High Vacuum L Type Valve

Product Specific Precautions 3 7 (Maintenance parts) 4. Specifications 9 5. Construction and Dimensions --11 6. Period and Scope of Warranty 14 7. Parts Replacement Procedure 15 1 XL-OMV0007 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Return Filter

Hold the position of the switch box by 7) Adjust the switch box position by pushing from the top. Hold the position of the switch box by 7) Adjust the switch box position by pushing from the top. Hold the position of the switch box by 7) Adjust the switch box position by pushing from the top.

Compact Rotary Actuator

JIS hexagon socket head bolt is neatly placed in the rotary actuator groove. 4-4 Piping and operating direction Table 6 Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 40 28.5 M 8 Fig.6 Fig-7 shows piping ports of the rotary actuator. Table-7 shows the port size.

High Vacuum L Type Valve

Not adhering to these specifications, can result in damage to the product. 13 XL-OMV0016 7-2.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Additionally, when running the positioning operation, do not set within 7 mm of both ends.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

(At stop(EMG) or SVRE[OFF]) /see 2.7 Actuator with lock Warning(7) on P14 Check the mounted load and lock holding force to confirm if they are within the operation range.

Digital Pressure Switch

. -10No.PS-OML0003-J Definition and terminology Terms Meaning 2 2-colour display 2 colours are used to indicate a value, which change according to the output status. 7 7-segment display When "8" is shown on the display. It is called 7-segment because 8 consists of 7 pieces of "(segments)". A Analogue current output Refer to "Analogue output (function)".

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Refer to Best Pneumatics Vol. 6/7/8/9/10 for the details.

Magnetically Coupled

7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

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KQ2C Caps P Plugs Q Cartridge KR Fitting Boot . . . . . . . .6 .7 .7 .7 P .8 .8 .9 .9 o 't0 1 0 1 0 1 1 1 1 1 1 1 2 Spucial [nnlhunilions Page 14 IIU lrlylon lltliltg Page 15 Bmss Phe tittittg$ pase N i p p l e s . . . . . . . . . 1 7 Cdinlinars -. -14 Bushings Aalaolers 1 8 '18 1 q Ts6s .20 .20 Pftr^q 21 SAE 45" Flares . -..22-23 .24 General Assembly..,.. lmoortant Oo's and Dont's Chemical

Compact Pad

Pad typePad diameter Pad diameter (Symbol) Pad type B04 B06 07 B08 06 05 03 U (Flat) C (Flat with rib) UT (Thin flat) B (Bellows) Dimensions: Pad Unit ZP2-05UT ZP2-06UT ZP2-B06B ZP2-B08B ZP2-03U ZP2-B04U 7 7 7 7 7 7 12 12 12 12 13 13 4 4 0.5 0.8 0.3 0.3 0.8 1.2 1.6 1.6 2.5 2.5 5 6 4 3 4.7 3.3 4.7 6 3.5 8 9 7 9 10 ZP2-B06C ZP2-07C ZP2-B08C Adapter Mounting Dimensions 7 7 7 If an adapter will

58

7 (two), !8, and @0 Carbon steel Hard chrome plated Piston rod 5 CS2Y140AA-PS Bushing 6 Oil-impregnated sintered alloy CS2Y160AA-PS Zinc chromated Carbon steel Tie-rod 7 125 140 160 CS2Y125AR-PS With single-side cushion Consists of Component Part Numbers !6, !7 (one), !8 and @0.

OMR0031

CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

Pneumatic Transfer System Series MF

RT RS B 296 305 C R310 R445 D 93 129 E 60 87 F 10 15 G 6 7 B 296 309 C R390 R495 D 93 129 E 60 87 F 10 15 G 6 7 B 299 307 C R350 R440 D 93 129 F 10 15 G 6 7 H 610 700 A 600 743 A 680 797 A 643 740 15 32 15 32 15 32 Y Note 2) Y Note 2) Y Note 2) X 558 to 573 685 to 708 X 518 to 533 558 to 581 X 541 to 556 595 to 618 15 32 15 32 15 32 558 to 573 685 to 708 518 to 533 558 to 581 541 to 556

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Refer to Best Pneumatics Vol. 6/7/8/9/10 for the details.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

7 !8 !

CXT

9 @7 !2 y !3 u o !8 !0 !7 !6 Component Parts Description Material Note No. Description Material Note No. Slide block Hard anodized Aluminum alloy Option Shock absorber !6 q Carbon steel Shock absorber accessory Plate A Hard anodized Aluminum alloy Nut !7 w Chromium molybdenum steel Nickel plated Plate B Hard anodized Aluminum alloy !

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

7 !8 !

SI Unit

PROFIsafe address switch . 32 7. Accessories . 33 7.1. Seal cap . 33 8. Dimensions . 34 9. Troubleshooting . 35 9.1. Troubleshooting . 35 9.2.

IZx-OMX0087

A 1 1000 Metric 6 7 2 2000 Inch 1/4" 10 3 3000 Elbow (mm) Applicable tube O.D.