α PneuAlpha HARDWARE MANUAL

HEAD OFFICE: 1-16-4, SHIMBASHI, MINATO-KU, TOKYO 105, JAPAN TELEPHONE: 03-3502-2740 FACSIMILE: 03-3508-2480

ZFC Series

L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover

VER2000/4000

F2: The force that is ceated by the port 4 pressure (PA) that passes through the feedback passage and acts on the spool surface, and the spring force. VER VEA 5 (R1) 4 (A) 1 (P) 2 (B) VY2 OFF state VBA VBAT F1 < F2 condition: See figure q. 2 (B) 3 (R2) AP100 4 (A) ON state Immediately after turning on F1 > F2: See figure e.

ATX-OM-F003E

426 HAW110-30 1724 950 500 72 1210 365 267 303 356 200 Note 1 70 Note 1 195 8.0 18 3 1 1 1/4 395 459 Note 1) HAW110-30 is 220 HAW Series 6 4 1) Outer dimensions ATX-OM-F003E Water Cooled Aftercooler 4.

Pressure Relief 3 Port Valve with Locking Holes

dm3/s-bar) b Cv C(dm3/s-bar) b Cv VHS20 1/8 1/8 4.0 0.41 1.1 3.7 0.42 1.1 1/4 5.8 0.31 1.4 3.8 0.42 1.1 6 VHS30 1/4 1/4 8.8 0.44 2.4 8.0 0.46 2.3 3/8 14.1 0.28 3.5 7.8 0.46 2.2 1/4 9.5 0.49 2.8 13.3 0.47 3.6 VHS40 3/8 17.2 0.47 4.8 13.6 0.47 3.7 3/8 1/2 26.7 0.29 6.3 13.4 0.43 3.7 -6- 4.

LEJ-OM004xx

Contents Safety Instructions. 2 1.Outline of clean room specification. 4 1.1 Grease used . 4 1.2 Recommended tube diameter. 4 2.Raising dust characteristic . 4 2.1 Recommended tube diameter. 4 2.2 Amount of vacuum aspiration . 5 3.How to Order . 6 4.Construction. 7 1 11-LEJ Series / Slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and

Antistatic Tubing TA  Series

1208 12 8 BU C B Blue (Translucent) Clear (Material color) M-3AU-2, M-3AU-4 M-5AU-2, M-5AU-4 M-5AU-6, M-5H-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500

AD402/600

Port 3/4 3/4, 1 D I M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1 P2 A B Note 1) C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure

XLA Series

Construction and Outer dimensions Auto switch (option) Indicator (option) Bonnet assembly (maintenance part) 1 Magnet (option) Pilot Port (opened by applying pressure) Bellows holder (material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange )

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

The base oil of the grease in the cylinder may seep out of the tube, cover, slider or guide sliding part depending on the operating conditions (ambient temperature 40o C or more, pressurized condition, low frequency operation). 2-4. Mounting and Installation 2-4-1. Mounting Surface It is recommended to mount the cylinder on a surface with a high flatness (e.g. a machined surface).

VFR2000 Series

No.VFR2000-OMH0002-A 5 Port Solenoid Valve PRODUCT NAME VFR2000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4, 5 Selection -4, 5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6, 7 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 to 13 Trouble shooting -14 Remedy -15 -1VFR2000-OMH0002-A Safety Instructions These safety

ML1C

0 CLJ2 CLM2 CLG1 CL1 w $8 @4 i u !7 t !2 $9 !3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

Safety Instructions

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.

Air Catch Sensor

ISA2-G ISA2-H Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Supply pressure: 100 kPa Detection nozzle: 2.0 Detection side piping: 6 x 4 tubing 5 m Supply pressure: 100 kPa Detection distance-Response time characteristics Detection distance-Response time characteristics Detection nozzle: 1.5 Detection side piping: 6 x 4 Supply pressure: 100 kPa Set distance: 0.15 mm Detection

V100 Series

Remove the excess sealant. 4) Insufficient tightening may cause seal failure or loosen the threads. 6 No.V100-OMV0001 V100 Series Precautions for 3 Port Solenoid Valve 4 Be sure to read before handling. 4. If an excessive amount of carbon powder is present, install a mist separator on the upstream side of the valve.

VQ4000/5000 (Pilot Valve V100)

Purify the air source. 4. Air leaks from the manifold 4-1) Loose DIN rail clamp screw Hold manifolds tightly for tightening so that there is no gap between the valves.

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

If the drain bowl is difficult to check and remove, installation of a drain bowl with an auto drain option is recommended. 4. Use the product within the specified fluid and ambient temperature range. When operating at temperatures below 5o C, moisture in the circuit may freeze and cause damage to the seals or a malfunction. Use within the specified operating temperature range. 5.

VFR4000-OMH0003

Release of residual pressure Take note that the leakage voltage will increase when a resistor is used in parallel with a switching element or when a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the leakage voltage passing through the C-R circuit. The suppressor residual leakage voltage should be as follows.