Compact Rotary Actuator

Table 3 Specification-3 Size Weightg Internal capacitycm 90 180 360 90 180 360 10 120 150 200 1.2 2.2 4.3 15 220 270 380 2.9 5.5 10.7 20 600 700 1000 7.1 13.5 26.3 30 900 1100 1510 12.1 22.9 44.7 40 1400 1600 2280 20.5 39 76 -17- 1-2 Effective output Fig.1 Effective output 1-3 Rotation range When pressurized from the Port A, the shaft will rotate clockwise.

Rotary Table

Mass [g] Size 10 20 30 50 70 100 200 With adjustment bolt 500 940 1230 1990 2880 4090 7580 With internal shock absorber 510 940 1230 2010 2890 4100 7650 Basic With external shock absorber Type 90 specification 600 1150 1460 2390 180 specification 570 1090 1390 2280 [g] Size 10 20 30 50 With adjustment bolt 530 1040 1350 2150 With internal shock absorber 540 1040 1350 2170 High precision

Low-Speed Rotary Actuator

size M50.8 Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 Output (Nm) { At 0.5MPa } 0.3 0.75 1.8 3.1 5.3 Table 2 Allowable kinetic energy and adjustment range of rotating time Rotating speed adjustment range having Size Allowable kinetic energy stable operation J s/90 10 0.00025 0.7 to 5 15 0.00039 20 0.025 1 to 5 30 0.048 40 0.081 Weight Table 3 Weight (g) Weight * Size 90 180 10 120 150 15 220 270 20 600

MHS

30mm 80 =50mm 0.5MPa MHSH3 / MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600

DOC1023126

motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to 400 6 to 200 Stroke Speed [mm/s] 350 to 400 30 to 900 18 to 600

Step Motor Driver （ Pulse input type ）

20 20 20 20 ORIG ACC/DEC 1000 1000 1000 1000 Creep speed 10 10 10 10 ORIG sensor 0 0 0 0 ORIG SW Dir 0 0 0 0 Undefined parameter21 0 0 0 0 87 - Appendix 1.2 LEF series setting value LEFS Step data default Model LEFS16 LEFS25 LEFS32 LEFS40 Lead [mm] 10 5 20 12 6 24 16 8 30 20 10 No. 0 0 0 0 Movement MOD ABS ABS ABS ABS to 500 500 250 1000 500 250 1200 500 250 500 500 250 Speed Strok 501-600

Coolant valve

SGC200/300/400: Special request X1(SF4-X240) SGC500/600/700: Installed pilot valve VO307 Caution 7 SGC200-OMM0002-F SGC / SGH Series Coolant Valve / Precautions 5 Be sure to read this before handling.

HEC-OM-U015

Temperature display) impair the performance. 600, 1200, 2400, Selects control operation mode from those shown below. 0: Pump stop (No control) 1: Normal operation 2: AT(auto tuning) 3: Learn (learning control) 4: External (external tune control) 5: SeriRem (Serial remote) 5:Serial remote is displayed when choose the Modbus communication. of the tank and the chassis near the tank could be

POWER CLAMP CYLINDER

1500 0.5MPa 0.5MPa 1000 1000 0.3MPa 0.3MPa 500 500 0 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 5.5 6 6.5 7 Shim Shim thickness (mm) thickness (mm) 0.3MPa 0.3MPa Recommended shim thickness Recommended shim thickness 0.5MPa 0.5MPa 0.7MPa 0.7MPa 9 - Arm length L300mm 1800 Peak clamping force position 1600 0.7MPa 1400 1200 Clamping force (N) 0.5MPa 1000 800 600

LA-OMP0023

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

HRX-OM-K003

HRW008-H HRW015-H HRW030-H HRW002-H1 HRW008-H1 HRW015-H1 HRW030-H1 HRW002-H2 HRW008-H2 HRW015-H2 HRW030-H2 HRW002-HS HRW008-HS HRW015-HS HRW030-HS HRW002-H1S HRW008-H1S HRW015-H1S HRW030-H1S HRW002-H2S HRW008-H2S HRW015-H2S HRW030-H2S 4h 2h 1h 30min 20min 14min 10min 6min 4min 2min 1min MAX 30s 20s Operating Time 10s 5s 2s MIN 1s 0.5s 0.2s 0.1s 0.05s 0.02s 0.01s 100 135 200 300 400 500 600

IZ-OMK0015

[Number of emitter cartridges/Bar weight] Bar length (mm) 300 380 620 780 1100 1260 1500 1900 2300 Number of emitter cartridges 3 4 7 9 13 15 18 23 28 Weight (g) 330 400 600 720 1000 1100 1500 2000 2500 29 Doc.No.IZ-OMK0015D 4-2.

Vacuum Unit Ejector / Vacuum Pump System

This assembly does not include special cable assembly for a pressure switch with energy saving function. (6) Connector assembly ZK2-LV W K A Valve type: J Valve type: K, R Lead wire length Applicable valve type Nil 300 mm Valve type K, R W (With supply valve and release valve) 6 600 mm 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (7) One-touch fitting assembly (Purchasing

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 (7) Connector assembly ZK2 LV W K A Valve type: J Valve type: K, R Applicable valve type Lead wire length Nil 300 mm Valve type K, R 6 600 mm W (With supply valve and release valve) 10 1000 mm 20 2000 mm S Valve type J (Supply valve only) 30 3000 mm (8) One-touch fitting assembly (Purchasing order is available in units of 10 pieces.)

HEC-OM-R008

Stop filling once the level of fluid reaches the H mark. 600, 1200, 2400, [AT]: Used to start auto tuning in auto tuning mode 5. Turn on the power switch to fill the piping with the fluid. 6.

Digital Gap Checker

ISA3-F ISA3-G ISA3-H Applicable fluid Dry air (Filtered through a 5 m filter) Rated distance range 0.01 to 0.03 mm 0.02 to 0.15 mm 0.05 to 0.30 mm Displayable/Settable range (Distance reference) 1 0 to 60 2 10 to 300 2 30 to 500 2 Minimum display resolution (Distance reference) 1 1 Rated pressure range 100 to 200 kPa Displayable range (Pressure value) 3 -20 to 220 kPa Withstand pressure 600

180

attachment and parallel to Z Total moment of inertia for attachment Weight of B part of attachment kg kgm2 I Inertia moment around the Z1 axis of A part of attachment kgm2 Distance between Z and Z1 axis mm IZ1 Inertia moment around the Z2 axis of B part of attachment kgm2 Distance between Z and Z2 axis mm IZ2 Allowable Range of Moment of Inertia of Attachment MHY2-10D MHW2-20D MHW2-50D 1.2 6 600

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

attachment kg MHF kgm2 Weight of B part of attachment kg Total moment of inertia for attachment I Distance between Z and Z1 axis mm Inertia moment around the Z1 axis of A part of attachment kgm2 IZ1 MHL Distance between Z and Z2 axis mm Inertia moment around the Z2 axis of B part of attachment kgm2 IZ2 MHR Allowable Range of Inertia Moment of Attachment MHY2-10D MHW2-20D MHW2-50D MHK 1.2 6 600

Transfer

W N 600 (1800) L 500 ML2B40 ML2B40 Caution If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

0.01

20 40 60 80 100 0 100 200 300 400 500 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) SFD100-C08, -02, -N02, -F02 SFD200-C12, -02, -N02, -F02 0.04 0.04 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa 0.1 MPa 0.3 MPa 0.5 MPa 0.7 MPa Pressure drop (MPa) Pressure drop (MPa) 0.03 0.03 Max. flow rate line Max. flow rate line 0.02 0.02 0.9 MPa 0.9 MPa 0.01 0.01 0 0 0 20 40 60 80 100 120 0 100 200 300 400 500 600