EX600-SEN3_4_eng

Yellow flashing Bus IN side: Link, Activity(10 Mbps) 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

FSQ seies

:l EgLr oA50, 54 6$ lu8f.2l 1tLJ Bore size ds2iRSf Qi:a 32lln D 1-05 5l!

AS

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 6 2 10, 12 8 6 10 Flow Direction Symbol on Body Tube O.D.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CBA2 Standard type CA2 Standard type CA2W Standard/Non-rotating rod CA2K Standard/Non-rotating rod CA2KW Low friction CA2
Q End Lock Cylinder

6 !7!8 !9 e r t y u q !3 @9 #0 #1 #2 #3 #4 #5 #6 !4 !5 w !2 @0 @8 o !0 !1 i Manual release non-lock type: Suffix N @4 @5@6@7 Manual release lock type: Suffix L Parts List No.

LZ-OM003xx

A-PHASE direction (1)Supply power and wiring. Warning 6. Test run (2)Test run details gradually. 5. Wiring

Centering Unit

psi [0.4 to 0.7 MPa] Proof pressure 145 psi [1 MPa] Lubrication Non-lube Cylinder for lock Weight [kg] 0.7 1 2 7 Operating Precautions Caution 1.

EX600-SEC_eng

ON BUS OUT side: Link, No Activity 1 2 3 4 5 6 7 8 (Green) Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Electric Actuator / Rod Type Dust-tight / Water-jet-proof (IP65 Equivalent / IP67 Equivalent)

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1), and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines.

LZ-OM004xx

*Handling (*1) Only m ale thread type (L[]ZC[][][] [][][]A[]L[][] is included. Operation m anual (This docum ent) 1 copy Foot m ount thread 6 pcs. Main body 1 pc. Motor Set screw for the m ale thread (*1) 1 pc. Rod end m ounting foot 1 pc. Housing end m ounting foot 1 pc. Parts Qty. Parts Qty. Do not hold by the Guide rod of the cylinder when handling.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Note 3) In case of 5 mm stroke (with 1 pc.) or 10 mm stroke (2 pcs.), the switch(es) may not go off or more than one switch may turn on simultaneously. Set them at 1 to 4 mm out of the values in the above table. Note 4) ( ): Dimensions for D-A93. Specific Product Precautions Be sure to read this before handling. Mounting Caution Appropriate tightening torque 1.

Air Cylinder RSQ Series Stopper Cylinder

:l EgLr oA50, 54 6$ lu8f.2l 1tLJ Bore size ds2iRSf Qi:a 32lln D 1-05 5l!

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

EX600-SEN7_8eng

An injury or failure can result. 1 2 3 4 5 6 7 8 Settings2 1 2 3 4 5 6 7 8 Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Parallel inputPNP) 1 I/O cable1.5m Parallel inputNPN) Parallel inputPNP) E EtherCAT 3 I/O cable3m 9 EtherNet/IP 5 I/O cable5m P PROFINET Controller mounting 7 Screw mounting Single axis 8*1 DIN rail /High performance *1 The DIN rail is not included.

ZU

SUP port: 6 VAC port: 6 AMJ Misc.

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1) , and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines .

Industrial Filters

6: 1 pc. each FGDT FGDF u, o, !1, !2, !3, !4, !5, !6, !7 : 1 pc. each Note) Only the FGD-CA003 and CA005 includes !8 element guide in the set.

Precision Regulator Series IR1000/2000/3000

VEA Diaphragm assembly 1 NBR, other P362020-2 1 1 1 1 P362020-2 1 P362010-1 P362020-13 P362020-13 Diaphragm assembly 2 NBR, other P362020-5 1 1 1 P362010-2 1 P362030-1 1 VY2 P362030-1 P362020-5 Diaphragm 3 NBR, other P36202019 1 1 P36202019 VBA VBAT Valve 4 Stainless steel, NBR P36201058 1 1 1 P36202068#1 P36202068#1 Valve 5 Brass, NBR 1 1 P36203009#1 P36203009#1 Valve 6 Brass,

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

(mm) TIL13 1/2" 1/2" x 3/8" 12.7 TIL19 3/4" 3/4" x 5/8" 19.05 TIL25 1" 1" x 7/8" 25.4 TIL11 3/8" 3/8" x 1/4" 9.53 TIL07 1/4" 1/4" x 5/32" 6.35 TILB01 1/8" 1/8" x 1/16" 3.18 TL0604 6 x 4 6 TL0806 8 x 6 8 TL1008 10 x 8 10 TL1210 12 x 10 12 TL1916 19 x 16 19 TL0403 4 x 3 4 TIL05 3/16" 3/16" x 1/8" 4.75 TIL01 1/8" 1/8" x 0.086" Basic diameter 3.18 +0.2 0.1 +0.2 0.1 1.6 0.15 1 0.1 0.1 0.1

Angle Seat Valve

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.