HRX-OM-W004

. 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-3 3.5.1 Precautions after wiring and before communication . 3-3 3.5.2 Precautions for communicating . 3-3 3.6 Setting and checking . 3-4 3.6.1 Setting and checking items . 3-4 3.6.2 Setting and checking . 3-5 3.7 Communication sequence

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Base Mounted Metal Seal/Rubber Seal Series VQ

Series VQ1000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 1 1 08 C6 U1 F Series VQ1000 1 Option Symbol Nil 2 B D G1 G2 G3 J K N R S Option None 200/220 VAC models (Applicable to F and L kits) With back pressure check valve (2) Manifold 1 Plug-in unit DIN rail mounting 1 set of regulator unit (3) Stations 01 1 station 2 sets of regulator unit (3) 3 sets of regulator unit (3) With

REGULATOR

HOW TO ORDER AR 30 03 BG B K 1 4 5 6 3 2 1 1 1 1 Symbol Description Body size 20 25 30 40 50 60 Reverse flow function K With reverse flow function 2 2 2 2 Nil Rc N NPT F G Thread type 3 3 3 3 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 4 4 4 4 Port size Nil Without mounting option B With bracket H With set nut for panel mounting a Mounting Option Nil Without pressure gauge E Square embedding

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

Precision Regulator Series IR1000/2000/3000

Application 0 1 2 size Symbol IR1000 IR2000 IR3000 Made to Order Specifications (Refer to page 560) 01 02 03 04 1/8 1/4 3/8 1/2 Note) Air operated type is model IR3120 only.

HRX-OM-X084

breaker PT1 White 20 2A Circulating fluid outlet White 21 3A 22 (CN6) 1/3 Blue 23 21 24 Brown 35 Black Black Black Black 25 Blue 36 FL Flow rate sensor 26 Black 34 27 (CN5) 1/3 Brown 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown Black (CN6) 3/3 1 3 37 Refrigerator suctionT2 2 4 Black Blue PCB1 38 Circulating fluid outlet 39 Brown

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

Vacuum Regulator

connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs

VZ3000

VFR Thread type 1 3 5 F Z Plug-in VZ3 4 VP4 Note) VZS 1 0 5 L Non plug-in VZ3 4 VFS Type of actuation Thread type VS4 2 position single Nil Rc F N T G NPT VQ7 1 Body option NPTF EVS 0: Individual exhaust for the pilot valve Port size 2 position double 1 8 Nil: Without sub-plate 01: Rc With sub-plate VFN 2 3(R) port PE port 3: Common exhaust type for main and pilot valve 3 position closed

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

,

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

,

(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil

•

(Built~in magnet) Mounting Number 01 auto swItches ",B"', Basic . L Foot "', 2 pes. :3: 3 pes. F ' Rod !Ian e S 1 pc.

SYJA3000

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

KJ

8 1 4 3 16 5 32 16 3 1 4 3 16 1 4 16.5 3.5 5 16 1 4 17 4.6 3 8 3 8 5 16 18.5 6 1 2 1 2 3 8 21 7 Applicable tubing Note) D: Max. diameter Plug-in Y: KQ2U Applicable tubing O.D.

HRX-OM-W002

3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL