RSH/RS1H

MI W S Axial direction The retardation value can be changed by rotating the adjustment dial. CEP1 Adjustment dial Option CE1 With cancel cap With lever detection switch With lock mechanism V m/min CE2 Work W Work W Work W ON OFF ML2B Work W Work W Cancel cap Drag C J G5-S Lever detection switch CV Bracket MVGQ The cancel cap holds the lever horizontally allowing a pallet to pass.

RSH/RS1H

CEP1 Adjustment dial Option CE1 With cancel cap With lever detection switch With lock mechanism V m/min CE2 Work W Work W Work W ON OFF ML2B Work W Work W Cancel cap Drag C J G5-S Lever detection switch CV Bracket MVGQ The cancel cap holds the lever horizontally allowing a pallet to pass.

ZSE2/ISE2

Lead wire: 0.6 m) C W/suction filter (Mounting on ZX unit) M5 x 0.8 0X Connector type (Lead wire: 3 m) CL W/suction filter (Mounting on ZX unit) M6 x 1 (Option) 0XY Without connector Base mounting (Mounting on ZR unit) 0R CN Note) Single mounting type: M5 x 0.8 (female) threaded.

Thermo-chiller

physical property values by circulating uid. m x C x (Tt T0) x V x C x T Q = = t t 1 x 150 x 4.186 x 103 x 10 900 = = 6977 [J/s] 7.0 [kW] m x C x (Tt T0) t x 860 x V x 60 x C x T t x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 7.0 [kW] x 1.2 = 1 x 150 x 60 x 1.0 x 103 x 10 15 x 860 8.4 [kW] = Q x t: Heat capacity [kJ] Thermo-chiller 6977 [W] = 7.0 [kW] Water bath

Wedge Cam Operation Provides

MHK2-20S MHK2-20C 80 60 70 50 Holding force (N) Holding force (N) 60 Allowable moment Pressure 0.6MPa 50 40 Model Allowable moment Pressure 0.6MPa Nm 40 0.5MPa 30 0.5MPa 0.05 MHK2-12S, C 30 0.4MPa 0.4MPa 0.12 MHK2-16S, C 20 20 0.3MPa 0.25 MHK2-20S, C 0.3MPa 10 10 0.49 MHK2-25S, C 0 0 20 40 60 80 20 40 60 80 M: Allowable moment (M = WL) Holding point L(mm) Holding point L(mm) W MHK2-25S MHK2

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously, supply pressure to port P on both

Stainless Steel Cylinder Series CJ5-S/Series CG5-S

Knuckle pin MM ND hole H10 L L l t t l t t RR1 m m m m d Dd9 d Dd9 0.1 0.3 NX +0.2 0 A1 U1 L 7 12 Material: Pin and snap ring both SUS304 Material: SUS304 Material: Pin and snap ring both SUS304 Part no.

HRL

x V x C x iT it m x C x (T0 Tt) it Q = = 1 x 250 x 4.186 x 103 x 12 900 = = 13953 [J/s] 14.0 [kW] m x C x (T0 Tt) it x 860 x V x 60 x C x iT it x 860 Q = = Cooling capacity = Considering a safety factor of 20%, 14.0 [kW] x 1.2 = 1 x 250 x 60 x 1.0 x 103 x 12 15 x 860 16.8 [kW] = Thermo-chiller Q x t: Heat capacity [kJ] 13953 [W] = 14.0 [kW] Water bath 20C Cooling capacity = Considering

NCA1

6 MF5 w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Air Cylinder NCA1 Series

w/Front Square Flange 5 1.5 6 MF6 w/Rear Square Flange 5 1.5 6 MP1 w/Double Rear Clevis 6 1.5 6 MP2 w/Double Detachable Rear Clevis 6 1.5 6 MP3 w/Cap Fixed Eye 7 1.5 6 MP4 w/Single Detachable Rear Clevis 7 1.5 6 MS1 w/Foot Mount 8 1.5 6 MS2 w/Side Lug 8 1.5 6 MS3 w/Centerlug 9 1.5 6 MS4 w/Side Tapped 9 1.5 6 MS7 w/Front Lug Mount 10 1.5 6 MT1 w/Head Trunnion 10 1.5 6 MT2 w/Rear Trunnion

Modular Type Regulator Series AR

w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Note No.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

cable type/length Robotic cable [m] Nil None R8 8*2 R1 1.5 RA 10*2 R3 3 RB 15*2 R5 5 RC 20*2 Nil Without option B With lock Size Stroke 100 200 300 400 500 600 25 V V V V V 32 V V V V V 40 V V V V V 11 Battery-less Absolute Encoder: Electric Actuator/High Rigidity and High Precision Slider Type LEKFS Series Battery-less Absolute (Step Motor 24 VDC) i Controller Nil Without controller

VQ7-6/7-8

Mounting bolt M5 X 115 with SW M5 X 35 with SW M5 X 15 with SW M5 X 45 with SW M5 X 60 with SW M5 X 65 with SW M5 X 70 with SW M5 X 75 with SW M5 X 90 with SW M5 X 95 with SW M5 X 100 with SW M5 X 105 with SW Size SMC SMC SMC SMC SMC Option mounting diagram SMC SMC SMC SMC Spacer 2 SMC Spacer 2 Interface regulator Spacer 1 Throttle valve spacer SMC Release valve spacer Spacer 2 Spacer 1 Spacer

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

CE

Bore size (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 x 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 M8 x 1.25 10 8 28 25.5 78 15.5 10 36 53.5 Q R T V Y N O P Bore size (mm) 12 20 47 7 53.5 22 7 M4 x 0.7 M5 x 0.8 50 15 62.5 36 5 5.5 M6 x 1 M5 x 0.8 Refer to page 11 regarding the rod end nut which is included.

Clean Air Module

Mount switches in locations where there is no vibration greater than 98 m/s2, or impact greater than 490 m/s2. 3. Do not use in an area where surges are generated.

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: Operation Manual, Calibration Certificate

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: Operation Manual, Calibration