CEx-OMQ0013

CE*-OMQ0013-F / / 1 7 1-1 1-2 1-3 1-4 8 2-1 2-2 2-3 13 3-1 3-2 3-3 15 4-1 4-2 4-3 17 5-1 5-2 5-3 21 6-1 6-2 22 7-1 7-1-1 7-1-2 7-2 7-2-1 7-2-2 7-3 7-3-1 7-3-2 7-3-3 INPUT 7-3-4 OUTPUT 7-3-5 7-3-6 28 36 9-1 9-1-1 9-1-2 9-1-3 9-2 9-2-1 9-2-2 9-3 9-3-1 45 10-1 10-2 46 11-1 11-2 50 12-1 CE2/CEU2 / *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power

AR Series Modular Type Regulator

Applicable Model Model AR20-A AR25-A AR30-A AR40-A AR40-06-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 A 30 AR q X406 03 0.4 MPa setting w t e r Option/Semi-standard: Select one each for a to f. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

CLA

~~ , A 00) 0(0) 0 (2.5) 2(6) 4(7. 5) ~ , 40 D-AG 43.5 49 55.5 3 D-AS 1(0 1(0) 5(1.5 I O{S.5) 8(4 3t 35 42 so 57 .5 ~ Ht A 00) 00) 0(2.5 26 417 .5) D-A3 B !

ZSE F/ISE

) Variations R 1/ 4, NPT 1/4, G 1/ 4 (With M5 male thread) URJ 1/4, TSJ 1/ 4 Port size Leak rate 1 x 10 5 Pa. m 3/ s 1 x 10 10 Pam3/s 100 kPa 1MPa 100 kPa 1 MPa Rated pressure range 0 0 0 0 100 kPa 100 kPa 2 outputs NPN or PNP Output Switch output Output voltage 1 to 5 V Analog output 16-2-27 4 High Precision, Digital Pressure Switch For General Fluids Series ZSE50F/ISE50 How to Order ISE50

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Air-hydro Unit

x T Mounting hole for hexagon socket head cap screw Air port size Rc CC CC Oil draining hole Rc 1/4 Oil port size Rc (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 L Dimension (mm) 700

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

PSxx-OMM0002CN

6 33 () () 10m DC(-)() * ( ) () CE -7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa

CJ2X/CUX/CQSX/CQ2X/CM2X

Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature

CJ2X/CUX/CQSX/CQ2X/CM2X

(mm2) 0.6 RZQ 100 Flow rate (l/min (ANR)) 460 230 290 130 Free flow MI W S 1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled

PSE540/560

Port size ISA2 R 1/8 (With M5 female thread) R 1/4 (With M5 female thread) Rc 1/8 NPT 1/8 (With M5 female thread) NPT 1/4 (With M5 female thread) URJ 1/4 TSJ 1/4 01 02 C01 N01 N02 A2 B2 IS Option/Part No. Output specifications Part no. Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

REC

0 Replacement Parts: Seal Kit 1 Snap ring Nickel plated Carbon tool steel !1 Kit no. Contents Bore size (mm). 2 Bumper Urethane !2 20 REC20-PS Set of nos. above 1 Plastic magnet Resin !3 25 REC25-PS !5, !7, !9, @0, @1, @3 1 Hexagon socket head set screw Zinc chromated Carbon steel !4 32 REC32-PS 2 Cylinder tube gasket NBR !

VT325

Grommet, Lead wire length 300 mm C Conduit D DIN terminal With surge voltage suppressor VP 200 VAC, 50/60 Hz Port size 110 VAC, 50/60 Hz 02 1 4 4 AC: Can be attached to Grommet, Conduit, Conduit terminal.

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.

VXP21/22/23

LVH Connection LVD 02 03 04 06 10 12 14 20 1 4 Thread type Nil T F N Refer to the table (2) given below for availability. 3 8 1 2 3 4 Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LQ 1 4 1 2 LVN 32 40 50 For 32A For 40A For 50A Flange TI/ TIL PA Refer to the table (1) given below for availability.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8 40 98 27 28.5 M28 x 1 2 1/8, 1/4 29.5 1/8 53 117 29 29.5 M38 x 1.5 2.5 1/4, 3/8 34 1/4 70 148 41 34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

C D F J K ARP20(K) ARP30(K) ARP40(K) 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W

CC

4 Oil port size Rc RS H A (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL H NL P QB QL S T W RZQ CCT639.5 11 0 30 86 3 28 45 53 88 86 64 88 104 3/4 3/8 MI W S CCT1007 13 2 32 120 5 33 65 61 123 116 92 125 139 1 1/2 CCT1607 20 2 46 185 0 29 93 60 183 180 144 185 202.5 1 1/4 3/4 CEP1 L Dimension CE1 (mm) 800 700 600 500 400 300 200 100 50 Effective oil level stroke (mm) CE2 CCT63603.5

VXD21/22/23

LVA LVH Connection 1 4 3 8 1 2 3 4 02 03 04 06 10 LVD Thread type Nil T F N Refer to the table (2) given below for availability. Rc NPTF G NPT Thread LVQ Refer to page 17-3-16 for ordering coil only. 1 LQ 32 40 50 For 32A For 40A For 50A Flange LVN Refer to the table (1) given below for availability.