C95

) B e11 E R AM D EE PL RT L12 KK SW G BG (MIN) L8 VD VA WA WB WH ZZ ZY L2 L9 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121

Air Slide Table Series MXS

Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10, 20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161 121

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

141 161 181 201 IN 151 30 45 60 75 90 106 121 136 151 -XC88 Spatter resistant coil scraper, Lube-retainer, Grease for welding (Rod parts: Stainless steel 304) 20 10 OUT 314 63 94 126 157 188 220 251 283 314 IN 236 47 71 94 118 141 165 188 212 236 -XC89W Spatter resistant coil scraper, Lube-retainer, Grease for welding (Rod parts: S45C) 25 10 OUT 491 98 147 196 245 295 344 393 442 491 IN

ALF400 to 900, ALT-5/-9

121 F 182 182 242 242 G 15 15 16 16 H 24 24 40 40 I 382 382 422 422 J 414 414 472 472 K 428 428 L ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 14-13-9 Oil Distributor VA, VB/Nylon Tubing Related Products: Oil Distributor Series VA, VB How to Order V A 4 6 Applicable tubing O.D.

Profile Design ISO/VDMA Air Cylinder Series CP95

Dimensions standard specifications [mm] CP95SB-stroke Stroke end cushioning STROKE STROKE CP95SB-stroke W STROKE STROKE STROKE Bore AM B D EE PL RT I12 KK SW G BG I8 VD VA WA WB WH ZZ ZY E R I2 I9 32 22 30 12 G1/8 13 M6 6 M10x1.25 10 27 16 94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151 126 101 75.6 50.4 252 IN 25.2 440 377 314 251 188 126 628 OUT 62.8 M L 10 CXS 20 330 283 236 188 141 94.2 471 IN 47.1 687 589 491 393 295 196 982 OUT 98.2 M L 12 CXS 25 529 454 378 302 227 151 756 IN 75.6 1126 965 804 643 482 322 1608 OUT 161 M L 16 CXS 32 844 724 603 482 362 241 1206 IN 121

Precision Cylinder Series MTS

N Backlash Manual unlocking Theoretical Output 12 16 20 40 Rear end only 125 211 29 53 82 329 1mm Non-locking type only Standard Strokes (N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107

Round Type Low Pressure Hydraulic Cylinder Series CH
M

5.5 40 55 M8 x 1.25 13 26 19 15 15.5 25 to 800 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 M10 x 1.25 13 28 19 15 19.5 32 to 800 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 M14 x 1.5 13 36 19 15 21 40 to 800 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 M16 x 1.5 19 44 24 21 21 (mm) Foot bracket plate thickness is dimension LT + 1mm.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

(mm) A B1 B2 D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 H2 I K 20 18 13 26 10 8 16 10 12 12 8 10 10 41 5 8 31 5 15.5 25 to 300 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 5.5 19.5 25 to 400 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121

Electric Actuator Triple Axis P&P Unit

Motor Mounting Applicable motors Mitsubisi Electric Corporation Length(mm) Weight(kg) Yaskawa Electric Corporation Length(mm) Weight(kg) OMRON Corporation Length(mm) Weight(kg) 1.1 1.1 HC-PQ23 89 0.96 SGME-02F12 96.5 1.1 R88M-W20030 96.5 HC-MF23 99.5 0.99 SGM-02312 96.5 1.1 R88M-U20030A 96.5 HC-MFS23 99.5 0.99 SGMAH-02AA21 96.5 1.1 HC-KFS23 99.5 0.99 HC-KQ23 89 0.96 1.6 1.6 HC-PQ23B 121 1.6

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

MXS Series Air Slide Table

50 60 35 60 70 70 80 FF 40 40 40 50 35 60 70 70 80 GA 25 25 25 35 50 54 107 155 195 KA M 83 83 83 93 108 147 200 254 306 NA 2 2 2 2 2 2 4 4 4 N 4 4 4 4 6 6 6 8 8 HA 35 35 35 35 35 70 70 76 88 ZZ 97 97 97 107 122 161 214 268 320 G 15 15 15 15 15 19 37 41 19 H 45 45 45 55 35 35 35 38 44 NN 2 2 2 2 3 4 5 6 7 I 10 10 10 10 10 10 58 70 87 J 44 44 44 54 69 108 113 155 190 K 31 41 51 61 71 96 121

MXW Series Long Stroke Slide Table

thread depth 6 (Helisert) 5H9 +0.03 depth 4.5 0 6 38 5 22 12 Y Y 25 40 84 L 10 13 13 K A 30 24 15.8 A Z NN-M4 x 0.7 thread depth 8 Bottom through hole 3.3 (N-1) x H G N-M4 x 0.7 thread depth GG HH H 6 depth 4.5 5H9 +0.03 Bottom through hole 3.3 0 5H9 +0.03depth 4.5 0 F E G F E Model HH H GG J Z N L K NN 64 106 71 MXW875 30 19 92 228 5 45 31 1 98 112 106 MXW8100 32 34 115 278 5 70 56 1 121

Low Profile Slide Table MXF Series

MXF Series Product Features .page 120 MXF Series How to Order .page 121 Specifications .page 122 Table Deflection .pages 123-124 Construction/ Parts List, Seal Kits .page 125 Dimensional Drawings.pages 126-129 Auto Switch Specifications and Mounting .page 130 Please see safety instructions on page 18. 119 MXF Series 8, 12, 16, 20 Low Profile Slide Table 120 Low Profile Slide Table MXF

Air Pilot Operated Series NVSA

Parl No. naq. 1A MB aO20.03 tg Ba &2041 1C MB 4@1-03 lD MB12-O3 121 Manlfold Block #.{1 Mrnlfold Slock *23 Manlfold Block ,28 Manltold Block l{ol} Us lor mountlno NVS ln24 valvs.

3 Port Solenoid Valve Series SYJ300/500/700

L2 4 8.5 (Station n) (Station 1) (Station 1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

150 160.5 3 62 111 131 162.5 173 4 72 121 141 175 185.5 5 82 131 151 175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275 285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4

CV/MVGQ

58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Blue F-2815-101-B80-NORYL F-2815-101-B85-NORYL .011 Black / Orange F-2815-111-B80-NORYL F-2815-111-B85-NORYL .012 Green F-2815-121-B80-NORYL F-2815-121-B85-NORYL .013 Black / Yellow

48

161 201 241 281 IN 302 60 90 121 151 181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503 754 1005 1257 1508 1759 IN 2004 401 601 802 1002 1203 1403 63 (45 x 2) 20 OUT 3181