SMC Corporation of America
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Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1

flow, Vacuum (4W) L: Plug lead L plug connector, With lead wire and light and surge suppressor V U W (1) (1) Note 1) Power saver type LO: Plug lead L plug connector, Without lead wire and light and surge suppressor Rated voltage M: Plug lead M plug connector, With lead wire and light and surge suppressor 5 6 24V DC 12V DC Note) Consult SMC for other voltages.

No.VFS4000-OMY0001 / / VFS4000 . 1,2 1 . 3,4 2 1) . 5 2) . 6 3 . 7 4 . 7 5 1) DIN . 8 2) . 9 3) . 912 6 . 12 7 . 12 8 . 13 9 . 13 10 . 13 11 . 14 . 15 . 16 No.VFS4000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical

/O.D. mm Part no. 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 5/8 6/9 6.5/10 5/8 6/9 6.5/10 8/12 8.5/12.5 KK3P-50N -60N -65N KK4P-50N -60N -65N -80N -85N KKH3S-50N -60N -65N KKH4S-50N -60N -65N -80N -85N 1/8 1/8 1/4 1/4 Use Series KK plug with Series KKH socket, as there is no plug available in Series KKH.

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

1.4 0.26 0.12 1.2 1 8 VFS Double check VZS2650 500 26 or less 0.3 0.81 0.71 1 8 VS4 Note 1) Min. operating cycle is based on JIS B 8375 (One time per 30 days).

(Fig. 5) Mounting of the standard bracket (ZH18/20DA) and adjustment of the vacuum (V) port (1) The standard bracket for the ZH18/20DA can be mounted by using either mounting hole 1 or 2 (Fig. 6). (2) When mounting the product through mounting hole 1, mount the bracket to the installation surface first (Fig. 6). (3) To mount the product to the bracket, push it down with the adapters narrow

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 6 4 6 4 1/4 1/4 1/4 Symbol Symbol 5/16 5/16 5/32 5/32 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

Symbol Body class 2 3, 4, 5, 6 3, 4, 5, 6 Thread type M5 Rc 1/8 NPT 1/8 Nil N Variations Model LVC20 LVC30 LVC40 LVC60 LVC50 Orifice diameter 4 8 10 22 16 Tubing O.D. Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O.

Model g (oz) ZFA100 50 (1.75) 1/8 140 (4.94) High flow rate square type ZFA200 200 (7) 1/4 190 (6.71) ZFB10 10 to 20 (0.35 to 0.7) 4, 6, 3/16", 1/4" 22 (0.78) ZFB20 30 to 50 (1.05 to 1.75) 6, 8, 1/4" 30 (1.06) Universal type ZFB30 75 (2.63) 10, 3/8" 40 (1.41) ZFB401 100 (3.5) 1/2" 62 (2.19) ZFA100 Specifications Air, Nitrogen Fluid Negative pressure Operating pressure 0.5MPa (72.5psi) Withstand

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

Fieldbus interface connector layout 6 BUS OUT: M12 4-pin socket D-coded Bit: 7 0 Byte 0 Offset Byte 1 Offset 1 EX260 Series for EtherNet/IPTM No.

6 5 N I K ZZ Z NN NA Stroke range 40 32 25 20 26.5 22 20 20 51 42.5 34.5 30 236 181 159 146 146 7 200 to 1000 150 to 1000 150 to 700 150 to 700 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M32 x 2 M26 x 1.5 M26 x 1.5 M20 x 1.5 1/4 1/8 1/8 1/8 8 8 8 46.5 37.5 33.5 5.5 5.5 5 208 195 10 56.2 867

(mm) 4 6 8 10 12 I.D. (mm) 2.5 4 6 7.5 9 White (W) Black (B) Red (R) Blue (BU) Yellow (Y) Green (G) Air/Nitrogen gas/Water (Pure water) (1) Fluid Max. operating pressure (at 20C) 1.0 MPa (2) 0.7 MPa (2) Min. bending radius (mm) 25 35 45 55 15 Refer to the burst pressure characteristics curve.

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-41 Series VZM500 How to Order S 01 01 0 VZM55 Option Suffix for actuator F Foot bracket Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 01 1 8 Roller lever 01 Black 1 8 NPT N01 One way roller lever 02 Green G F01 1 8 Straight plunger 05 Y Yellow Roller plunger

4 byte (Default setting) 6 : : OFF OFF OFF ON ON ON 1 2 3 4 5 6 7 8 7 8 1 byte 2 byte 3 byte : : ON End plate bracket (EX600-ZMA2) OFF OFF OFF ON ON ON : : Remote Control mode *2 DHCP mode *1 192.168.1.254 192.168.0.254 192.168.1.1 192.168.0.1 IP address Diagnostic size set for the input : : 5 6 byte 4 byte 0 byte EtherNet/IPTM status Refer to the SMC website (URL http://www.smcworld.com

Description Material Note 1 Body PBT Caution 1. Quality of supply air 2 Diffuser PBT Type S: White, Type L: Black 3 Cap POM Use clean compressed air as fluid. (Air quality class 2 : 4 : 3, 2 : 5 : 3, or 2 : 6 : 3 as specified in ISO 8573-1: 2010 is recommended.)

When requiring stainless steel and 40 m; 17-40 4 The bowl of AL series is used. 5 Drain cock thread machining ( ) for products with metal bowl. 6 This symbol indicates the port size. Flow rate (L/min (ANR)) 1 4 1 4 1 6 8 Rc 1 4 NPT 1 4 G 661 A