CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Stability of suction position,

w w t t w u t r r e r r r e e e q q q q q With set screw With male thread adapter (Vacuum inlet: Vertical) With female thread plate (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Lateral) Component Parts (Male thread) Component Parts (Female thread) No.

/

t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

0.55

M-type plug connector (M) DIN terminal (D) (Y) Conduit terminal (T) 103.5 84.5 84.5 R R P R R P R R P 198.2 220.8 Max. 10 216 Max. 10 179.2 201.8 197 (Indicator light) 89.6 100.9 98.5 Approx. 300 (Lead wire length) 116 Pg9 Pg9 Applicable cable O.D. 4.5 to 7 136 139.2 [129.2] 145 149.2 [139.2] Applicable cable O.D. 4.5 to 7 [ ]: Without indicator light Unless otherwise indicated, dimensions

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

9 @2 @0 @1 e w !5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

NCG/CG1

O knob M/O bolt M/O spring Stopper ring Note No.

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E A ZZ + Stroke L8 + Stroke H A WH G L2 BG L9 VD E R VA G BG L9 2 x 4 x RT 80, 100 BG 2 x 4 x RT CP96K (D) B CW Bore size Stroke 32, 40 2 x EE 80, 100 80, 100 PL SL PL 2 x EE port D1 Sectional view A-A BG 2 x 4 x RT PL Cushion valve WB WA Width across flats SW WA WB A KK B B D KK E R A 2 x 4 x RT L2 BG L9 VD ZY + 2 x Stroke H + Stroke L8 + Stroke H A WH G G WH + Stroke A L2 BG VD L12 E R

Compact Manifold Regulator

q i w t ARJ y AR425 to 935 w r ARX t AMR e ARM ARM u y u q i ARP IR-A r o Replacement Parts Component Parts IR Description Material Part no.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Spool valve assembly Resin/HNBR e r t !0 !1 i q q u y For N.O.

C95

2 r!4 i yq !3t!8!1!7w !6ui e!5 !

45

R 3 VDC In the case of mixed specifications (M), indicate separately on the manifold specification sheet. Only Type 45T and 45T1 are available.

RB/RBL/RBQ

Ambient temperature Friction coefficient Unit kg m/sec m rad/sec m mm MPa N Nm cycle/min C 2 gh R m RHC m 2 1 2 m 2 1 2 m 2 1 2 1 2 T S R 2 mgh F1S S T t m m Nm C m/s kg MK(2) E1 + E2 mgS mgS F1S mgS F1S + mgS RS Q G E 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 d p F T n t kg RS H A Me 2 2 2 E 2 2 E 2 2 E 2 2 E 2 E m = 20 kg = 0.7 m/s d = 40 mm p = 0.5 MPa n = 20 cycle/min t = 25C

RB/RBL/RBQ

R 2 mgh F1S m Nm C m/s kg S T t m MK(2) E1 + E2 mgS F1S mgS mgS F1S + mgS RS Q G 2 2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E1 + E2 E Corresponding weight of impact object 2 2 E 2 2 E 2 2 E 2 2 Me kg RS H A E 2 E 2 Angle speed Friction coefficient rad/s 2.

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

VZ3000

Caution Mounting Screw Tightening Torques M2.5: 0.32 Nm (For stacking type manifold) 3-3-41 Series VZ3000 Exploded View/DIN Rail Manifold Type 45 Manifold r w U side r q e w (b) Lever (a) Bolt (Both sides) e (a) Bolt (Both sides) Replacement Parts No. Part no.

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.