Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

AS

ASD Model Meter-out type Rod and applicable tubing O.D. 4 6 8 10 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE The lock nut provides identification.

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

Suction Guard (Produced upon receipt of order) FHG Series

Reset button 508 Suction Guard FHG Series Dimensions A 135 170 10 A I 10 Port size: 20, 24 Port size: 04 to 16 4 x 10 6 x 10 Element removal dimension T+100 B H Element removal dimension T+100 10 10 B H L L M C D M Cap C D Cap Air breather Air breather (65) (U) T (V) (S) (65) T (V) (S) (U) MIN (r) AG F MIN (r) AG F Seat seal Seat seal IDG IDG Lubrication port strainer Lubrication port strainer

High Purity Chemical Valve

Tubing size Valve type 4 8 Symbol 03 04 05 06 07 06 07 08 10 11 10 11 12 13 Body class Tubing size 0 N.C. 10 3, 1/8" 4 3/16" Body type 2 A Stacking type for manifold 6 1/4" 6 1/4" Lever operation Lever operation Non-locking type (self-reset type) Locking type Symbol Nil L 8 3 10 3/8" 10 3/8" LQ2 integral fitting 4 12 1/2" 485 Series LVH Threaded type manifold/Variations How to Order Manifold

HRX-OM-R039

-(T) . 8-7 8.4.2 HRSE018-A-10-(T) . 8-7 8.4.3 HRSE012-A-20/23-(T) . 8-7 8.4.4 HRSE018-A-20/23-(T) . 8-8 8.4.5 HRSE024-A-20/23-(T) . 8-8 8.5 Pump capacity . 8-9 8.5.1 HRSE012/018-A-10 . 8-9 8.5.2 HRSE012/018/024-A-20/23 . 8-9 8.5.3 OPTION-T (HRSE012/018-A-10-T). 8-10 8.5.4 OPTION-T (HRSE012/018/024-A-20/23-T) . 8-10 8.6 Sample DoC.

HRX-OM-R026

HRSH Series HRX-OM-R026 Contents 9.4.1 HRSH090-A-20. 9-10 9.4.2 HRSH090-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

Silencer Series AN

AN103-01 AN203-02 AN303-03 AN403-04 5-10-3 Silencer BC Sintered Body Type Series AN Specifications/Model Ideal for the exhaust of a compact valve or pilot air.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-14A-10 3 pcs.

New

AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring is shipped together with the product, but not assembled. 10 Series VXF2 Dimensions: Direct piping type VXF21A<<

HRX-OM-W058

HRS-R Series Product Warranty 10-1 HRX-OM-W058 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.

HRX-OM-X027

HRS-R Series Product Warranty 10-1 HRX-OM-X027 Chapter 10 Product Warranty 6. Request to customers Proper use and maintenance are essential to assure safe use of this product. Be sure to satisfy the following preconditions.

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 34 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB Courtesy of Steven Engineering

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-33 Series VQ7-8 Manifold Option Parts Individual EXH spacer VV72-R-03/04 Individual SUP spacer VV72-P-03/04 R1/R2 individual EXH spacer VV72-R2-04 Reverse pressure spacer AXT512-19A-1 2 Silencer box AXT512-26A SMC SMC 223.5 211.5 183.5 171.5 120.5 140 PA B PE PE PA B PE PE PE P 80.5 P R1 R2 78 R2 R1 EA EB A EA EB 2-3/8, 1/2 Individual

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

VM

I 10 I G H F E X H .

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.