Clean Regulator

SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05

KC

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

) 56.5 54.5 26.5 A port 20.5 17.5 11.5 11.5 9 PE port M5 X 0.8 External pilot port (Only external piot style (R)) 19 14 (Rc(PT)1/4) (Rc(PT)1/4) 3-Rc(PT)1/4,3/8 P/A/R port 21 13 (Rc(PT)3/8) (Rc(PT)3/8) DIN terminal (Y): VQZ3l5(R)-lYl02 03 02 03 L plug connecter (L): VQZ3l5(R)-lLlIndicator light 88.5(89.5) 300 (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 56.5(60) 92.5 MAX.10 Applicable

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Refer to front matters 42 and 43 for Safety Instructions, and pages 507 to 509 for High Purity Chemical Air Operated Valve/Compact Type Precautions.

SI Unit

Production label Product number MAC address Firmware and Hardware version Firmware version (FW): 1.0.x (X is a number 0 or more) Hardware version (HW): 03 and higher Fig. 6-2 Production label 6.3. PROFIsafe address switch An eight-bit DIP-Switch is provided for the F_Address of PROFIsafe. The switch setting is only checked at power-up.

HRX-OM-M005

Figure 5-42 Serial Communication Setting Screen 2 3. Touch the [YES] key. The setting takes effect.

Filter Regulator

How to Order 30 K 03 BE AW D Symbol Description Body size 20 30 40 60 Nil Without backflow function With backflow function K With backflow function Nil Rc Thread type N NPT F G 01 1/8 02 1/4 03 3/8 1/2 Port size 04 06 3/4 10 1 Nil Without mounting option a Mounting B With bracket H With set nut (for panel mount) Nil Without auto drain Float type C N.C.

4/5 Port Air Operated Valve Series SYJA3000 1

-03-01 1 set SYJA5140 1 set SYJA5240 1 set SYJ5000-21-1A 1 set 3 position closed center 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 3 (R) 1 (P) 3 (R) The asterisk denotes the symbol for assembly.

4/5 Port Air Operated Valve SYJA3000 Series

SS5YJA5-42-03-01 1 set SYJA5140 1 set SYJA5240 1 set SYJ5000-21-1A 1 set 4(A) (B)2 4(A) (B)2 1 (P) (R)3 1 (P) (R)3 3 position pressure center The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. 4(A) (B)2 1 (P) (R)3 Caution Be sure to read this before handling the products.

C92

Load voltage Lead wire (m) Mounting bracket Bore size Indicator Applicable load Auto switch model Special function Style Electrical entry Wiring (Output) 0.5 () 3 (L) 5 (Z) 32 BT-03 AC DC 40 BT-03 3 wire (Equiv. to NPN) 5V A56 IC 50 BT-04 Yes Reed switch Solid state switch A53 A54 A67 A64 A59W F59 F5P J51 J59 F59W F5PW J59W F5BA F5NT F59F 12V 5V,12V 100V,200V 63 BT-04 Grommet Relay PLC

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

42 500 G 1/2 59 38 59 38 6 41.5 41.5 85 69 35 35 42 8 8 59 1 2 85 Recommended minimum bending radius for lead wire RT : 25 mm or more 120C : 50 mm or more Terminal part Dimensions for Cylinder Mounting 59 Hs dimensions (mm) Cylinder model MDB 57.5 63 69.5 78.5 89 Bore size CDA2 58.5 64 71 79.5 90 40 mm 50 mm 63 mm 80 mm 100 mm Hs Mounting cylinder part no.

Shock Absorbers and Rate Controls

Ali d mensions in m Llimeters. 42

Digital Flow Switch Series PFA For Air Series PFW For Water

specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Rc NPT G Nil N F 3m lead wire with connector Without lead wire Nil N Output specification Port size Size Applicable model Flow rate (l/min) Nil Output specification Applicable model Symbol 10 50 100 200 500 PFA710, 750 PFA711, 721, 751 PFA711, 721, 751 NPN open collector 2 outputs 27 1/8 1/4 3/8 1/2 01 02 03

Direct Solenoid

"AC Only "' Not aveilable WDC Solnold Typo NVS 4024, 'm34 03 = 1'r0v 50Hz U = 2mV fiHz 07 = 24VAC ffiHz t09 = 115/120V 6OHz 100/110V 5OHz t10 = 23o/21t0V 60Hz?

VQ20/30

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes