VT325

screw 2 1 3 (2b) How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

CC

/2 104 RB 223 92 116 123 61 121.8 98 156.5 35 18 35 109 65 86 45 88 65 1/2 1/2 139 259 92 116 123 61 133.8 134 185.5 40 24 50 140 65 116 66 112 85 1/2 3/4 139 J 319.5 144 180 183 60 133.8 134 181.5 40 24 50 136 93 116 66 108 81 3/4 3/4 202.5 L Dimension (mm) DT Model NB Effective oil level stroke W S QL QB P NL 800 700 600 500 400 300 200 100 50 -X CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1

Electro-Pneumatic Proportional Valve Series VEF/VEP

size Symbol Port size Symbol Symbol Standard characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2

3 Port Air Operated Valve Series SYJA300 1

VH Base mounted VHS Caution Pilot Pressure Range For Safety Instructions and Solenoid Valve Precautions, refer to pages 5-11-2 to 5-11-6. 0.6 Body ported Pilot pressure (MPa) Pilot pressure range 0.5 Series SYJA700 0.4 JIS Symbol 0.3 SYJA512 4 SYJA712 4 SYJA522 4 SYJA722 4 0.2 (A) 2 (A) 2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure (MPa) 1 (P) 3 (R) 1 (P) 3 (R) N.C. N.O.

Speed Controller: Standard Type Series AS In-line Type 1

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Max. effective area (mm2) Port size Symbol Body size Symbol Standard characteristics Symbol Port size Without sub-plate Rc 1/4 Rc 3/8 1 2 3 Nil 02 03 Symbol Set pressure range (MPa) 2 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 03 04 06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45

PSE540/560

hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc 1/8 URJ 1/4 TSJ 1/4 M5 x 0.8 M5 x 0.8 M5 x 0.8 Case: C3604 + nickel plated

CE2

2 !3 !4 !5 !6 !7 !8 !

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

33

4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Option (-T): High Pressure Pump Mounted HRSE -A-10-T 012 018 012 018 024 Option (-T): High Pressure Pump Mounted HRSE -A-20/23-T 0.3 0.3 Circulating fluid pressure [MPa] Circulating

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

LC6D/LC6C

connector Model LC5-1-C1-02-X252 Cable length 0.2m LC6C LC6C Cable length: 1 to 5m 2 1 4 3 6 5 8 7 10 9 12 11 14 13 16 15 18 17 20 19 1 Communication connector 2 c Cable length: 0.2m 20 View c 315

q"s

models are not Applicabl model Specitications 6 E Sel orergur max. 0.1 MPa ,o o Sel pressure ma-x. 0.5 MPa 3 o o Set pressure max. 0,9 MPr 5 O_l o Connection Rc 1/4 02 o o, Connection Rc 3/8 03 r) o Connectlon Rc 'l12 o4 o Bracket B O ,l Brackel c c :l: 6 A Connection NPTI/4 N02 _l ., connection NPT3/8 N03 C c co$nection NPT1/2 N04 a) Connection G 1/4 F02 o ll Connection G 3/8 F03 C al Connection

CC

lG 1/2 1/2 223 139 92 116 123 61 121.8 156.5 98 35 18 35 109 CC100-lSl1-lG 65 86 45 88 65 1/2 3/4 CC100-lLl1-lG 259 139 92 116 123 61 133.8 185.5 134 40 24 50 140 65 116 66 112 85 3/4 3/4 CC160-lLl1-lG 319.5 202.5 144 180 183 60 133.8 181.5 134 40 24 50 136 93 116 66 108 81 L dimension Mode NB Effective oil level stroke T * W S QL QB P NL 100 200 300 400 500 800 700 600 50 9.5 11 0 30 86

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

LC6D Connector Cable LC6C Power Connector Cable Model LC6-1-C1--X258 Model LC6-1-C2--X252 Electric actuator LC6D Electric actuator LC6C Cable length 1 1m 3 3m 5 5m Cable length 1 1m 2 2m 5 5m Power connector Cable length: 1 to 5m Motor cable b Cable length: 1 to 5m 13 12 11 10 6 5 4 3 2 1 a Motor cable 7 13 12 11 10 9 8 6 5 4 3 2 1 Switch cable 14 15 16 17 18 Interface cable 7 9 8 Power cable