 1.2 10 6 10 1 2 25, 50, 75 6 10 1 2 25 50 420 Gripper Step Motor (Servo/24 VDC) 2-finger type Long stroke 2-finger type With dust cover 3-finger type 2-finger type Series LEHZ Series LEHS Series LEHZJ Series LEHF CAT.ES100-77 Series LEHZ Series LEHZJ Series LEHF Series LEHS Max. gripping

1.63

D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Electric Actuator Miniature Rod Type Miniature Slide table Type

Electric Actuator / Miniature Rod type 2.1 Specification Model LEPY 6 LEPY 10 Stroke [mm] 25, 50, 75 Screw lead [mm] 4 8 5 10 Basic 14 20 7 10 25 50 12.5 25 Pushing force [N] Note1) Note 6) Compact 24 40 12 20 Horizontal Basic 2 1 6 3 Compact 4 2 Work load [kg] Note2) Note3) Note6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Basic 10 to 150 20 to 300 Note4) 10 to 200 20 to 350 Note4

Water-cooledThermo-chiller

Specific heat C [kg/m 3] [g/L] ([kcal/kgC]) [J/(kgK)] 10C 1.10 x 10 3 3.02 x 10 3 0.72 20C 1.08 x 10 3 3.15 x 10 3 0.75 50C 1.06 x 10 3 3.27 x 10 3 0.78 80C 1.04 x 10 3 3.40 x 10 3 0.81 Water Density : 1 x 10 3 [kg/m 3] [g/L] Specific heat C: 4.2 x 10 3 [J/(kgK)] (1.0 [kcal/kgC]) 107 Thermo-chiller Series HRW Fluorinated Fluid Type SEMI How to Order 002 H HRW Fluorinated FluidType Option

Moisture Control Tube

Single Piston Actuator size Recommended model Piping condition Bore size (mm) Stroke (mm) Tube O.D. 2 mm IDK02-100 IDK02-200 Tube O.D. 4 mm IDK04-100 IDK04-200 Tube O.D. 6 mm IDK06-100 IDK06-200 Tube length (m) 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 5 10 2.5 All strokes 4 All strokes Less than 10 6 10 or more Less than 10 8 10 or more Less than 10 10 10 or more Less than 10

NCA1

Please See Below for How to Order Piston Rod Assembly 7 Rod Bushing Bronze casting Available only as an Assembly Please See Rod/Head Cover NC1A400-10-124 NC1A200-10-124 NC1A250-10-124 NC1A325-10-124 8 Cushion Valve Carbon steel NC1A150-10-124 9 Tie Rod Carbon steel Please See Below for How to Order Tie Rod NCA325-13-Q6311 5008-131 NCA325-31-Q6311 NCA200-13-Q6309 5008-93 NCA250-13-Q6309 5008

CG5-S

10 M10 x 1.25 24 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 35.5 1/8 to 300 40 10 M14 x 1.5 24 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 44 1/8 to 500 50 14 M18 x 1.5 40 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 55 1/4 to 600 63 14 M18 x 1.5 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 69 1/4 to 600 80 22 M22 x 1.5 60 40 37 32 50 75 25 28 20

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 10 20 27 + Stroke 15.5 29 42.5 + Stroke 10 5 20 5.5 18 Note 3) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M8 x 1.25 47 1 25.5 10 36 Rod end nut 12 Flat washer 8 15 14 7 7 10 25.5 29.5 + Stroke 18.5 36 48 + Stroke 13 5 25 5.5 19 Note 4) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH13BL-08-10 (Mounting hole) Applicable tubing diameter M I J K L M N O P Model ZH05BS-06-06 ZH05BL-06-06 ZH07BS-06-06 ZH07BL-06-06 ZH10BS-06-06 ZH10BL-06-06 ZH13BS-08-10 ZH13BL-08-10 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 57 12.8 3.2 24 5.8 2 31 60 12.8 3.2 26 5.8 2 32 60 12.8 3.2 26 5.8 2 32 75 15.3 4.2 28 7.5 3 38.5 75 15.3 4.2 28 7.5 3 38.5 57 12.8 3.2 24 6 6 6 6 6

IZx-OMP0064

Recommended piping port size Emitter cartridge Bar length mm One-touch Applicable tube type fitting symbol O.D. mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

75 Applicable cord O.D.

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

25 Tubing T, TU P. 26 Floating Joint/Stainless Steel Type JS P. 27 Features 2 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10mm 16mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Mounting B L F D Basic type Axial foot type Front flange type Double clevis type CJ5 L 16 S R 60 Without Auto Switch CDJ5 L

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Mounting hole Relief port (mm) H G FZ FT E F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 50 45 45 41 75 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 19.5 19.5 15.5 . 40 40 34 17 17 13 60 60 60 40 32 25 20 20-0.033 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 22 200 to 1000 32-0.039 0 66 21 52 247 217 204 200 191 P S H2 H1

Guide Table Series MGF ø40, ø63, ø100 1

MGF40 D-XC79 Machining tapped hole, drilled hole and pin hole additionally MGF63 30, 50, 75, 100 -X MGF100 20Minimum Stroke for Auto Switch Mounting Data (mm) Applicable auto switch No. of auto switches mounted D-Z7 D-Z8 D-Y69 D-Y7V D-Y59 D-Y7 D-Y7W D-Y7BAL D-Y7WV 10 5 10 15 20 1 pc. 15 10 10 15 20 2 pcs.