air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Orifice diameters: ø4, ø8, ø10, ø16, ø22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100° C, Ambient temperature: 0 to 60° C, Tubing O.D.: Metric size – 6, 10, 12, 19, 25;  Inch size – 1/4", 3/8", 1/2", 3/

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Orifice diameters: ø4, ø8, ø10, ø16, ø22, Flow characteristics: 0.35 to 8 Cv, Operating pressure: 0.3 to 0.5 MPa, Fluid temperature: 0 to 100° C, Ambient temperature: 0 to 60° C, Tubing O.D.: Metric size – 6, 10, 12, 19, 25;  Inch size – 1/4", 3/8", 1/2", 3/4

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.59 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67 lb

(swivel elbow -5 to 150°C), Applicable tube material: FEP, PFA, modified PTFE, nylon, soft nylon, polyolefin, polyurethane, soft polyurethane, hard polyurethane, soft polyolefin, antistatic soft nylon, antistatic polyurethane, Grease-free, FITTING, SWIVEL ELBOW, INSERT FITTING, STAINLESS STEEL, 909, 25 lb

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C, VQ VALVE, 4/5 PORT SOLENOID VALVE, J55, 0.67000 lb

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?

(C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525?

10%3019Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

Series: LEY, Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover), Rod End Thread: Rod End, Female Thread, Mounting: Ends Tapped/Body Bottom Tapped, Parallel, In-line), Actuator Cable Type, Length: R3 (3m), Controller

Size: 40, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included), Mounting: Ends Tapped/Body Bottom Tapped, Top Mounting & In-line, Actuator Cable Type, Length: R5 (5m), Controller: C91 (Ether Net/IPâ„¢), Mounting: 8 (DIN Rail)

Size: 40, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover)

Size: 40, Motor Mounting Position: Top Mounting, Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm), Stroke: 100mm, Motor Option: C (w/Motor Cover), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut is Included)

Series: LEY, Size: 16, Motor Mounting Position: Top Side Parallel, Motor Type: G (High Performance Battery-less Absolute, Step Motor, 24 VDC), Lead: C (Size 16: 2.5mm, Size 25: 3mm, Size 40: 4mm), Stroke: 50mm, Motor Option: C (w/Motor Cover)

less to 75 or less, Ambient & fluid temperature: metal seal -10 to 50°C; rubber seal -5 to 50°C 4/5 PORT SOLENOID VALVE.