SMC Pneumatic Clean Series

flange style/Head side flange style Mounting style 10-/11-: Fluorine grease 21-/22-: Lithium soap based grease 10-: Grade 2, 21-: Grade 3 11-/22-: Grade 1 Grease Particle generation grade (Refer to front matter pages 13 to 22 for details.) 0.05 MPa for other part than the lock unit Lock specifications Suction flow rate of vacuum suction type (Reference values) Head end 20 25 32 40 215 330 550

VQC

260.5 4 121 240 262.5 273 5 137 256 275 285.5 6 153 272 287.5 298 7 169 288 312.5 323 8 185 304 325 335.5 9 201 320 337.5 348 10 217 336 362.5 373 11 233 352 375 385.5 12 249 368 387.5 398 13 265 384 400 410.5 14 281 400 425 435.5 15 297 416 437.5 448 16 313 432 450 460.5 17 329 448 462.5 473 18 345 464 487.5 498 19 361 480 500 510.5 20 377 496 512.5 523 21 393 512 537.5 548 22 409 528 550

MGP

Lock Specifications Lock position Rear, Front side 32 20 100 550 (123) 40 50 63 215 (48) 25 2140 (481) 80 Holding force (max.) N (lbf) 5390 (1211) 860 (193) 1340 (310) 330 (74) 3450 (775) Backlash 2mm or less Non-locking type, Locking type Manual release Adjust switch positions for operation at both the stroke end and backlash (2mm) movement positions.

e

A Cable length Standard Stroke M L Z 1 m 3 m 5 m Nominal size Standard stroke (mm) Made to Order Long stroke (-XB11) Stroke range (mm) The remote control type can be selected by adding the above symbols. 16, 25 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 601 to 1000 Strokes are manufacturable in increments of 1 mm, up to 1000 strokes.

Digital Flow Switch ( compatible)

parameters page 1 DPP1 address Access Parameter name Initial value (dec) Content 0x07 R Vendor ID 0x0083(131) "SMC Corporation" 0x08 PFMC7501--LPFMC7501--L2PFMC7501--L3PFMC7501--L4PFMC7102--LPFMC7102--L2PFMC7102--L3PFMC7102--L4PFMC7202--LPFMC7202--L2PFMC7202--L3PFMC7202--L40x021D(541) 0x021E(542) 0x021F(543) 0x0220(544) 0x0221(545) 0x0222(546) 0x0223(547) 0x0224(548) 0x0225(549) 0x0226(550

MY1

(kg) (800) 50 W l (600) 40 Caution 30 W l Weight (m) MY1H40 MY1H40 (550) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

CRBU

Weight (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Vane type Model (size) 180 180 270 180 270 270 90 270 90 180 270 90 180 Rotating angle Single vane Double vane 469 47.1 47.5 258 255 491 480 47 73 72 72 143 142 140 263 Body of rotary actuator Auto switch unit + 2 switches 30 60 46.5 50 30 Angle adjuster 30 150 203 47 90 90 90 100 90 100 100 100 90 100 90 Rotating angle 158 308 550

Table of Contents

N 215 330 550 860 1340 2140 3450 5390 Made to Order Specifications (For details, refer to page 8-31-1.) Backlash 2 mm or less Manual release Non-lock type, Lock type Symbol Specifications Adjust switch positions for operation at both the stroke end and backlash (2 mm) movement positions. -XC79 Machining tapped hole, drilled hole and pin hole additionally.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

CQM Lock Specifications CQ2 Lock position Head end, Rod end 20 215 0.15 MPa or less 2 mm or less Non-lock type, Lock type 25 32 40 50 63 80 100 330 550 860 1340 2140 3450 5390 Holding force (Max.)

MB

N Tie rod, cushion valve, tie rod nut, etc. 550 860 1340 2140 3450 5390 -XC7 made of stainless steel C76 Back lash 1.5 mm or less -XC10 Dual stroke cylinder/Double rod Manual release Non-locking type, locking type -XC14 Change of trunnion bracket mounting position C85 Double clevis pin and double knuckle -XC27 pin made of stainless steel C95 Accessory -XC29 Double knuckle joint with spring

MG

N 215 330 550 860 1340 2140 3450 5390 Made to Order Specifications (For details, refer to page 8-31-1.) Backlash 2 mm or less Manual release Non-lock type, Lock type Symbol Specifications Adjust switch positions for operation at both the stroke end and backlash (2 mm) movement positions. -XC79 Machining tapped hole, drilled hole and pin hole additionally.

4-channel Flow Monitor ( compatible)

4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to 3.5 to 7 to 112 20 to 0.25 to 1.3 to 2.5 to 4.50 18.0 45.0 280 4.50 21.0 45.0 L/min L/min L/min L/min L/min L/min L/min L/min (Displays (Displays (Displays (Displays (Displays (Displays (Displays (Displays Instantaneous flow display/ Set flow range 0 to 11 0 to 55 0 to 110 0 to 220 0 to 550

10

N 32 40 50 63 80 100 -XAl Change of rod end shape CA2 550 860 1340 2140 3450 5390 -XC7 Tie-rod, cushion valve, tie-rod nut, etc. made of stainless steel Back lash 1.5 mm or less CS1 Manual release Non-locking type, Locking type -XC10 Dual stroke cylinder/Double rod type -XC14 Change of trunnion bracket mounting position CS2 -XC27 Double clevis and double knuckle joint pins made of stainless

Refrigerated Thermo-chiller

Applicable sensors: PSE53, 54, 56 Capable of controlling various different applications from one controller 4 inputs, 5 outputs Separate type monitor PSE200 2-Color Display Digital Pressure Sensor Controller PSE300 Series Features Applicable sensors: PSE53, 54, 550, 56 Compatible with voltage input and current input Response time: 1 ms Space-saving, capable of vertical and horizontal

0.55

port 1/4 1/8 1(P) port 3/8 5(EA), 3(EB) port M5 x 0.8 1(P) port 5(R), 3(R) port 3/8 1/8 EXH Common EXH Individual EXH Common EXH Common EXH Common EXH port type VF3;30 VF3;33 VF5;20 VF5;23 VF1;30 VF1;33 Applicable valve model Applicable 2 to 20 stations 2 to 20 stations 2 to 15 stations 2 to 10 stations stations Manifold base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550

Table of Contents

(kg) (800) 50 W l (600) 40 Caution 30 W l Weight (m) MY1H40 MY1H40 (550) 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

A

mA 3 metre LED 24v DC 100v AC 200v AC 550 mA 525 mA 512.5 mA 2 wire Tie rod mount reed Grommet DA54L 3 metre LED 2 wire Band mount reed Grommet DB53L 24v DC 550mA 3 metre LED 24v DC 100v AC 200v AC 550 mA 5-25 mA 512.5 mA 2 wire Band mount reed Grommet DB54L 3 metre LED 3 wire Solid state NPN tie rod Grommet DF59L 5, 12, 24v DC 28v DC or less 40 mA or less 3 metre LED 3 wire Solid state

Air Slide Table

Weight [g] Model Standard stroke [mm] Reduction of the shorter Additional weight of adjuster option Extra for option 10 20 30 40 50 75 100 125 150 Extension stroke end Retraction stroke end Buffer End lock Axial piping MXQ6A 130 130 170 190 210 6 10 8 30 40 total length type MXQ8A 140 160 180 210 270 290 6 10 8 30 60 MXQ12A 270 290 310 370 400 540 610 12 20 16 70 80 MXQ16A 480 510 550 630

MY1

l (600) 40 Weight m 30 W Caution MY1H40 MY1H40 MY1H40 (550) l W 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

75 50 45 40 0.7 35 30 0.5 25 20 15 10 100 12 59 60 42 54 47 25 41 35 29 IN 12 16 79 84 57 76 67 34 59 50 42 OUT 20 178 165 152 106 140 127 75 114 101 45 88 75 63 IN 16 25 216 202 187 141 173 158 101 144 129 60 115 100 86 OUT 32 471 318 297 277 165 256 235 118 214 193 71 173 152 131 IN 576 20 40 597 413 390 367 220 344 321 157 298 275 94 252 229 206 OUT 717 50 951 659 622 586 264 550