VEX1

AMC Caution This valve is not a non-leak specification, and thus cannot be used for a long term intermediate stops or emergency stops. 5.1-12 VEX3 How to Order Electrical entry (Only solenoids) Body size Port size Symbol Body size Electrical entry Port size Port R port P, A port 01 02 02 03 04 04 06 10 10 12 14 20 Body size G Grommet, 300mm lead wire H Grommet, 600mm lead wire L plug connector

XL

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Series PF2W Digital Flow Switch For Water

(Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Output for display unit Output Note 2) specifications Environment Voltage output 1 to 5 V Accuracy: 5%F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog output Current output 4 to 20 mA Accuracy: 5%F.S., Max. load impedance: 300 or less (at 12 VDC), 600 or less (at 24 VDC) 12 to 24 VDC 10% Power

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Pilot Operated

Use compatible heavy duty cords with cable O.D. of 6 to 12. Use the tightening torques below for each section.

IDX-OM-W010

Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13 Specification for Option S 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Power supply connection procedure . 13 2 13 4 Electric circuit . 13 2 Chapter 14 Specification

IDX-OM-W011

R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E/6E/8E/11E/15E1-10-R IDF15E1-20-R IDF4E/6E/8E/11E-20-R (A) 10 5 (mA) 30 12-3 M5 9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011

IDX-OM-W025

Specification for Option R 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Power supply connection procedure . 12 2 12 4 Cautions for handling the GFCI . 12 3 12 5 Electric circuit . 12 3 Chapter 13 Specification for Option T 13 1 Safety instructions . 13 1 13 2 Specifications . 13 1 13 3 Remote operation . 13 1 13 4 How to connect the power supply and signal cable . 13 2

IDX-OM-W026

R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-2 12-4 . 12-2 12-5 . 12-2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-2 13-6 . 13-3 14 14-1 . 14-1 2 IDX-OM-W026 i i i-1 () 3 i 1 1 3 IDF Series i-1 i-1 IDX-OM-W026 i i-2 5 i 2 1 IDF Series i-2 i-2 IDX-OM-W026 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDF Series i-2 i-3 IDX-OM-W026 i i 2 6 WARNING !

IDX-OM-W019

Specification for Option V 12 1 Safety instructions. 12 1 12 2 Specifications . 12 1 12 3 How to perform maintenance . 12 2 Chapter 13 Service Record 13 1 Service Record . 13 1 IDFB Series Table of Contents 2 IDX-OM-W019 Air dryer i Safety Instructions i Safety Instructions Before use,read and comprehend important cautionary notification well on this operation manual. i-1 Warning: Before

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Lead wire length) Applicable cable O.D. 3.5 to 7 89.6 Max. 10 58 [65] 91.5 84 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48 48 12 12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to the page 68 for dimensions with connector cable. 38 Series SYJ700 Manifold Specifications Manifold Specifications

High Vacuum Angle Valve, XL Series

XLFV/With solenoid valve J M N Port P (pressure port) K L R P (mm) Port R (exhaust port) M 3 3 3 4 4 4 L 8.5 8.5 8.5 12 12 12 K 13 14 23 23 29 39 J 16.5 16.5 17.5 28 29 29 N Model XLFV-16 XLFV-25 XLFV-40 XLFV-50 XLFV-63 XLFV-80 3 3 3 2 2 2 Other dimensions are the same as XLF. 15 Series XLG, XLGV Double Acting/O-ring Seal Air Operated Type How to Order XLG 16 F9N High vacuum angle valve

Rotary Table

Special tool dimensions [mm] Part number A B C D E P8910195 50 10 16 10 12 P8910295 60 12 18.2 11 14 P8910495 80 15 24 17 19 Special tool Fig. 7 -33- Piping Figure 8 and Table 12 show locations and sizes of piping ports. Ports can be selected from two sides. Plug the ports that are not used. Table 12.

AHC System Series MA

Pull up the AHC unit 12 mm or more. 1. Supply compressed air: 0.4 to 0.7 MPa to the operating port. 2. Pull up the AHC unit 12 mm or more. 1. Supply compressed air: 0.4 to 0.7 MPa to the operating port. 2. Pull up the AHC unit 12 mm or more.

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) AS AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 18.5 8.9 11.0 15.2 18.5 11.0 15.2 18.5 20.9

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

Sine Cylinder Series REC

17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.

Low Profile Guide Type

V CY1H 12 V Solid state auto switch Reed auto switch Yes IC circuit CY1F CY1F 5 V, 12 V Relay, PLC Diagnostic indication (2-color indicator) Grommet 24 V 12 V CYP IC circuit 5 V, 12 V Water resistant (2-color indicator) M9PAV1 M9PA1 M9BAV1 M9BA1 12 V IC circuit 3-wire (NPN equivalent) A96V A96 5 V 12 V Yes 24 V Grommet Relay, PLC A93V2 A93 A90 100 V 2-wire A90V IC circuit No 100

15

V IC circuit 12 V 5 V, 12 V IC circuit Relay, PLC Diagnostic indication (2-color indicator) 24 V Yes Grommet 12 V 5 V,12 V 12 V IC circuit Water resistant (2-color indicator) 3-wire (NPN equivalent) Grommet 24 V Reed auto switch A96V A96 IC circuit 5 V Yes A93V2 A90V A93 A90 100 V IC circuit Relay, PLC 2-wire 12 V No 100 V or less 1 Water resistant type auto switches can be mounted