Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

With switch unit + Auto switch R73, Rotation 180, Side port location MDSUB20-180S-R73 Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors.

VS7-6

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

A

112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77 74 59

VP3145/3165/3185

Pg9 Rc 1/4 Pilot EXH 2-Rc 1/8 (External pilot port) (Mounting hole) 2-8.5 EXH 205.1 196.1 PA PE 156 103 119 112 93 IN EXH OUT 65 62 42 42 25 (EXH port) Rc 3/4 (IN, OUT port) 2-Rc 3/8, 1/2, 3/4 36 71 36 When B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Smooth Cylinder/Low Speed Cylinder

35 37.5 38 32 39 36 35 32.5 35.5 26.5 29.5 29.5 32 31.5 34.5 28 31 50 50 41.5 40.5 43 43.5 40 46 44 42 40.5 42.5 34.5 36.5 37.5 39.5 39.5 41.5 36 38 63 63 48.5 47.5 50 50.5 40 46 44 42 40.5 42.5 34.5 36.5 37.5 39.5 39.5 41.5 36 38 80 80 59 44.5 46.5 47.5 49.5 46 48 100 100 69.5 44.5 46.5 47.5 49.5 46 48 Note) Adjust the auto switch after confirming the operating conditions in the actual

10

40 20 22 24.5 12 15 15 7 9 9 6.5 8.5 8.5 50.5 (56.5) 60.5 (68.5) 65.5 (73.5) 36 36 41 38 49 49 Size Grommet DIN terminal Conduit terminal Conduit Flat terminal Grommet (With surge voltage suppressor) Q1 R1 Q2 R2 Q3 R3 S1 Q4 R4 S2 T Q5 R5 Q6 R6 27 29.5 32 1 2 3 40.5 (46.5) 49.5 (57.5) 54.5 (63) 30 32.5 35 27 (33) 36 (44) 41 (49) 64.5 67 69.5 32.5 (38.5) 41.5 (49.5) 46.5 (54.5) 52.5 55 57.5

10

31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 125 65.5 64.5 68.5 64.5 71 64.5 70.5 66.5 71.5 66.5 115 125 67.5

Air Cylinder Series CM2

40 40 44.5 ZZ 116 120 122 154 Bore size 20 25 32 40 h f e B3 Stroke 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 181 185 185 190 Bore size 20 25 32 40 30 32 32 41 25 25 25 26 36 36 36 46 With Rod Boot (mm) l Symbol Z ZZ JH JW Stroke 1 to 50 12.5 12.5 12.5 12.5 1 to 50 63 67 67

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

IDX-OM-W017

/4E IDF-S0001 IDF-S0002 1 IDFA6E15E1 1 IDFA3E/4E C32FP-260S C42FP-260S 1 IDFA6E15E1 1 IDFA3E/4E IDF-S1932 2 IDF-S1933 1 IDFA6E15E1 4-2 44 IDFA Series IDX-OM-W017 5 5 5-1 3 ON OFF 600mm 1 10% () ( 60cm 1 ) 10% 3 IDFA Series 5-1 5 1 IDX-OM-W017 5 () 60cm 1 2 INOUT INOUT () IDFA Series 5-1 5 2 IDX-OM-W017 6 6 6-1 IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3 12 24 36

PSxx-PSV0007

In this case, access will be denied for backup and restoration of data storage Device State Parameters (Index 36) Readable device states are as follows.

IR1000/2000/3000

Mounting is possible on either the front or the back Expanded regulating pressure range The maximum set pressure has been expanded from the conventional 0.7MPa to 0.8MPa Compact and light weight IR1000 width 35mm weight 140g (previously unavailable small size added) IR2000 width 50mm weight 300g ( width 14%, weight 6% Compared to SMC IR200) IR3000 width 66mm weight 640g ( width 21%, weight 36%

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Panel mount union LQ2P 4 P. 28 5 2 3 Union LQ2U 4 P. 28 5 Note) Basic size With reducer Insertion Tool Needle Valve P. 36 P. 32 Type Class Series Applicable tubing O.D. 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" Metric size LQ-GJ LQ-GK 1, 2 LVN Inch size J type K type LQ-GL

Electric Actuator with Integrated Guide Series LTF

Electric Corporation] [Yasukawa Electric Corporation] Table Table Frame-type linear guide Frame-type linear guide One-piece structure of the linear guide integrated with the frame Martensitic stainless steel Steel balls (Circulating) Recirculating Steel Balls Speed (mm/s) Page Standard stroke (mm) and Model Non-standard motor Standard motor Deflection 100 200 300 400 500 600 700 800 900 1000 36

ISO Standard Hydraulic Cylinder ø 40, ø 50, ø 63, ø 80, ø 100 CHSD Series

Standard Stroke Bore size (mm) Standard stroke (mm) 40 50 63 80 100 25 to 800 25 to 800 25 to 800 25 to 800 25 to 1000 Theoretical Output OUT IN Unit: N Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 3.5 10 7 OUT 1256 4396 8792 12560 40 22 IN 876 3066 6132 8760 OUT 1963 6871 13741 19630 50 28 IN 1347 4715 9429 13470 OUT 3117 10910 21819 31170 63 36

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Mass (g) Standard stroke (mm) End lock additional mass Model D25 52 138 186 350 487 918 1,420 5 36 10 40 15 44 20 48 30 56 50 157 222 400 547 1,000 1,533 75 175 258 450 608 1,083 1,645 100 194 294 500 669 1,165 1,758 125 549 729 1,247 1,870 150 599 790 1,330 1,983 175 649 851 1,412 2,095 200 699 912 1,495 2,208 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 29 34 42 55 90 133 -X Bore size (

Stroke Reading Rodless Cylinder with Brake ML2B Series ø 25, ø 32, ø 40

Stroke Adjustment Unit Specifications Applicable bore size (mm) 25 L RB1007 + with adjustment bolt 0 to 11.5 11.5 to 23 23 to 34.5 32 L RB1412 + with adjustment bolt 0 to 12 12 to 24 24 to 36 40 L RB1412 + with adjustment bolt 0 to 16 16 to 32 32 to 48 Unit symbol Configuration Shock absorber model Without spacer With short spacer With long spacer Stroke adjustment range by intermediate fixing

CY1

21 38 24 36 7.5 24 M6 x 1 x 8 9 CY1R25 8.5 9.5 5.2 3 1 27.8 6 44 42.5 44 41 23.5 43 23.5 41 6.5 23.5 M6 x 1 x 8 8.5 CY1R32 10.5 11 6.5 3 1.5 35 7 55 53.5 55 52 29 54 29 51 7 29 M8 x 1.25 x 10 10.5 CY1R40 10 11 6.5 5 2 43 7 65 63.5 67 62 36 66 36 62 8 36 M8 x 1.25 x 10 13 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92

Compact Rotary Actuator Series CRQ2

1 to 30 1 to 32 1 to 36 X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 X 3.5 to 21 4 to 24 4 to 27 Size 20 30 40 Symbol: A57 Symbol: A55 Symbol: A56 Both the long shaft and short shaft are shortened.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB) A (3 x 3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) NB 5h9 6h9 6h9 K 4 5 6 J 10 12 14 HB 36 42 50 HA 44 50 59 FX 12 15 18 EO 9.5 10 12.5 EC 7.5 8 9.5 DO 19.5 22 26.5 A 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 B 30 36 42 CA 7 7 7.5 AE 27 28 32 Q 6 7 8 AA 46 49 55 AD 16 18 20