air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG3Compressed air0.3 to 0.85 5 to 55 5 to 55 20312560.7252525
Switching from real-time flow rate to accumulated flow is possible.Digital flow switch for de-ionized water and chemicals , Remote type sensor unit , Flow rate range: 0.4 to 4 l/min ~ 4 to 40 l/min , Output for display unit with or w/o analog output , Port sizes: 3/8", 1/2", 3/4", DIGITAL FLOW SWITCH, INSTRUMENTATION, PFD DIGITAL FLOW SWITCH, 2X, PFD NO SIZE (MISC.
/OTHER), .56427 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71092%8%0.2 to 7.0 l/min0.2 to 7.4 l/min0 to 7.4 l/min3.80 V15.2 mA
/OTHER), .45787 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71092%8%0.2 to 7.0 l/min0.2 to 7.4 l/min0 to 7.4 l/min3.80 V15.2 mA
min0.2 to 7.4 l/min0 to 7.4 l/min3.80 V15.2 mA
min0.2 to 7.4 l/min0 to 7.4 l/min3.80 V15.2 mA
/OTHER), .63606 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71092%8%0.2 to 7.0 l/min0.2 to 7.4 l/min0 to 7.4 l/min3.80 V15.2 mA
/OTHER), .50993 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM71192%8%2 to 100 l/min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA
min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA
min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA
min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA
min2 to 105 l/min0 to 105 l/min5.00 V20.0 mA
min0.5 to 26.3 l/min0 to 26.3 l/min5.00 V20.0 mA
min0.5 to 26.3 l/min0 to 26.3 l/min5.00 V20.0 mA
min0.5 to 26.3 l/min0 to 26.3 l/min5.00 V20.0 mA
min0.5 to 26.3 l/min0 to 26.3 l/min5.00 V20.0 mA
min0.5 to 26.3 l/min0 to 26.3 l/min5.00 V20.0 mA
/OTHER), .66138 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM75092%8%1.0 to 50.0 l/min1.0 to 52.5 l/min0 to 52.5 l/min5.00 V20.0 mA
/OTHER), .66138 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM75092%8%1.0 to 50.0 l/min1.0 to 52.5 l/min0 to 52.5 l/min5.00 V20.0 mA
/OTHER), .58122 lb, ModelGas ratioRated flow rangeDisplayable rangeSettable rangeMax. analog output ArCO2Voltage (Vmax)Current (Imax)PFM75092%8%1.0 to 50.0 l/min1.0 to 52.5 l/min0 to 52.5 l/min5.00 V20.0 mA