SMC Corporation of America
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of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 XA46 CRJ XA47 XA48 CRA1 Y Y Y Y Y XA49 XA50 CRQ2 K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSQ XA53 J J J J J J J XA55 J XA57 MSZ J Reversed shaft, Change of double shaft length A combination of up to

of short shaft length Change of double shaft length Change of short shaft length Change of double shaft length XA45 CRA1 XA46 XA47 XA48 CRQ2 Y Y Y Y Y XA49 XA50 MSQ K K, T K K J K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination

2 x Eh8 KV (Nut) TW 4 x TC H + Stroke FA AM AL 1.5 K Air cushion: Cl75WE l Bore size Stroke C Cushion needle (Width across flats 1.5) (XB + Stroke) (XB) G WA WA 45 Port 2 x EE D NB TD H S + Stroke ZZ + 2 x Stroke H + Stroke KV (Nut) (Wh) With rod boot 8 l 8 KK C e (JH) Width across flats KA K AL AM h f (JW) [mm] Dimensions Bore size AL AM BE C D E EE FA FM G H K KA KK KV KW NB 32 17 20 M30

K-F-X60 LJ1H202NAStroke K-F-X60 Without motor Specifications Combinations other than the above cannot be manufactured.

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46. 24 High Vacuum Angle Valve Series XLD, XLDV Dimensions (mm) 1in=25.4mm XLDV-25/With solenoid valve 11 C Fn (KF flange) Fb (K flange) C Port R (exhaust port) K K 2.5 41.5 Initial exhaust solenoid valve Main exhaust solenoid valve G A B 8 10.5 Port P (pressure port) A Max 10.5 (except connector

D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U

10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

10, 15, 20, 30, 40 MRQ K J XA39 XA40 XA41 XA45 K K K XA46 Y Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Z b K g ( ! ' / i t h A u t o D r a i n : 1 . 3 5 k S ) _ M A S S k s 0 . 2 5 k s ( ! / i t h B r a c k e t : 0 . 3 1 k s ) D i m e n s i o n s 0 n e t o u c h f i t t i n s f o r P u r g e a i r e x h a u s t ( 0 P t i o n : P , P s ) c h e c k e r 9 8 d i a m e t e r i n c h ) p u t ' g i n o a i r D e w p o i n t l n o u t e r 8 rn m(5/16 D l i 0 n : .!.

0For DeviceNetTM Plug (Male) K yFor CC-Link K !1For DeviceNetTM K !6For PROFIBUS DP K e For EtherNet/IPTM, PROFINET, EtherCAT, Ethernet POWERLINK K w and K e are used in combination with each other. K !4For PROFIBUS DP Terminating resistor Plug (Male) K tFor CC-Link K oFor DeviceNetTM Socket (Female) K uFor CC-Link K !

19.2 k/ 45.45 k/93.75 k/ 187.5 k/500 k/ 1.5 M/3 M/6 M/ 12 Mbps 10 k/20 k/50 k/ 125 k/250 k/ 500 k/800 k/ 1 Mbps 156 k/625 k/ 2.5 M/5 M/ 10 Mbps Communication speed 5 Mbps 10 M/100 Mbps 125 k/250 k/500 kbps 167 kbps Specified file Note 3) EDS file EDS file GSD file EDS file EDS file EDS file 48/32 SAS7: 8/8 (2 slave units) SAS9: 4/4 64/64 SAS3: 8/8 (2 slave units) SAS5: 4/4 Occupied area

Basic style (Through-hole): CQ2WB U 2-H thread effective depth C (Opposite side, too) Q Q 2-Rc 3/8 (Port size) I Width across flats K CUJ 11 D D 32 22 M E CU Minimum lead wire bending radius 10 2.5 Auto switch CQS Note 1) Flat washer 4 pcs. 4-N through-hole CQM 2 x 4-OA thread depth RA B + Stroke A + 2 (Stroke) K J M E 2 x 4-OB counterbore depth RB L L + Stroke CQ2 S (Opposite side, too)

Ea = K E max Ea = 1x 0.11 = 0.11 Workpiece mounting coefficient K: Fig. (3) Can be used based on E = 0.088 Ea = 0.11 Max. allowable kinetic energy Emax: Table (1) Kinetic energy (E) Allowable kinetic energy (Ea) Load Factor 3 3-1 Load Factor of Load Weight Wa = K Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient : Graph (1) Max. allowable load weight Wmax

Wa = K Wmax Workpiece mounting coefficient K: Fig. (3) Allowable load weight coefficient : Graph (1) Max. allowable load mass Wmax: Table (2) 1 = W/Wa Wa = 1 x 1 x 4 = 4 K = 1 = 1 Wmax = 4 1 = 1/4 = 0.25 3-2 Load Factor of the Static Moment Rolling Yawing Examine My. My = 1 x 9.8 (10 + 30)/1000 = 0.39 A3 = 30 May = 1 x 1 x 18 = 18 Mymax = 18 K = 1 = 1 2 = 0.39/18 = 0.022 Examine Mr.

) Model A D2 B E F G H D1 Plug 10 : M-3P 16 to 25: M-5P End boss assembly Applicable tubing S C S C S C S C 0.016 0.043 MHZ2-10 K 12f8 15 11 7 52.8 18 28.3 5.5 MHZ2-16 K 0.016 0.043 16f8 20 10 15 58.7 16.2 27.7 6.5 H G Note 1) MHZ2-20 K 0.020 0.053 D2 20f8 22 12 19 70.5 18.2 31.2 7.5 MHZ2-25 K 0.020 0.053 25f8 15 25 24 82.9 19 31.8 10 D1 Other dimensions and specifications correspond to the

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

(4 locations) (Except 10) E D1 B D2 Model A End boss assembly 0.016 0.043 MHZJ2-10S C K 7 12f8 40 11 15 D2 0.016 0.043 MHZJ2-16S C K 10 16f8 43.5 15 20 0.020 0.053 MHZJ2-20S C K 12 20f8 51.7 19 22 D1 0.020 0.053 MHZJ2-25S C K 15 25f8 61.3 24 25 Other dimensions and specifications correspond to the standard type.

Load rate Ea= K E max Ea=1 0.11=0.11 Work mounting coeficient K: Fig.3 Max. allowable kinetic energy Emax: Table 1 Kinetic energy (E)Allowable kinetic energy (Ea) Possible to use by E=0.0 3 3-1 Load rate of work Calculate static work Wa (N) Wa=1 X 1 X 4=4 K=1 b=1 Wmax=4 a1=1/4=0.25 Wa=K b Wmax Work mounting coeficient K: Fig.3 Allowable load coeficient b: Graph 1 Max.

Input/output characteristics chart VEA Communication Specifications (CC, DE, PR, RC) VY1 ITV00-CC CC-Link Ver 1.10 ITV00-DE DeviceNet Volume1 (Edition3.8), Volume3 (Edition1.5) ITV00-PR PROFIBUS DP DP-V0 ITV00-RC RS-232C Model VBA VBAT Protocol Version Note 1) 156 k/625 k 2.5 M/5 M/10 M bps 125 k/250 k/500 k bps 9.6 k/19.2 k/45.45 k 93.75 k/187.5 k/500 k 1.5 M/3 M/6 M/12 M bps 9.6 kbps Communication