Default: Gain 9 Bit Bit 3, 2, 1, 0 Value Bit 3 2 1 0 Setting 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 * 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 16 - Parameter index 0x43 Parameter name Sensitivity
Status Condition 0 No supply voltage SP Status of solenoid power supply 1 Supply voltage OK 0 Short circuit DI Status of sensor power supply 1 Normal Output area mapping Output data MSB LSB MSB LSB Offset (word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -28No.EX-OMK0004-B Output No. assignment Combinations of output data and valve
pilot actuation reset (Rc, G, NPT, NPTF 1/8) FLUID OUT 3/8", 1/2" 8 190 30 14 110 AIR SUP. 84 81 AIR E x H. 67 13 30 26 10 FLUID IN 3/8", 1/2" EXH (P2) Rc, G, NPT, NPTF 1/4
V 1075 Series ZL212 Construction 5 1 8 2 10 9 3 7 4 6 Description Part no. Note Component Parts Replacement Parts Description Material No. No.
Bore size Standard stroke (inch) Max. stroke (inch) (mm) (inch-Nominal) 2, 3, 4, 5, 6, 8, 10 2, 3, 4, 5, 6, 8, 10 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 1-1/4" 32 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80
6 () EX600-DYF No. 1 LED 2 () 3 4 5 () -35No.EX-OMN0035CN-A (1)EX600-DYB EX600-DYPB EX600-DYNB 1 NC 24 V() 2 2 2 3 0 V() NC 4 1 1 5 FE FE M12 (4 ) EX600-DYPB EX600-DYNB 1 1 24 V NC 2 2 2 2 DC24 V DC24 V 3 3 NC 0 V 4 4 1 1 5 5 FE FE FE FE IP67 OFF ON SI -36No.EX-OMN0035CN-A (2)EX600-DYE EX600-DYPE EX600-DYNE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 NC 11 NC 12 NC
When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.
Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 Series MQM is not auto switch capable. Mounting Bracket/Accessories L: Foot Note F: Front flange G: Rear flange C: Single clevis D: Double clevis Mounting bracket B: Basic (1 pc.) (1 pc.) (2 pcs.) (1 pc.)
Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.
kPa 10 to 105 kPa 0.001 0.1 0.001 0.001 0.01 PSE564 PSE574 0 to 500 kPa 50 to 525 kPa 0.001 1 0.01 0.01 0.1 PSE530 PSE540 PSE560 PSE570 0 to 1 MPa 0.105 to 1.05 MPa 0.001 1 0.01 0.01 0.1 PSE575 0 to 2 MPa 0.105 to 2.1 MPa 0.001 1 0.01 0.01 0.2 PSE576 0 to 5 MPa 0.25 to 5.25 MPa 0.01 0.1 0.1 1 PSE577 0 to 10 MPa 0.5 to 10.5 MPa 0.01 0.1 0.1 1 0 to 1.6 MPa 0.105 to 1.68 MPa 0.001 1 0.01
Internal data error. 16-3-10 10 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 1: Initial Setting 1 Channel selection MPa kPa OUT1 OUT2 CH 1 2 3 4 CH2 CH3 CH4 CH1 PRESSURE ZSE ISE SET PSE SET button and hold for 2 seconds or longer.
T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
T 24 VDC (10-28 VDC) 24 VDC (10-28VDC) 24 VDC: 1 mA or less 24 VDC: 1oFA or less 24 VDC: l0|lA or Less 24 VDC: 1 mA or less Rd: ( ri Best 1 mS or less $erios CLA A||l0 $t/t|ilc SolidState Switch .,:,. 24 VDC (10-26 VDC) 28 VDC 1.5 V or less (1omA: 0.8 V or less) 24 VDC: 10!
( ) f. g.( ) h. i. j. k. l. 4. 4. 4. 4. 5. 5. 5. 5. 6. 6. 6. 6. 7. 7. 7. 7. 2. 2. 2. 2. 8. 8. 8. 8. ,, 1. 1. 1. 1. 9. 9. 9. 9. 2. 2. 2. 2. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2
B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the
20MGGL 25MGGL 32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30
Lead wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 16 11 20 17 Multi-connector pin arrangement DIN rail mounting bracket White Black Black Red Red Red Black Black White Pin no. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations 3 (a) SOL
4 2 5 A 10 x 8 3/4" x 5/8" 5 1 5 B 19 x 16 1/2" x 3/8" 5 2 6 A 12 x 10 1" x 7/8" SMC 6 1 6 B 25 x 22 3/4" x 5/8" 6 2 19 x 16 : Basic size : With reducer Note) Please select an isometric fitting with the same size as the fitting at the flow sensor.
MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.
Max speed Retract 6 PV 7 SV Less than 5% 8 Error status 5%-10% 9 Loop current 10%-30% 10 Travel distance 30%-50% 11 Rod friction count 50%-70% 12 Movement area 70%-90% 13 Cal select status 90%-95% 14 Cal Type more than 95% total *1-3-5-5 "Setting monitor" is only reading 6 5.