SMC Corporation of America
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Table 3.3-1 Power supply cable and earth leakage breaker (Recommended) Earth leakage breaker Terminal Power Recommended Cable Sensitivity block Model supply crimp Specifications Breaker of screw voltage terminal 1 size leakage diameter (A) current (mA) 4 cores x AWG10 (4 cores x 5.5 mm2) HRL100-A-20 3-phase R5.5-5 30 200V AC including (50Hz) ground M5 30 4 cores x 3-phase HRL200-A-20 40 AWG8

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) Rc1 4 Flow metter Prepare a flow metter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 3.4 Piping HRS Series 3-28 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.5 Circulating Fluid Supply 3.5.1 Automatic water fill function When clear water is used, refer to 7.1 Quality Control

DC (+) 1 NC 2 DC () 3 4 OUT 4 43 2-3.4 Flow direction PFA511/521/551 62 116 23 1.6 76.2 54 44 34 44.5 2-Port size 30 40 50 (43.5) 42 6 Flow direction 9 Series PFA Dimensions/Remote Type Display Unit for Air PFA3-A Panel mount type Internal circuit and wiring examples to are terminal numbers. 41.8 40.3 Sensor 4.3 40 Blue Brown Black N.C. 1 2 3 4 SMC FLOW SWITCH 5 6 7 8 OUT1 OUT2 35.8 A 40

x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port

21 MM M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NA 24 30 34.5 42.5 G 8 8 8 11 B1 13 17 17 22 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 41 45 45 50 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 8 10 12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32 40 40 53 TY 32 40 40 53 TZ 52 60 60 77 Z 36 40 40 44.5 ZZ 116 120 122 154 h Symbol Bore size (mm) 20 25 32 40 e

20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C

AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, Speed Controller with Indicator, FLOW CONTROL, 40 lb

(C) Coef. for compensation 20 10 0 10 30 40 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 Bore size (mm) Current A VER4000 How to Use DIN Terminal Wiring procedure 1.

List part numbers of the installed valve and option in required station location separately under manifold part number. 4-2-7 8 Series V100 Common SUP/Common EXH Type S41 How to Order Applicable solenoid valve Note) VV100 S41 05 M5 V114V114AV124V124AStations 2 port size 02 M5 M5 x 0.8 2 stations 2 Applicable blank plate assembly V100-77-1A 1 20 20 stations 3 2 1 port M5 x 0.8 3 port M5 x

Appropriate clamping torque (Nm) 0.18 to 0.25 1.13-3 4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000 How to Order L 1 5 5 VQD11 Body Sub-plate port size 2 3 5 M5 thread Without sub-plate (Manifold) M5 thread Body ported Body ported (Single unit) Body ported (Manifold) Base mounted M5 Base mounted M5 Valve option Electrical entry Standard (2W) Vacuum (2W) Large flow (4W) Large

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1