Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60 C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, HA, VNA/B/C/D
Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D
Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, LA, VNA/B/C/D
Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), VALVE, SOL, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, 1A, VNA/B/C/D,
Fluid:air; CO 2 ; nitrogen gas; freon 11, 113, 114; turbine oil, hydraulic fluid, argon, helium, Proof pressure: 1.5MPa, Operating pressure range: 0 to 1MPa, Effective area: 13 to 770mm 2, Coil rated voltage: AC(50/60Hz) 100V, 200V, others (option); DC 24V, others (option), Ambient temperature: -5 to 60C (no freezing), PROCESS VALVE, VALVE, VNA/B/C/D 2-WAY MEDIA VALVE, DA, VNA/B/C/D
Model: 10S6 (Side Ported), SI Unit: DA (EtherCAT, IO-Link unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 11 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 7 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C6 (ø6 One-touch Fitting)
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting)
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 200mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: 0 (w/o SI Unit), SI Unit Output Polarity: Positive Common, NPN or w/o SI Unit, Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: BA (Direct Mounting, Name Plate, w/o Station
A B Model A B C IDF1E IDF2E 410 390 IDF3E 226 470 IDF4E IDF6E IDF8E IDF11E IDU3E IDU4E IDU6E 495 435 C 565 465 270 495 435 565 465 Main specifications Series IDFE (Inlet air temperature : 35C, Outlet air pressure dew point : 10C), Series IDUE (Inlet air temperature : 55C, Outlet air pressure dew point : 10C) Series IDUE Series IDFE Model Specifications IDF11E IDU3E IDU4E IDU6E IDF8E IDF6E
(Stacking base) Dimensions / Single unit (Base Mounted) 7 11 28 3 Specifications Poppet Valve construction Air, Inert gas Fluid Vacuum (1.33 x 102Pa) to max. operating press. (Refer to flow characteristics table below.)
mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3
Body size 1 2 Torque (Nm) 0.7 to 0.9 1.6 to 1.8 Body end surface 5 B How to Order Insertion Tools Fitting size For 2 to 6 Fitting size For 1, 2 LQ3 GPS LQ3 GB Pin type Pin type Nil N Metric Inch Nil N Metric Inch Note) Fitting tools are common for metric size and inch size.
Model: 11 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A, B Port Size: C4 (ø4 One-touch Fitting)
Type: 10S (Side Ported), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (Negative Common), Valve Stations: 11 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)
Series: 3 (JSY3000), Type: 10 (Side-Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins, Entry Direction Adjustable), Connector Entry Direction: 1 (Upward), Valve Stations: 11 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: C8 (ø8 One-touch Fitting)