CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

CQS

10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection Width across flats M thread 10 95 61 23 20 133 71 51 30 143 81 40 179 91 77 50 189 101 10 50 33.9 25 A S 10 97.5 63.5 23 20 135.5 73.5 51 30 145.5 83.5 40 181.5 93.5 77 50 191.5 103.5 10 8 M5 x 04 06 13 2.5 52.5 36.4 27.5 0.8 D C B P 10 99 65 23 20 137 75 51 30 147 85 40 183 95 77 50 193 105 Applicable tubing O.D

MXS

ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 KA NA 2 2 2 2 2 4 4 4 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT661-14AN-10 3 pcs.

LEY-OM007

1 2 3 4 5 6 7 8 9 10 20 20 34 33 35 32 31 1 21 2 22 3 23 4 24 5 25 6 26 NBR 7 27 8 POM 28 9 29 10 30 11 31 12 32 13 33 14 34 15 35 NBR 16 17 18 101 19 POM 101 20 / 16 LEY-L016 LEY-F016 LEY-D016 16 LE-D-2-1 25 LEY-L025 LEY-F025 LEY-D025 25 LE-D-2-2 32 LEY-L032 LEY-F032 LEY-D032 32 LE-D-2-3 1 2 C /P.46 7.4 /P.47 7.5 -12- 3.

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Pressure sensor/Sensor range Sensor supply pressure (Compound pressure) (Vacuum) (Low pressure) (High pressure) 101 to 101kPa PSE533 10 to 101kPa 10 to 101kPa 0.1 to 1MPa Regulating pressure range PSE531 PSE532 PSE530 Applicable pressure sensor SET If the controller is equipped with a unit switching function, unit setting can be changed.

PSxx-OMG0001CN

"-M" ( ) "-M" 13 SI kPaMPa 14 15 () 16 () / ( () ) -29No.PS-OMG0001CN-H OUT1 80mA OUT2 7F.S. 3 ( 4dights ) 1 -30No.PS-OMG0001CN-H PSE3 -100100 kPa 0-101 kPa 0100 kPa 01 MPa 0500 kPa 02 kPa 1 -101101 kPa 10-101 kPa -10100 kPa -0.11 MPa -50500 kPa -0.22 kPa 0.2 kPa 0.1 kPa 0.1 kPa 0.001 MPa 1 kPa 0.01 kPa DC1224 V10P-P10 50 mA() PSE30DC15 V(1 M) PSE31DC420mA100 ) 1 26.4V

MXS Series Air Slide Table

50 30 70 70 70 N 4 4 4 4 6 6 6 8 G 16 16 16 16 21 26 39 19 H 40 40 40 50 30 35 35 35 NN 2 2 2 2 3 4 5 7 I 10 10 10 10 15 40 55 68 J 40 40 40 50 60 85 118 155 K 29 39 49 59 69 94 119 144 Z 75 75 75 85 100 150 198 248 M 76 76 76 86 101 151 199 249 ZZ 87 87 87 97 112 162 210 260 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 125 173 223 60 Air Slide Table MXS Series

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

M6 x 1 thread depth 12 B A 5H9 ( ) depth 4 +0.030 0 Section AA Section BB GA HA (mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGF Z DA DDH10 (Hole) W1 B DF DH DS DT DR DO DC DU DE DL DX CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 40 50 63 80 100 165 10 57 60 52 40 8 17 9 10 85 15 65 11 35 10 +0.058 0 CY1 183 10 57 70 52 40 8 17 9 10 85 18 65 11 35 12 +0.070 0 196 10 67 85 66 50 10 22 11 12.5 105 25 80 13.5 40 16 +0.070 0 MY1 235 12 93 102 90 65 12 24 13.5 15 130 31.5 100 16.5 60 20 +0.084 0 256 12 93 116 90 65 12 24

JXCx-OMT0005CN

20 byte 3 12 byte 4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP

%silltr

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

PC Wiring System Series PCW

100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) MM U 114 136 165 190 H 39 45 55 60 FY 50 59 76 92 FD 9 11.5 13.5 13.5 FX 90 105 130 150 Model F 4 5 5 5 FT 13 15 18 18 ZY 81 101 119 133 ZX 110 130 160 180 20CRA1F U50 CRA1F U63 CRA1F U80 CRA1F U100 M6 x 1.0 depth 12 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M 10 x 1.5 depth 20 Flange style Double shaft: CRA1FWU Flange style Single shaft with four chamfers: CRA1FXU Flange style Double shaft