Series: 3 (VP300), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 10 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 10 Stations, Passage: 3 (P: Common, EA,EB: Individual, Port A,B: Side), Port Size: 02 (1/4), Thread: T (NPTF)

Series: VP300, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 10 Stations, Symbol: 3, Port Size: 1/4, Thread Type: NPTF

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

Peltier-type Chiller Thermo-con/ Compact Type

Cooling capacity = Considering a safety factor of 20%, 93.3 W x 1.2 = 112 W Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density : 1 x 10 3

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Static moment M2 = m g (L1 + B) 103 m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 and M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We(L2 + A) 103 3.

1

Pressure units conversion (Approximation) 17 Unit Pa (N/m2) kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr PSI 1 x 103 1 x 106 1 x 105 1.0197 x 105 9.8692 x 106 1.0197 x 101 7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

SMC Pneumatic Clean Series

103 103 12-CXSL 102 102 102 10-CM2 11-CXSL 11-CM2 10 10 10 1 0.1 0.5 1 0.1 0.5 1 1 1 0.1 0.5 1 Particle diameter (m) Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit

Digital Flow Switch For Air/Water Series PF2A/PF2W

Output mode Hysteresis mode ft3, ft3 x 103, ft3 x 106 CFM ON OUT2 is also the same.

CUJ

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

JXCx-OMT0001CN

. / . 100 16.2 . 101 16.3 . 102 16.4 . 102 16.5 . 103 16.6 . 103 16.7. . 103 17. . 104 17.1 . 104 17.2 . 107 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 -4No.JXC-OMT0001CN-C JXC93 Series 1. 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Stations: 10 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPTF

Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: T (NPTF)

SMC's 3 port air operated valve, VPA300/500/700 is available in body ported or base mounted styles.  The VPA offers a high flow capacity of Cv1.0 (VPA300), Cv2.3 (VPA500), Cv4.0 (VPA700).  It is possible to use the series as either a selector valve, or divider valve. The VPA is changeable from a normally closed style to a normally open style., MANIFOLD BASE, 3 PORT AIR-PILOTED VALVE,

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

10-, 21-) Vacuum port (11-, 22-) Effective thread length FL NA Width across flats B2 G H2 NN Width across flats KA G Width across flats B1 H1 MM NA 20, 25 Eh8 D Standard port 45 Relief port (10-, 21-) Vacuum port (11-, 22-) 1.5 A AL K ZZ + Stroke S + Stroke H F 32, 40 (mm) ZZ H H2 H1 S P I G E D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K AL F 8 13 0 1/8 138 109 107 103

MXW

hexagon socket hole 2.5 J 12 6.5 MX MTS MY Width across flats 8 5H9 +0.030 depth 4.5 0 CY 6-M4 x 0.7 thread depth 6 (Helisert) 6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560--01 Rc(PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103

70pvpump

= 0 1 10 100 1000 Viscosity (mPas) (103 m2/s) = (mPas)/(kg/m3) 17-5-154 15 Series PA Process Pump: Air Operated Type (External Switching Type) Working Principle: Air Operated Type Air supply port (AIR SUP) VC 5 port solenoid valves VDW Drive unit External solenoid valve VQ VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588