MY1

3 !1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

VP4

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18

PFA/PFW

) 4 3 42 2 1 4 Connector pin numbers 43 2-3.4 Pin name Pin No.

VCW

L2 VV2CW4 95 136.5 178 219.5 261 302.5 344 385.5 427 L3 107 148.5 190 231.5 273 314.5 356 397.5 439 2 stns. x 1 3 stns. x 1 2 stns. x 2 2 stns. + 3stns. 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. x 2 Manifold composition Note) Manifold base is consisted of the junction of 2 and 3 station bases.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2 !3 !6 !7 !

LEF-OM002xx

*3 *2 *2 *3 *1 Every parameter is set to the recommended condition before shipment from the factory.

Slider Type Ball Screw Drive/11-LEFS Series

plug connector*3 MJ LECPMJ*2 *3 !

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

8 ( 9 3 . 9 ) 5 . 8 3 2 ( 3 7 . 1 ) 4 4 ( 2 / 1 8 / 3 4 / 1 6 0 N 0 0 4 F L A N 5 3 . 3 ) 5 8 ( 0 7 . 9 ) 5 . 6 4 2 ( 1 8 . 1 ) 6 4 ( 4 / 3 0 0 5 F L A N 4 5 . 3 ) 0 9 ( 3 6 . 1 1 ) 5 . 5 9 2 ( 9 8 . 1 ) 8 4 ( 1 4 / 3 0 0 6 F L A N 4 9 . 3 ) 0 0 1 ( 8 5 . 2 1 ) 5 . 9 1 3 ( 1 0 . 2 ) 1 5 ( 1 0 0 8 F L A N 4 9 . 3 ) 0 0 1 ( 3 3 . 3 1 ) 5 . 8 3 3 ( 2 3 . 2 ) 9 5 ( 2 / 1 1 4 / 1 1 0 0 9 F

CXWM/CXWL

2, !3, !4, !5.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Refer to front matter 56 for Safety Instructions and pages 468 to 471 for Flow Control Equipment Precautions. 0 1 G 3/8 Note 2) F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1) R 3/8 R 1/2 10-32 UNF NPT 1/8 N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 614 Series AS20-T Tamper Proof Speed Controller Standard Type, Elbow

MHF2

screws) 3 3 2-2H9 +0.025 0 depth 2 8 5 8 5 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting thread 11 58 12-3-14 15 Series MHF2 Low Profile Air Gripper Dimensions MHF2-12D 3H9 +0.025 0 depth 3 26 3H9 +0.030 0 depth 3 MHZ MHF MHL 2-M4 x 0.7 thread depth 10 MHR Mounting thread 4 42 4 MHK MHS 40 52 MHC 2-M4 x 0.7 thread depth 5 20 38 Mounting thread MHT E MHY 7.7 14.8 15 19

MHF2

Note) F9NWV F9NW 3-wire (NPN) Diagnostic indication (2-color display) F9PWV F9PW 3-wire (PNP) F9BWV F9BW 2-wire Lead wire length symbols: 0.5 mNil 3 m L 5 m Z (Example) M9N (Example) M9NL (Example) F9NWZ Note) Be careful for the differential of 2-color display type.

OMR0031

An example is shown below. +3 +3 +3 +3 direction + direction direction + direction 0 5 10 0 5 10 2 8 [mm] 2 8 [mm] This example shows the Target Position set at +3 mm. The table moves +3 mm from the current position.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

Compact Type

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

IDX-OM-W038

i-4 i.2.7 . i-4 i.2.8 . i-5 i.3 . i-6 i.4 . i-7 1 1.1 . 1-1 2 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.3 . 2-6 3 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-3 3.5 . 3-3 3.6 . 3-3 3.7 . 3-3 3.8 . 3-4 3.9 . 3-4 3.8 . 3-5 3.10 . 3-6 3.10.1 . 3-6 3.10.2 . 3-7 3.10.3 . 3-8 IDH Series IDX-OM-W038 3.10.5 . 3-9 3.10.6 PID . 3-

CQS

(2 color) D-F9PW 5.3-66 3 wire, PNP, In-line (2 color) D-F9BW 5.3-66 2 wire, In-line(2 color) Solid state switch D-F9NV 5.3-39 3 wire, NPN, Perpendicular D-F9PV 5.3-39 3 wire, Water resistant D-F9BV 5.3-39 2 wire, Perpendicular D-F9NWV 5.3-66 3 wire, NPN, Perpendicular(2 color) D-F9PWV 5.3-66 3 wire, Water resistant(2 color) D-F9BWV 5.3-66 2 wire, Perpendicular(2 color) D-F9BAL 2 wire, In-line

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Lubrication Equipment

-ISALT-9 ALT-9-IS2 1 1 1 1 2 4 1 4 3 AIR: OIL: 4 1 4 3 2 1 4 1 Port size 8 3 8 3 1 Fluid Proof pressure Max. operating pressure Air 1.5MPa 0.7MPa 1.0MPa Operating pressure differential range (1) 0.1 to 0.6MPa Vibration resistance {Differential pressure 0.3MPa } 2 1G(9.81m/sec ) or less 120 : 65 : 100 : 120 190 220 1800 4 1 8 3 1 : 460 1 : 650 4 1 Min. operating flow (l/min (ANR)) (2) 2 1

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

(3) Note 3) At rated voltage 1449 VT325 Series Flow Rate Characteristics/Weight Flow rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for