1 Specifications CJ1 Stroke adjustment symbol Stroke adjustment symbol Series CJ2 Series Stroke adjustment range (mm) Series Stroke adjustment range (mm) CJP 0 to 15 CJ2 CQ2 CQS 0 to 10 CM2 CG1 MB MB1 CA2 CS1 Bore size (mm) 10 16 HA 37 37 S 49 50 ZZ 114 115 CJ2 0 to 25 A 0 to 25 A MGG MGC S + Stroke ZZ + 2 x Stroke HA + Stroke 0 to 50 B CM2 B 0 to 50 0 to 10 A MGP 0 to 25 B Note) Specifications
] CMX CDV = 0 10 S = 0 10 1/n Pb = 10 10-3 10 1/2 10 = 20 1 Hence, set 20 to CMX and 1 to CDV.
A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12
N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8 ZL ZP13UT ZP13CT 13 13 14 14 1.5 1 ZP16UT ZP16CT 16 16 17 17 ZY ZQ
Connection threads Rc/NPT K E E F G L1 L1 L2 Y H M B Model L1,L1 2 x B LQ3R11-F LQ3R12-F LQ3R21-F LQ3R22-F LQ3R31-F LQ3R32-F LQ3R33-F LQ3R34-F LQ3R35-F LQ3R36-F LQ3R41-F LQ3R42-F LQ3R43-F LQ3R51-F LQ3R52-F LQ3R53-F LQ3R61-F LQ3R62-F LQ3R63-F 4 3 M 11 14 3.5 10 9 28.5 27.5 19.5 18.5 4.8 9.5 1/8" M F Y 20 18.5 1/8" 1/4" H 6 16 20 4 17 16 34.5 33.5 6 12 22 21.5 G (E,E) H 10 8 10 8 10 8 KK 23
G G 4 x J Width across flats KA MM RY D E d e C B H1 10.2 L f B1 AL h + L C B A K ZZ + L + Stroke F N RT N M S + Stroke H ZZ + Stroke (mm) M Bore size Stroke range AL B B1 C D E F G H1 J K KA (mm) A (mm) Without reinforcement ring With reinforcement ring 40 50 63 80 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21
(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
SMC SMC Pitch = 21 20 10 10 10 Manual override (Simply turn the locking type override.) L3 L2 L1 4 10 Vacuum switch ZSE2 8 Pressure setting trimmer 15 (Needle fully open) Filter Body (Air operated type) (ZX1A) 18 Adapter B M5 Pilot port 9.3 (44) M5 External release port 13 22 35 37.4 45.4 Adapter D 58.3 Individual spacer ZX1-R1 Release valve VJ314 Pilot valve for supply (N.C.)
Position D-F5, D-F5W D-J5, D-J59W D-F59F, D-F5BAL D-Z7, D-Y59, D-Y7BAL D-Z80, D-Y69, D-Y7W(V) D-Y7P(V) D-A5 D-A6 D-A59W D-F5NTL D-A3, D-G39 D-A44, D-K39 D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5
VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .
/40-06/50 2-10 I 10 I G H F E X H .
160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)
Control Bias Pn144 0 to 10 0.1% 1000 Immediately Tuning (Reverse Direction) 2 Vibration Suppression 1 Frequency A Pn145 10 to 2500 0.1 Hz 500 Immediately Tuning 2 Vibration Suppression 1 Frequency B Pn146 10 to 2500 0.1 Hz 700 Immediately Tuning Model Following Control Speed Feedforward Compensation Pn147 2 0 to 10 0.1% 1000 Immediately Tuning 2 2nd Model Following Control Gain Pn148
Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.
PART NUMBER ORIFICE SIZE 1/16 X 10-32 1/8 X 10-32 .003 B-062-003 B-125-003 .004 B-062-004 B-125-004 SPECIFICATIONS .005 B-062-005 B-125-005 ACCURACY: See "Precision Orifices" MATERIAL: FDA Approved Polysulfone/Polycarbonate MAX.
B 15 CJP 10 H4 Made to Order Refer to the table below. Pin cylinder Mounting Rod end thread B S Panel mount type Embedded type Nil B With thread Without thread Bore size Hose nipple (Applicable to the mounting type B panel mount type (6 to 15) only.) 4 6 10 15 4 mm 6 mm 10 mm 15 mm (Hose nipple is not attached to embedded style.)
D-A59W D-Z7/Z80 D-M9/M9W D-M9A Bore size (mm) Bore size (mm) D-Z7/Z80 D-A5/A6 A B A B A B A B A B A B Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs 40 50 63 80 100 40 50 63 80 100 11.5 8.5 8 5 13 10 5 2 27 28.5 27 34 35.5 28.5 29 27 13 8 9.5 4.5 14.5 9.5 6.5 1.5 33 33.5 33 38.5 39.5 34.5 33 33 4.5 0 8.5 3.5 47.5 38.5 14.5 9.5 11 6 16 11 8 3 38.5 38 38.5 43.5 45 38.5 28 37 8.5 3.5 12.5 7.5 54
Valve Mounted Cylinder Series CV/MVGQ 10, 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Series Variations RE A B Standard variations Bore size (mm) Series Action Page REC With air cushion With strong scraper Built-in One-touch fitting With auto switch Built-in magnet CX Series CVJ5 CY 10 16 10-15-4 Double acting MQQ M RHC Series CVJ3 MK(2) Single acting (Spring return) (Spring extend) 10 16 10-
Mist Separator, Exhaust Cleaner For VBA40A-04 For VBA42A-04 For VBA43A-04 Model For VBA10A-02 For VBA11A-02 For VBA20A-03 For VBA22A-03 Description Mist separator Exhaust cleaner AM250C-02 AMC310-03 AM450C-04, 06 AMC510-06 AM550C-06, 10 AMC610-10 Note) Refer to page 1022 for air tanks, page 223 for mist separators and Best Pneumatics No.7 for exhaust cleaners.