Miniature Regulator Series ARJ210

AV Regulating pressure range AU Ambient and operating temperature range Weight AF Model AR Port size Model IR IN OUT ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 Rc 1/8 VEX NPT 1/8, M5 x 0.8 NPT 1/8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting NPT 1/8, M5 x 0.8 5/32" One-touch fitting ITV 1/4" One-touch fitting JIS Symbol

Table of Contents

8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1 1 flange 0.38 0.55 0.9 1.4 2.1 4.2 10.5 50 52 72 87 Weight (kg) JIS Symbol Note) Max. flow is at 0.7 MPa.

Precision Regulator Series IR1000/2000/3000

Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.

0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

VZA2000

VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-02 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9 1.9 Body ported Base mounted (With sub-plate) 2 position M5 x 0.8 Body side 1/8 3 position 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 0.54 0.19 0.56 0.23 2.4

•

(Same sunace) (n =2, 4. 6, S .. ) (I = 4 , 8, 12. 1 6'~"),--,-_ "-=,-4" '::J ~".-, ..,( ", = S. 12 ' =-6._) -1 R. Different surfaces 35 110 1 ~ ~N~_~s.

,

Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB)

,

1/8 Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA,

HRX-OM-X084

connector 1 pc. (3) Particle filter element 1 1 pc. (4) For option DM DI filter 1 pc.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Side-ported 1/4 Specifications Piping specifications Weight (kg) Model Port size for 1(P), 2(B), 4(A) Port size for 3(R2), 5(R1) Piping direction VS1-01-A01 VS1-01-A02 VS1-02-A01 1/8 Horizontal 0.14 1/4 Horizontal 0.07 1/8 1 Solenoid Valve (with M Connector) Comforming to ISO 15407-1 Series EVS1-01/1-02 Models Series EVS1-01 Flow rate characteristics 14, 2 (PA, B) 4, 25, 3 (A, BEA, EB)

KJ

53 9.2 15.5 2.5 1 4 1 8 1 4 1 8 Applicable tubing 5 32 10 3 16 Connection thread 1 4 1 4 12.5 4.6 17 3 8 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 5 16 14 6 18.5 15 3 8 16.5 7 21 19 14.5 18.5 20 9.6 22 1 2 Note) D: Max. diameter 15-4-13 6 Series KQ2 Straight Union: KQ2H Min. port size Applicable tubing O.D.

HRX-OM-W004

Communication alarm function . 4-1 4.1 Communication alarm occurs . 4-1 4.2 Communication alarm reset . 4-2 4.3 Setting and checking . 4-2 4.3.1 Setting and checking items. 4-2 4.3.2 Setting and checking . 4-3 HRR Series HRX-OM-W004 Chapter 1 Read before using Chapter 1 Read before using The communication of this device consists of contact input/output communication and serial communication

Vacuum Regulator

the same way as 2). 3) 4) Caution Plug nut 1.

IR1000/2000/3000

5l/min (ANR) or less (supply pressure: 1.0MPa) Air consumption Rc(PT) 1/4 Rc(PT) 1/8 Port size Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4, 3/8, 1/2 Rc(PT) 1/4 Pressure gauge port Rc(PT) 1/8 (2 locations) Ambient and fluid temperature 5 to 60C (with no freezing) 0.64 0.30 0.14 0.71 0.35 Weight (kg) Note 1) With the condition of no flow on the output side.

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

Speed Controller: Standard Type Series AS In-line Type

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 Construction AS2200-01

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

SYJA3000

(Bleed hole) With filter (80 Mesh) 5-Rc(PT)1/8 40 25.5 (Piping port) 20 11.5 12 R1 R2 P 1.6 18 22 22 (R1, R2 port) 2-Rc(PT)1/4 63 1.8 (Bleed port) With filter (80 Mesh) 227.2 3-Rc(PT)1/8, 1/4 (P, A, B port) 3 position closed center/exhaust center/pressure center: SYJA7 20-01 3 position closed center/exhaust center/pressure center: SYJA7 400 0 1 2 3 4 5 3 4 5 3.2 234 8.5 4.3 2(Mounting holes