Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

3 x 5 0 depth 10 (A, B, C common view) M5 x 0.8 thread depth 5 16 70 (76) Vacuum suction port 11 25 6 x M5 x 0.8 thread depth 10 (A, B, C common view) 2 4 5-0.03 0 5-0.03 0 12-0.05 0 Open: 37, Closed: 19 2 x M5 x 0.8 thread depth 10 (Thread for mounting attachment) 25 25 7 7 10 10 With Auto Switch: MDHR2-30R 11221122MDHR2-30E port location B 3 x M5 x 0.8 thread depth 10 P.C.D.43 (Mounting

CV/MVGQ

15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/

MHS

M40.7 2.1 8 MHSJ3-20D MHSH3-20D M40.7 2.1 8 MHSJ3-25D MHSH3-25D M40.7 2.1 8 M40.7 2.1 8 MHSJ3-32D MHSH(J)3-32D M50.8 3.2 10 M40.7 2.1 8 MHSJ3-40D MHSH(J)3-40D M50.8 3.2 10 M50.8 3.2 10 MHSJ3-50D MHSH(J)3-50D M61 7.3 12 M61 7.3 12 MHSJ3-63D MHSH(J)3-63D M81.25 18 16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(

3

Body material Port size Orifice diameter e VXS2 3 A w B 5 Body material C37 Port size 1/4 e A Orifice diameter 10 Step 3 Select electrical specification.

Electromagnetic Digital Flow Switch

Note Weight Lead wire and M12 connector LFE-1-A3 Lead wire length 3 m Approx. 175 g Option Part no. Note Weight Bracket LFE-1-D Tapping screw for LFE1 (3 x 10), 4 pcs. Approx. 45 g LFE-2-D Tapping screw for LFE2 (3 x 10), 4 pcs. Approx. 70 g LFE-3-D Tapping screw for LFE3 (3 x 10), 4 pcs.

CC

The speed will be approximately 1.4 times the date given on page 10-17-3.

Multi-channel Digital Sensor Monitor

Measurement mode (Initial setting is completed) Perform the setting with the 3 step setting mode, simple setting mode and function selection mode. -24No.PS-OMW0005-C 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps. Use this mode if the product is to be used straight away, after changing only the set values.

VQ20/30

Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No. L 6 8 11 13 15 17 20 22 24 27 29 31 34 36 38 40 43 45 47 50 85.5 110.5 148 173 198 223 260.5 285.5 310.5 348 373 398 435.5 460.5 485.5 510.5 548 573 598 635.5 Series VQ30 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.

IDX-OM-V022

. 1-5 1.4 LIMITED WARRANTY AND DISCLAIMER/ COMPLIANCE REQUIREMENTS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 NAME AND FUNCTION OF PARTS . 2-1 Chapter 3 Transportation and installation . 3-1 3.1 TRANSPORTATION . 3-1 3.2 INSTALLATION . 3-2 3.2.1 Environment . 3-2 3.2.2 Anchorage . 3-2 3.2.3 Air piping. 3-3 3.2.4 Drain tube . 3-4 3.2.5 Electrical wiring . 3-5 3.3 CAUTIONS ABOUT REINSTALLATION

EXxx-OMU0020EN

Table. 7-3 Digital input allocation and the process data Connector position Connector designation X0 X1 X2 X3 X4 X5 X6 X7 Pin 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 Input Pin 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 -41No.EX##-OMU0020-A 7.5.

New

Test sampleVXFA21A (Port size 3/4) VXFA22A (Port size 1) VXFA23A (Port size 1 1/2)VXFA24A (Port size 2) VXFA25A, B (Port size 2 1/2) VXFA26A, B, C, D (Port size 3) VXFA27B (Port size 3 1/2) VXFA28B (Port size 4) Test sampleVXF21A (Port size 3/4) VXF22A (Port size 1) VXF23A (Port size 1 1/2)VXF24A (Port size 2) VXF25A, B (Port size 2 1/2)VXF26A, B, C, D (Port size 3) VXF27B (Port size 3 1/

Clean Gas Filter

drop MPa Inlet pressure IN AT 0.01 76 22 IDF IDU 0.1 MPa 0.7 MPa IDF FS 68 19 Width across flats 0.001 0.5 MPa IDFA IDFB Model A Rc 1/4 Rc 3/8 SFC100-02 SFC100-03 IDH 0.0001 1000 1 10 100 ID Flow rate L/min (ANR) SFC102-02: TSJ 1/4 (Tube Swage Joint) SFC102-03: TSJ 3/8 (Tube Swage Joint) IDG IDK Nut Rear ferrule AMG 2 x A Front ferrule AFF AM IN 76 22 AMD AMH 98 19 Width across flats AME

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Digital Pressure Switch

For the first operation, perform a zero-clear without pressure at measurement mode. -24No.PS-OMU0006-D 3 Step Setting Mode 3 step setting mode In this mode, the set values can be input in just 3 steps. Use this mode if the product is to be used straight away, after changing only the set values. (The current pressure value is displayed on the main display.)

Low-Speed Rotary Actuator

3-wire(PNP) Grommet Yes M9PWV M9PW (2-color indicator) PLC 2-wire 12V M9BWV M9BW M9NAV*1 M9NA*1 3-wire(NPN) 5V, 12V IC Water reisstant circuit 3-wire(PNP) M9PAV*1 M9PA*1 (2-color indicator) 12V M9BAV*1 M9BA*1 2-wire 3-wire auto switch 5V A96V A96 NPN equiv.

Cylinder with Lock Series CLS

0 i o @1 @0 @3 q w !9 %7 $1 $2 $3 $6 %2 %3 %4 %6 $8 $9 ^6 $0 #3 y u !1#1 @9 #4^2^7^5^1 ^3 ^4 ^8 #0 @5 #2 $5 $4 %0 %1 t y CLJ2 !2 !1 !3 u CLM2 !4 !6 !7 CLG1 !5 CL1 e !8 r ^2 t #6 #7 #8#5#9 $7 %5 ^0 MLGC CNG $2 ^3 ^9 ^0 &0 180, 200, 250 Steel tube Component Parts Component Parts MNB No. Description Material Note No.

Rotary Table

less 31 49 37 5 or less 20 190 35 62 50 10 or less 39 66 33 5 or less 30 190 39 68 43 10 or less 43 72 29 5 or less 50 190 49 83 33 10 or less 53 87 22 5 or less 70 190 54 95 30 10 or less 58 99 21 5 or less 100 190 61 108 27 10 or less 65 112 18 5 or less 200 190 81 139 21 10 or less 85 143 15 5 or less Operating range m: Value of the operating range Lm of a single auto switch converted

Information

Note 2) For interface use, supply 24 VDC 10% 150 mA using an external source. Note 3) The failure (ALM) is ON during normal conditions.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.