reduces flow setting time

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection thread size Proper tightening torque [Nm] NPT, R1/8 3 to 5 NPT, R1/4 8 to 12 NPT, R3/8 15 to 20 NPT, R1/2 20 to 25 Connection Female Thread: G Chamfered area for female

Table of Contents

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 3 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

. + 4 x (n pcs. 1) 360.3 360.3 360.3 4 x R3 or less 4 x R3 or less 33 ZSE20(F)/ISE20 Series Function Details ZSE20C(F)/ISE20C(H) ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Display examples of the main and sub (set value) screens of each mode.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2 46.5 R3

V

(Note 4) Perfect dry air (dew point equals to -30C) No grease on main valve.

1.1

property value Conventional unit system Density [kg/l] Specific heat C [kcal/(kgfC)] Specific heat C [kJ/(kgK)] Weight: volume ratio [kgf/l] Temperature 1.02 1.02 0.93 3.91 5C 1.02 1.02 0.93 3.91 10C 1.02 1.02 0.93 3.91 15C 1.01 1.01 0.93 3.91 20C 1.01 1.01 0.93 3.91 25C 1.01 1.01 0.94 3.91 30C 1.01 1.01 0.94 3.92 35C The above shown are reference values.

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X5 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

Vacuum

C Panel mounting Internalthrcad M N45 (10-32 nom.) female K21V 0-30inHg 1/8"NPT Dimensions: Height . 2.'1 " Thickness .-..,.,.,. 0,9' Width (diameter) . 1.5" Gauge with Panel Mounting As6'y (dimensions tor mtg. hole) R3 M5xO.8 x 5 Panel lhickness Max. 3 5 M5XO.8X 1 / 4 . 1 A 1 5 5 nccesories I SYJ .

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Type VQZ300 Dimensions: VQZ300 (mm) Valve Scale: 40% N7T, N9T, N11T, 02T Grommet (G): VQZ3 2(R)G -N7T, N9T, N11T, 02T N7T: One-touch fittings for 1/4" N9T: One-touch fittings for 5/16" 75.5 300 N11T: One-touch fittings for 3/8" 60.5 24.5 Mounting holes (Lead wire length) 02T: 1/4 NPTF 41.8 22 23.4 Mounting holes 28.5 20 A 4 13 18 SMC 38 2 Cover diameter 1.4 Cross sectional area 0.2mm2 46.5 R3

Thermo-chiller/Rack Mount Type

1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103 0.99 1 x 103 35C 1.01 3.91 x 103 1.01 0.94 x 103 40C 0.99 4.18 x 103 0.99 1 x 103 40C 1.01 3.92 x 103 1.01 0.94 x 103 * Shown above are reference values.

Air Pilot Operated Series NVSA

Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'-dy w[h4t hurforr.lor -d rr$ ttrtodr Dbr bn.tron cdinr d d.rdr 17A, rrB, t. l.t dddl a.nd l4l rf,, iPTF I aor @* n3ny .

Modular F.R.L. Pressure Control Equipment

Air Filter + Mist Separator + Regulator ACG20C/30C/40C Options/Attachments Part No. Options/Attachments part no. ACG20C ACG30C ACG40C Model Description Pressure gauge Note 1) 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.

Modular F.R.L. Unit

Unit AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) K M Square embedded type pressure gauge (Option) Port size N Min. clearance for maintenance Drain Drain D Air filter Mist separator Regulator AC25C, 30C, 40C A Q G F E T Pressure gauge port size L P H B C OUT IN U H L Pressure gauge (Option) K M Square embedded type pressure

modular-press-e

Air Filter + Mist Separator + Regulator ACG20C/30C/40C Options/Attachments Part No. Options/Attachments part no. ACG20C ACG30C ACG40C Model Description Pressure gauge Note 1) 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional N.C. N.O.

IMPACT BLOW GUN

Warning Male thread Tightening torque [Nm] R3/8 22 to 24 1. Install a stop valve on the supply pressure side of the blow gun. 5. Allow extra length when connecting a tube to accommodate changes in tube length due to pressure. It will be emergency shut off in case of unexpected leakage or damage. 6.

Direct Solenoid

{/s6ews tF2 = SPR0102 Ooubl Inlerlace Feg. w/icfsws +R3 = SPF0101 SinSle hlerlac Reg. w/98u9 0-60 PSI tR4 = SPRo101 Sinsl Interlace Feg. Vqauge G160 PSI T = Top wie oudel 1 sjngr sol-/+ring rturn I 2 oouble sol,/datntsd t 3Oouble Sol,/sprhg cenlded t (alr Fds blockd in ndbau 4. Doublo Sol./sPdng c6ntsrd t (cy'por6 opn io exhausi in n6uttaD.

Air Pilot Operated

Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'-dy w[h4t hurforr.lor -d rr$ ttrtodr Dbr bn.tron cdinr d d.rdr 17A, rrB, t. l.t dddl a.nd l4l rf,, iPTF I aor @* n3ny .

Voltage Monitor for PFMV5

. -53No.PF-OMN0005-E Dimensions (in mm) PFMV3 Panel cut-out dimensions Panel thickness: 0.5 to 6.0 mm Individual Two or more in a row (n: The number of products) Horizontal Vertical : Ensure all corners are a maximum of R3.

Cylinder with Turntable Series MGT

molybdenum steel Hexagon socket head cap screw Note) Please refer to page 284 for details on components and replaceable parts for flat cylinders with guides (MGPM, MGPL). 454 Cylinder with Turntable Series MGT Dimensions 4 x YY depth YL XAH7 depth XL XB XAH7 a b c d e XAH7 XC XL X X0.02 T groove dimensions (mm) a b c d e XX section detail drawing Bore size (mm) 63 80 100 11 17.8 10 7 18.5 2 x R3

OMR0032

Caution Prepare 2 separate 24 VDC power supplies for the CN1 controller power supply and CN5 input / output signal power supply. 35 - (3) Pulse input internal circuit B7 R1 B8 Pulse input signal switch R2 B9 Main circuit R3 B10 R1 R2 R3 Pulse input signal Power supply voltage Input signal method Current limiting resistor R for pulse input signal