VACUUM UNIT, VACUUM SERIES, ZM VACUUM SYSTEM, HA, ZM NOZZLE SIZE 1.2, 0.21218 lb

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

CRB2/CRBU2/CRB1

Applicable shaft type: K The long shaft can be further shortened by machining a middle-cut chamfer into it. (The position of the chamfer is same as the standard one.) (If shortening the shaft is not required, indicate "" for dimension X.) Applicable shaft types: J, K, T (mm) W1 X L1 max. L3 max. (mm) Shaft type J K T J K T J K T J K T Size Size Y W2 L2 max. L4 max.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

J K Refer to S page 11-2-8.

Table of Contents

J K Refer to S page 11-2-8.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

J K Refer to S page 11-2-8.

Rotary Actuator

V V K* K* K* -XA46 -XA51 Change of long shaft length (Without keyway) V V V V T, J, K* K* T, K* J* K* MSQ MSZ CRQ2X MSQX -XA52 Change of short shaft length (Without keyway) V V K* K* K* -XA53 Change of double shaft length (Both without keyway) V V V K* -XA54 Change of long shaft length (With four chamfers) V V V X, Z* X, Z* -XA55 Change of short shaft length (With four chamfers)

High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 A XLS Series Dimensions XLS/Without control power supply D Lead wire AWG20, O.D.: 2.63 mm E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT

Electric Actuators

24 66 to 400 110 104 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300

Air Cylinder Series CM2

Grease pack part no.: GR-S-010 (10 g) Nickel plated Nickel plated Technical data 151 Series CM2W Basic Style (B) CM2WB Bore size Stroke Effective thread length 2 x FL H1 H2 Width across flats B2 Width across flats B1 2 x P (Rc, NPT, G) 2 x NN G G MM I Width across flats KA Width across flats KA 2 x Eh8 NA D D AL A K AL A K F N H F N MM NA S + Stroke ZZ + 2 x Stroke H + Stroke l 8 8 Width

Rotary Actuator/Vane Type

shaft length XA48 XA49 Change of short shaft length Y* Y* Y* XA49 XA50 Change of double shaft length Y* Y* XA50 XA51 Change of long shaft length K,T* J* K,T* J* K* XA51 XA52 Change of short shaft length K* K* K* K* K* K* K* K* XA52 XA53 Change of double shaft length K* K* K* K* K* K* XA53 XA55 Change of short shaft length J* J* J* J* J* J* XA55 XA57 Change of double shaft length

NCQ2/CQ2

UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder

D D 25 M E 2.5 through-hole 2 x 4 x OA thread depth RA K 4 pcs.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

CLKQ K G P G P Table 2.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Nozzle Diameter: ø0.5, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø6, VAC: One-touch Fitting Ø6, EXH: One-touch Fitting Ø6

Nozzle Diameter: ø0.7, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø6, VAC: One-touch Fitting Ø6, EXH: One-touch Fitting Ø6

Nozzle Diameter: ø0.5, Body Style: Body Ported, Vacuum Pressure: -660mmHg, SUP: One-touch Fitting Ø6, VAC: One-touch Fitting Ø6, EXH: One-touch Fitting Ø6

Nozzle Diameter: ø0.7, Body Style: Body Ported, Vacuum Pressure: -48KPa{-360mmHg}, SUP: One-touch Fitting Ø6, VAC: One-touch Fitting Ø6, EXH: One-touch Fitting Ø6