CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

Mounting same side MG D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 MGP 15+45( n2 ) (n=2, 4, 6) 2 60+45(n2) 60 15 10 MGQ 15+50( n2 ) (n=2, 4, 6) MGG 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 MGC 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL MGF 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 MGZ D-B59W 75 20 D-A3A D-G39A D-K39A D-A44A CY 10 100

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

Table of Contents

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

Brake mechanism added

121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

7

Hs B A 16 8.5 D-B54 Hs B 33 A Minimum Stroke for Auto Switch Mounting Unit: mm Same surface With 2 pcs. Auto switch model With 1 pc. Different surfaces D-P3DWA D-P4DW D-P79WSE D-P74 24.5 50 50 50 12 D-M9 D-M9W D-M9A Caution D-A9 D-B54 50 50 75 As for the precautions on the auto switches, product specifications, refer to pages 437 to 439.

Sine Rodless Cylinder Series REA/REB

RHC RZQ D-X Individual -X 961 Series REAS Auto Switch Proper Mounting Position (Detection at Stroke End) B A (mm) A dimension B dimension Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 Bore size (mm) 10 35 35.5 45 44.5 40.5

CQS

20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Built-in magnet Rod end male thread

REA/REB

D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) Note 1) D-F9N, D-F9P, D-F9B Note 2) Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for REAR10/15/20 and REBR15.

CQM

Note 12 16 20 25 32 40 50 D-F7 , J79 D-F7 V D-J79C D-F7 W, J79W D-F7 WV D-F7BAL, F7BAVL D-F79F D-F7NTL D-F7, D-F7V D-J79, D-J79C D-F7W, D-F7WV D-J79W D-F7BAL, D-F7BAVL D-F7NTL, D-F79F -X Switch mounting screw (M3 x 0.5 x 10 ) Switch spacer Switch mounting nut D-A7 , A80 D-A73C, A80C D-A7 H, A80H D-A79W 6 6 6 32, 40 50 BQ-2 20Data D-F9W, D-F9WV D-F9BAL 5.5 3 4 5 5.5 5.5 5.5 Switch mounting

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

CLK1

Symbol Auto switch positioning and mounting 40 50 63 2 pcs. 1 pc. "n" pcs. Model A B Same side Same side 8 0 0 D-P7, D-P8 25 25 25 50 + 65(n-2) 50 50 D-P7, D-P8 D-P5 Approx. Hs 45 49 54.5 Approx. Ht 28 28 28 A B 3 4.5 4.5 26 27.5 27.5 D-P5 Approx. Hs 46 50 56 Approx.

Electric Actuator with Integrated Guide

D C B A 7 11 Standard Motor Series LTF6 Motor Output Rolled Ball Screw 100W 10mm/10mm lead Horizontal Mount How to Order Stroke LTF6E NH 1 R 2 Motor/switch entry direction Left entry Power supply voltage Cable length 1 2 2 3 4 5 100V/110V AC(50/60Hz) 200V/220V AC(50/60Hz) 2m 3m 4m 5m Motor/switch entry direction R L Motor straight, motor cable, switch and switch rail located on the right

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Compact Cylinder with Lock Series CLQ

Hs A Auto switch mounting height (mm) Proper auto switch mounting positions (mm) D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9BAL D-F9V D-F9WV D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs 20 22 22.5 25 B A B A A B 20 25 36 6.5 37 7.5 33 3.5 24.5 27 24 25 32 41 8.5 9.5 38 5.5 42 27 29 26.5 32 40 8 9 43 5 44 40 32.5 30 30.5 40 50 10.5 49 7.5 50 11.5 46 36 36.5 38.5 50 63 48 13.5 49 14.5 45

REA/REB

REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Bore size (mm) RHC 10 35 35.5 45 44.5 40.5 39.5 MK(2) 15 34.5 35 62.5 62 40 57 20 64 64.5 50 49.5 69.5 44.5 RS Q G 25 44 44.5 71 70.5 49.5

REA/REB

REC A dimension B dimension Auto switch model CX D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F CY D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800