Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

0 i q JSXD 3 1 C N R 5 G D B 02 q Size w Valve type e Body material Symbol Size 3 30 4 40 5 50 6 60 7 70 8 80 9 90 Symbol Valve type Symbol Body material Size 30 40, 50, 60 70, 80, 90 C Brass V V S Stainless steel V V B Bronze V A Aluminum V 2(OUT) 1 N.C. 1(IN) r Seal material t Port size i Electrical entry Symbol Seal material N NBR F FKM E*1 EPDM Symbol Connection Port size Size

SV

0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master station (S1 unit) FG SG B A FG SG B A FG SG B A SG B A 24 V 0 V Power supply FG Transmission line with shield Twisted pair wire Master unit SI unit SI unit FG DG DB DA FG DG DB DA DG DB DA Terminal resistor Terminal resistor SLD FG b) 3-wire type with shield Twisted pair wire Type 3 ground Type 3 ground

5 Port Solenoid Valve

PROFINET EtherNet/IP Nil + COM v v v v v v N COM v v v v v v B B B B B Stations 1 2 3 4 5 n D side U side * Stations are counted from station 1 on the D-side. * Leave the box blank for without SI Unit (SD0m, SD60). w Cylinder port size o Input block type (Enter only for S kit compliant with EX250.) u I/O Unit stations (Enter only for EX600-compliant S kit.) 03 3/8 04 1/2 B Bottom ported

Refrigerated Air Dryers

V V V V V V V V V V 8E V V V V V V V V V V 11E V V V V V V V V V V 15E1 V V V V V V V V V V *1 When multiple options are combined, indicate symbols in alphabetical order.

Fieldbus system Digital unit

1 24 V (Control and input) X6 2 Input 12 6 3 Input 13 4 0 V (Control and input) X6 1 24 V (Control and input) X7 2 Input 14 7 3 Input 15 4 0 V (Control and input) X7 -23No.EX-OMN0036-B Circuit diagram EX600-DXPF EX600-DXNF -24No.EX-OMN0036-B LED Display The status display LED shows the following unit state.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

v 01 02 03 Configuration v v 2 position single (B) 2 (A) 4 1 Manual override 5 (R1) 1 (P) 3 (R2) Non-locking push style (Flush) : B: Locking style (Slotted) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2) 3 position closed center (B) 2 (A) 4 3 5 (R1) 1 (P) 3 (R2) Electrical entry 3 position exhaust center (A) 4 (B) 2 G: Grommet (DC specification

Fieldbus system PROFIBUS DP compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) (Fault_MA) (Idle_MA) 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0.00 to +10.50 V 0..5 V 0.00 to + 5.22 V +0.03 to +5.25 V 0.00 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 0.00 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to +21.00 mA -52No.EX-OMN0028-B Analogue I/O unit

Fieldbus system CC-Link compatible SI unit

(Range) (Lwr_Lmt) (Upr_Lmt) (Fault_MA) 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0.00 to +10.50 V 0..5 V 0.00 to + 5.22 V +0.03 to +5.25 V 0.00 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V +0.75 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00 mA 0.00 to +21.00 mA 4..20 mA +3.00 to +20.90 mA +3.10 to +21.00 mA +3.00 to +21.00 mA -54No.EX-OMN0034-B Analogue I/O unit parameters

energy saving effect

detected. v Ammonium ion (NH4+) [mg/L] 0.1 or less v Residual chlorine (Cl) [mg/L] 0.3 or less v Free carbon (CO2) [mg/L] 4.0 or less v Reference item dt HED < For 400 V type and option B [With earth leakage breaker]> 3.

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Inch) 1 /4 3/8 1/8 5/32 1/4 5/16 M5 Pressure Specifications VP4 V V V VQZ1000 V VQZ2000, 3000 Series A, B port 2 position single 2 position double 3 position V V V VQZ2000 Metal seal only VQZ3000, 3 position 0.15 to 0.7MPa 0.1 to 0.7MPa V V V V VQZ3000 External pilot pressure range VQ Note) Millimeter sizes of One-touch fittings (Cl) are also available.

Fieldbus system Analog unit

and twos complement data format Input signal range: 0 to 10 V, 0 to 5 V, 0 to 20 mA Input signal range: 1 to 5 V, 4 to 20 mA AD value Input signal range (a to b) AD value Input signal range (0 to b) Voltage [V] Current [mA] Hexadecimal Voltage [V] Current [mA] Hexadecimal Decimal Decimal number number 1 to 5 V 4 to 20 mA number number 0 to 10 V 0 to 5 V 0 to 20 mA 07FF 2047 5.25 21 07FF

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

8 Product image For PROFIBUS DP (Plug, B-coded) Socket Plug Plug Socket Number of functional poles M12: 2 pins M12: 3 pins M12: 4 pins Key type B-coded (Reverse key) 3 4 4 3 5 1: VP 4: B Line 5 1: 2: A Line (Green) 3: 4: B Line (Red) 5: 390 1 2 2 1 Pin assignment 220 2: A Line 3: DGND Plug, B-coded Plug, B-coded (Viewed from the plug/socket side) 390 Fixed cable length 5 m Cable O.D

Speed Controller with Indicator

V V V V AS3ll1FSl-l03 3/8 V V V V V V V AS4ll1FSl-l04 1/2 V V VNote 4) V V 10 AS2ll1FSl-G01 1/8 V V V V VNote 4) AS2ll1FSl-G02 1/4 VNote 4) V V V V AS3ll1FSl-G02 1/4 V V V V G Face seal AS3ll1FSl-G03 3/8 V V V V AS4ll1FSl-G04 1/2 V V VNote 4) Note 1) Without sealant type can be selected as a standard option.

Membrane Air Dryer

guide F A B C D Model L E IDG30V) IDG60B) P Port size 3/8, 1/2 Q M 8 54 (D) Purge air for K dew point indicator J 37 H G N IN OUT 54 8.5 (F) 10.5 (E) (352)

Bernoulli Gripper

V V V V V KQ2H06-M5G1 V KQ2H06-01GS1 V V KQ2H08-01GS V V Male connector Stainless steel One-touch fittings KQ2S04-M5G1 V V V V V V V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported V V V V V V Symbol Flow adjustment Rear

SMC Wireless System EtherNet/IP ® compatible

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type