Body Size: 2 (1/4 Standard), Thread: Rc, Port Size: 03 (3/8)

Body Size: 3 (3/8 Standard), Thread: Rc, Port Size: 03 (3/8)

Body Size: 350C [53SCFM (1,500l/Min)], Thread: Rc, Port Size: 03 (3/8)

Body Size: 250C [26SCFM (750l/Min)], Thread: Rc, Port Size: 03 (3/8)

Size: 4000 (1/2 Basis), Thread: N (NPT), Port Size: 03 (3/8)

Size: 3000 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8)

Size: 3000 (3/8 Basis), Thread: Rc(PT), Port Size: 03 (3/8)

Pad Connection Thread: W4 (ø4 One-touch Fitting), Orifice Size: 03 (0.3 mm)

Stations: 03, A,B Port: ø1/4" One-touch Fitting, Inch, Thread: NPTF

Model: 10-SY5000, Stations: 03, A, B Port Size: 1/8, Thread: NPT

SS5V 03 Station Manifold, Cassette Base. 449 lb.

AUTO-SWITCH, AUTO-SWITCH, 35 lb

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

AS-FPQ/AS-FPG

A (2) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 8 10.4 22.2 17 27 7 7 12.2 28.8 26 M5 x 0.8 9.6 25.2 22.4 6 12.8 23.2 18.5 8 8 28 (12.2) (28.8) (26) 4 10.4 24.3 17 17 17 31.4 13.4 35.5 30.5 6 R 1/8 12 14.2 32.4 27.4 12.8

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 50, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 6, Stroke(mm): 300, Max.

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

VFA3000

VFA5120-03 .2 pcs. VFA5220-03 .2 pcs. DXT156-19-1A .1 pc.

KR

(mm) Connection thread RC Model N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 47 81 17 1 4 7.5 19.5 31.5 21.5 31 13 13.5 17 10 125 6 108 10 55 73 97 91 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 9 22.5 35.5 24 34.5 15.5 14.7 18.5 86 112 Spatter Cover 3: KRMC (Applicable: FR soft nylon) Weight (g) Applicable tubing O.D. (mm) Model N L A N-applicable tubing O.D.

Body Size: 40, Backflow: without Backflow Function, Thread: F (G), IN Port Size: 03 (3/8), OUT Port Size: 03 (3/8), Options: w/o Mounting Option, Set Pressure: 0.05 TO 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Knob: Downward, Pressure Unit: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa