CV/MVGQ

Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1

MHC2-6/MHCA2-6

MHC2-6 MHCA2-6 Model (2) (1) Cylinder bore (mm) MHCA2-6 Axial ported (With hose nipple) Opening/Closing angle (Both sides) Mass (g) Action Model Gripping moment (Effective value) Nm MHC2-6D MHCA2-6D MHC2-6S MHCA2-6S 22 19 22 19 6 6 6 6 Double acting 30 to 10 0.038 30 to 10 Single acting (Normally open) JIS Symbol Double acting 0.024 Note 1) At the pressure of 0.5 MPa Note 2) Excluding the

air-filter-e

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

Air Preparation Equipment

FGF-BT02 4 Element Polyester Element 4 Polyester 1 AL-26S AL-26S V-band 5 FGF-BA01 Stainless steel NBR Legs assembly (with bolt, nut, flat washer) AL-27S 1 AL-27S FGF-OP01 FGF-OP01 (Set) FGF1 6 1 Carbon steel O-ring 11 1 AL-23S AL-23S FGFS1 FGFL1 1 1 NBR FKM FGF-KT01 FGF-KT02 FGF-KT01 FGF-KT02 FKM O-ring 7 1 AL-24S AL-24S FGF-KT03 FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 Holder assembly

VCHR

6 @0 No. Description Material Body 1 Aluminum + Hard anodized !3 Bonnet 2 Aluminum + Hard anodized @6 3 Valve Stainless steel i 4 Valve spool Stainless steel @7 5 Piston Steel + Electroless nickel plated o @5 6 Spring guide Steel + Electroless nickel plated 7 Spring seat Steel + Electroless nickel plated !4 !1 8 Spool guide Aluminum + Hard anodized 9 Seal A Resin r !

AMX-OM-R001E

Standard Compressed air outlet Applicable tube O.D. 6 Compressed air inlet Applicable tube O.D. 6 Option P Purge air outlet for dehumidification Applicable tube O.D. 6 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation

E,R.L.

Ex.mCG:23R Body slzo 1 0 M 5 20_ya 3 0 _ % 10-tA 50-.A 6 0 1 Polt thread [ NPT Nll Rc (PT) F P F Series NAL Lubricator NAL5qD.6{X'O Flow Characteristics Gonstruction./Parts List NAL5flXh6IXXI tlaln Part8 O I Body I Platinum silver pairiting a I HoGing I Alrminum die cas'ting Parts List 1 1 1 7 1 0 Attachments 3/a'1 Allows for ease of installation and maintenance. Gffi@ NE60.

30

Model Order number M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 H 5 5 6 6 6 7 7 7 8 10 10 11 B C 15 15 19.6 19.6 19.6 21.9 21.9 21.9 25.4 27.7 27.7 31.2 JC20-8-100 JC20-8-125 JC32-10-100 JC30-10-125 JC25-10-150 JC40-12-125 JC40-12-150 JC40-12-175 JC40-14-150 JC50-16-150 JC63-16-200 JC63-18-150 DA00207 DA00169 DA00141

IIIIIIIIII

F-4300-2 F-4300-5 F-4300-15 F-4300-30 F-4300-60 F-4300-100 .2 .5 .5 .5 .5 1 2 5 15 30 60 100 30 30 45 60 120 120 .1 .2 .4 .6 1.5 2.0 .2 .35 .6 1.0 2.5 3.5 3A 4A 4A 4A 4A 4A Wetted materials For special deadband or current requirements, contact factory See Appendix A F-4300BARBED FITTING SPECIAL OPTIONS RANGE (PSI) MOUNTING STYLE B80 = NYLON 1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Selection procedure 1. Look up from the 4Hz switching cycle to find the intersection with SUP=0.3MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 50l/min. 100 50 1 0 2 3 4 5 6 7 Cycle (Hz) Viscosity characteristics (flow rate correction for viscous fluids) Caution 100 1.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

button 100 125 23 RESET (175) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Digital Flow Switch (Integrated display type)

CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 ft3 x 10-1 flow Min. setting/display unit 0.1 ft3 x 10-1 0.1 ft3 x 10-1 1 ft3 x 10-1 1 ft3 x 10-1 Conversion of accumulated pulse 0.1 1 1 1 ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse ft3 x 10-1/pulse : Flow rate in the specification is the value at standard

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Available in 1/8 ~ 1 Tube Diameters, For All Body Series Class 100 Cleaning & Packaging Series LVQ HowT o Order LVQ 2 0 S 07 Body Class Space Saving Option Symbol 2 3 4 5 6 Body Class 2 3 4 5 6 Orifice Dia. 4 8 10 16 22 S Space saving connection Pilot Connection Nil M N LQ LQ Thread type 1/8 diameter 5/32 (4mm) NPT1/8 Diff. Dia.

Vacuum Module: Ejector System Series ZX

Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. 6 4A 20 VJ10 6 10 15 20 25 30 0.6 m 5A 20 ZS ZF For ZSE3 1 m (For 100 VAC) 1.5 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire with connector part numbers. Ordering example) ZX1051-K15LOECN(-Q) 1 pc. VJ10-20-4A-6 2 pcs.

11-cq2-e

6 Set of left nos. !4, !5, !6. Rod seal Piston seal NBR Tube gasket CQ2A100-L-PS Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) Retaining Ring Installation/Removal Caution 1.

Compact Cylinder/Standard Type: Double Acting, Single Rod Series CQ2

6 Set of left nos. !4, !5, !6. Rod seal Piston seal NBR Tube gasket CQ2A100-L-PS Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) Retaining Ring Installation/Removal Caution 1.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Cylinder: Non-lube type 1 2 1 2 2 1 2 1 1 1 VER 3 L L 2 2 VEA 10 AFM AF ARP20K/30K/40K VHS VY1 1 1 12 2 4 14 Solenoid valve: Non-lube type VBA VBAT 5 1 3 AP100 2 1 2 1 2 1 L L AFM AF ARP 701 Direct Operated Precision Regulator/Modular Type ARP20 to ARP40 RoHS Direct Operated Precision Regulator with Backflow Function/Modular Type ARP20K to ARP40K Symbol Regulator with backflow function Regulator

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to