Regulator Valve

Incorrect w iring Operation failure (9) (10) Fuse blow n out, breakage of lead w ire (11) Incorrect contact at the contact and connection Broken w ire in the coil. (22) Foreign matter is caught in the armature. (12) Sw elling, sliding failure or sticking of the spool valve. (13) Excessive lubrication (14) Coil has burned out.

Body Size: 40, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: M (Round Type Pressure Gauge, w/Color Zone), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

Body Size: 30, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: M (Round Type Pressure Gauge, w/Color Zone), Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 38 (Metal Bowl w/Level Gauge + Lubricator w/Drain Cock), Bowl Guard:

Body Size: 30, Model Type: Air Filter + Regulator + Lubricator, Thread: N (NPT), Port Size: 02 (1/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: M (Round Type Pressure Gauge, w/Color Zone), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

Stations: 02 (2 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.

Stations: 02 (2 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: P (w/o Flow Adj.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

0.7 N m 0.9 N m 2.9 N m Bearing Bearing Port location Side ported or Top ported Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side ported M5 x 0.8 M3 x 0.5 Port size Top ported M3 x 0.5 M5 x 0.8 1 Single vane 90 can be adjusted to 90 10 (both ends of rotation 5

MU

10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 H 14 14 15 18 21 ZZ 83 86 90 110 117 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Model MUWB25 MUWB32 MUWB40

MU

10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 MM M6 x 1 depth 12 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 H 14 14 15 18 21 ZZ 83 86 90 110 117 Model MUWB25 MUWB32 MUWB40 MUWB50 MUWB63 Model MUWB25 MUWB32 MUWB40

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

2.0

LPV22 (N.O.) y y r r t i t u u o e e w w q q Component Parts No.

EXxx-OMY0004

Specifications Table 12-1 EX245-DY1 specifications Item Description General Dimensions (W x L x H) in mm 54 x 120 x 61 Weight 280 g or less Housing material Nylon, PBT Electrical Rated supply voltage 24 V DC Voltage drop to load supply Max. 1.6 V Internal current consumption at 24 V DC 50 mA or less Load connection 4 x M12, 5-way sockets with double allocation Over Voltage protection Yes,

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

1010 (FKM) 1.3 x 1011 (FKM) A w, e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Sealmaterial Symbol Seal material Compound no.

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

Suction Guard (Produced upon receipt of order) FHG Series

(Including O-ring for element) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B), 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B), 16 (2B) 20 (2 1/2B), 24 (3B) 70 x 90 90 x 125 110 x 190 EM220-074N EM320-074N EM420-074N EM220-105N EM320-105N EM420-105N EM220-149N EM320-149N EM420-149N Note 1) The symbol at the end of the element part no. indicates

EXxx-OMY0006CN

Table 12-1 EX245-DY1 (W x L x H) mm 54 x 120 x 61 280 g , PBT 24 V DC 1.6 V 50 mA 4 x M125 A code 2 / , US2 30 V /1 0.5A /1 2 A 1 1 8 PNP 76 No.EX##-OMY0006CN 12.3. /SI IP65M12 M12,5 , Table 12-2 EX245-DY1 (TOP View) 1 N.C.() 2 2 DO ( n+1) 3 5 1 3 0 V (/) 4 DO ( n) 4 5 FE/ 12.4.

Cylinder with Lock Series MNB

Note 1) l (Drill through) Cotter pin d D m Dd9 L H B C 3 x 18l 4 x 25l 4 x 35l M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 16.5 21 26 31 39 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 36 51 72 4 4.5 5 3 4 4 44 60 82 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 -0.040 -0.076 -0.050 -0.093 -0.065 -0.117 Note 1) A cotter

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

side, same location) (Side port) (For front port, use hexagon socket head set screw) S BE CB CA CRB1 BF DD MSU D BD BG A CRJ 2.2 (0.4) Note 1) CRA1 SD 16 BA CRQ2 2 x M3 x 0.5 depth 4 BB W MSQ 2 x M3 x 0.5 (Front port) (For side port, use hexagon socket head set screw) MRQ N DBC 20With external stopper: CRJU Note 2) For the 180 specification, the slated line area do not exist.