CV/MVGQ

to 150 151 to 200 201 to 300 51 to 100 101 to 150 151 to 200 201 to 300 20 25 32 40 68 12.5 81 93 106 131 25 37.5 50 75 17 30 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 72 12.5 85 97 110 135 25 37.5 50 75 17 32 36 77 12.5 90 102 115 140 25 37.5 50 75 19 41 46 10-15-30 31 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 20, 25, 32, 40 How to Order RE

CA2

3/8 18 102 116 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 11 M22 x 1.5 37 1/2 25 up to 750 20 to 750 40 37 116 41 92 30 52 14 21 M12 x 1.75 11 M26 x 1.5 40 1/2 126 25 (Both sides) Without rod boot With rod boot (Single side) Bore size (mm) TT TZ TY Z TX l H ZZ e f h Z ZZ Z ZZ 40 50 63 80 100 85 22 62 117 51 93 186 43 11.2 59 1/4 stroke 101 194 101 202 95 22 74 127 58 103 206

Air Cylinder Series CA2

3/8 98 M10 x 1.25 18 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 11 M22 x 1.5 37 1/2 116 M12 x 1.75 25 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 11 M26 x 1.5 40 1/2 126 M12 x 1.75 25 (Both sides) Without rod boot With rod boot (Single side) TX Bore size (mm) TY TZ TT l H Z ZZ d e f h Z ZZ Z ZZ 40 50 63 80 100 22 85 62 117 51 93 186 56 43 11.2 59 1/4 stroke 101 194 101 202 22 95

C76

to 150 171 204 151 to 200 196 229 201 to 250 254 1 to 50 145 179 51 to 100 170 204 101 to 150 195 229 151 to 200 220 254 201 to 250 279 1 to 50 122 147 51 to 100 147 172 101 to 150 172 197 151 to 200 197 222 201 to 250 247 Stroke Bore 32 121 40 154 Head clevis Item XC 1 to 50 51 to 100 101 to 150 151 to 200 20 to 250 Bore Stroke 32 40 122 147 147 172 172 197 197 222 247 6-10-31 32 Series

C76

to 150 171 204 151 to 200 196 229 201 to 250 254 1 to 50 145 179 51 to 100 170 204 101 to 150 195 229 151 to 200 220 254 201 to 250 279 1 to 50 122 147 51 to 100 147 172 101 to 150 172 197 151 to 200 197 222 201 to 250 247 Stroke Bore 32 121 40 154 Head clevis Item XC 1 to 50 51 to 100 101 to 150 151 to 200 20 to 250 Bore Stroke 32 40 122 147 147 172 172 197 197 222 247 6-10-31 32 Series

1

25 25.5 27.5 29 27 24 30 31 32 26.5 28.5 30 28 25 31 32 40 31 33 34.5 32.5 29.5 35.5 36.5 50 38.5 40.5 42 40 37 43 44 ( ): Denotes the values of long strokes. 6-17-114 94 Made to Order Individual Specifications: Air Slide Table Please contact SMC for detailed dimensions, specifications, and lead times.

Vacuum Unit

5 p. 31 6 6 One-touch fitting Metric size 8 8 One-touch fitting 7 1/4" One-touch fitting Inch size 9 5/16" One-touch fitting 1 ZK2 PS A Mounting4 Rated pressure range Nil Mounted to the single unit L Mounted to the manifold 1 0 to 101 kPa, Output: 1 to 5 V, Accuracy: 2% F.S. Filter element (10 pcs. per set) ZK2 FE1 A 3 Construction !

C85

31 28 26 28 33 27 31.5 31.5 28.5 26.5 28.5 33.5 27.5 32 32 27.5 25.5 27.5 32.5 26.5 31 31 3.5 24.5 29 29 51 to 100 st 27.5 25.5 27.5 58.5 52.5 56 56 28 26 28 59 53 56.5 56.5 28.5 26.5 28.5 59.5 53.5 57 57 27.5 25.5 27.5 58.5 52.5 56 56 56.5 50.5 54 54 101 to 150 st 27.5 25.5 27.5 84.5 78.5 81 81 28 26 28 85 79 81.5 81.5 28.5 26.5 28.5 85.5 79.5 82 82 27.5 25.5 27.5 84.5 78.5 81 81 82.5 76.5

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

C85

31 28 26 28 33 27 31.5 31.5 28.5 26.5 28.5 33.5 27.5 32 32 27.5 25.5 27.5 32.5 26.5 31 31 3.5 24.5 29 29 51 to 100 st 27.5 25.5 27.5 58.5 52.5 56 56 28 26 28 59 53 56.5 56.5 28.5 26.5 28.5 59.5 53.5 57 57 27.5 25.5 27.5 58.5 52.5 56 56 56.5 50.5 54 54 101 to 150 st 27.5 25.5 27.5 84.5 78.5 81 81 28 26 28 85 79 81.5 81.5 28.5 26.5 28.5 85.5 79.5 82 82 27.5 25.5 27.5 84.5 78.5 81 81 82.5 76.5

High-Precision Digital Pressure Switch

0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 18 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

cover (2000) 32 ZSE20C(F)/ISE20C(H) Series Dimensions Panel fitting dimensions (Rear ported) Individual mounting 31 0 0.4 31 0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs.

MG

50 100 101 200 300 0.5 10 20 30 31 50 100 101 200 300 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 50, 63 50, 63 Load weight m (kg) Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 20 30 40 51 50 100 101 300 200 5 10 20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 100 100 80

MGP

to 250st 85 95 10 to 74st 0 0 75 to 100st 18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5

Hygienic Design Cylinder Series HY

to 50 st 51 to 100 st Over 101 st 30 st or less 31 to 50 st 51 to 100 st Over 101 st 20 25 78.5 86 88.5 96 108.5 116 128.5 136 52 56.5 62 66.5 82 86.5 102 106.5 36 42 83 93 14 16 30 38 81 91 18 21 54 64 12 16 16 18 10 12 4 4.5 27 32 12.5 13.5 M5 x 0.8 M5 x 0.8 20, 30, 50, 100, 150, 200 SB Bore size QA Over 101 st PB PC PD QB RA RB RC RD RE RF SA TA TB TC TD UA UB UC UD 30 st or less 31 to

MY1

For details, refer to page 8-11-101.

24

50 100 101 200 300 0.5 10 30 31 50 100 101 200 300 Stroke [mm] Stroke [mm] MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 50 50 50, 63 50, 63 Load mass m [kg] Load mass m [kg] 50, 63 50, 63 32, 40 50, 63 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50

Compact Cylinder Series CQS

Stroke range Bore size Stroke range Bore size Long stroke Rod end male thread 31 to 199 12, 16 31 to 199 12, 16 Rubber bumper Stroke range 20 51 to 199 20 51 to 199 Rubber bumper is standard equipment for long stroke type. 25 51 to 299 25 51 to 299 Part no.: CQSB25-47D-XB10 Makes 47 stroke tube. B dimension is 69.5 mm. Part no.: CQSB25-47D CQSB25-50D with 3 mm width spacer inside.

Environment

to 400 275 325 114.5 32 20 to 100 265.5 315.5 96 13 25 51 56.5 69.6 79.6 116.6 M8 x 1.25 31 22 18.5 101 to 500 295.5 345.5 126 Size Stroke range [mm] M O1 R OA OB PA PB Q U PC W Y Without lock With lock 25 15 to 100 34 M5 x 0.8 8 37 38 15.4 8.2 28 0.9 15.9 146 196 24.5 101 to 400 32 20 to 100 40 M6 x 1.0 10 37 38 15.4 8.2 28 1 15.9 151 201 27 101 to 500 [mm] Body Bottom Tapped Size Stroke

15

[mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 50 to 70 24 50 44 65 M8 x 1.25 10 6 7 75 to 120 45 60.5 125 to 200 58 67 205 to 500 86 81 100 505 to 800 135 63 38 857