Rotary One-touch Fittings Manifold Series KM

N L1 L2 Weight (g) Port B Min. port size L3 L4 L5 L6 P Q1 Q2 M KM12-03-35-10 KM12-03-35-6 6 87 10 40 67 5 32 1 4 18 29.5 19.5 29 10.6 12 16 6 17.46 10 110 6 95 10 121 6 102 10 61.5 75 KM12-07-35-10 KM12-07-35-6 48 84 10 19.5 31.5 21.5 31.25 13 7 13.2 17 17.46 1 4 1 4 73.5 96 KM12-09-36-10 KM12-09-36-6 52.8 100 12.7 37.5 23.7 37.7 25 15 9.5 15.2 18.5 5 16 3 8 22.22 83 117 132 Metric Thread

Mechanical Valves Series NVM, NVFM, NVZNI

N4ountrng F.tJ T 1 2 3 5 l b s ( 5 6 k 9 ) P T 0 138 in (3 smm) O T 0 079 in (2mm) T T 0 216 in (5 smm) F O F 12 35 lbs (5.6 ks ) P T 0,138 in (3 5mm) O T 0 079 in (2mm) T T 0 216 in (5 Smm) '75 PSIG (5 Kg{/cm2) "75 PSIG (5 Kgt/cm2) A B c D E F G 4.25 (1 08) 2.20 (56) 1 . 3 2 :33.5 0.91 (231 0.24 (6) 0.81 'DN E 0.39 {10) A B c D E F G 4.O7 10s.5 2.03 t51 .5) 1.32 133-51 0.91 (231 0.47 (121

Platform Cylinder Series CXT

Long Stroke (mm) X Y Z Bore size (mm) Stroke range (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 528 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4 x M8 x 1.25 4 x 8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4 x M10 x 1.5 depth 15 (N) T PA T

High Vacuum L Type Valve

48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0003 6.

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A9 D-M9 22 (24.5) A 2.8 0.5 W B ( ): Dimensions for D-A93 Bore size (mm) D-A9 A B W 6 10 16 36 11.5 9.5 (7) D-M9 A B W 29.5 5.5 3.5 (1) 29.5 9.5 7.5 (5) 33.5 9.5 0.5 33.5 13.5 3.5 40 15.5 5.5 20 41 15 13 (10.5) 45 19 9 25 40.5 16.5 14.5 (12) 45.5 20.5 10.5 Note) The above mentioned values are indicated as a guide for auto switch

Rotary Actuator/Vane Style Series CRB2

Volume (cm 3) Single vane Double vane Vane type CRB2BW40-S CRB2BW10-D CRB2BW15-D CRB2BW20-D CRB2BW30-D CRB2BW40-D CRB2BW10-S CRB2BW15-S CRB2BW20-S CRB2BW30-S Model 90 180 270 90 180 270 90 180 270 180 270 180 270 90 100 90 100 90 100 90 100 90 100 90 90 Rotation 1 (0.6) 1.5 (1.0) 4.8 (3.6) 11.3 (8.5) 25 (18.7) 31.5 41 33 34 1.2 1.5 2.9 3.7 6.1 7.9 15 20.2 1.0 1.1 2.6 2.7 5.6 5.7 14.4 14.5

Slider Type/Ball Bushing Bearing

steel Aluminum alloy Note 1) 7 35 15 or larger Chromated Piston Grease cup Carbon steel 8 36 Shaft Stainless steel Wear ring A Special resin 9 37 Zinc chromated Piston side yoke Rolled steel Wear ring Special resin 10 38 Zinc chromated External slider side yoke Rolled steel Wear ring B Special resin 11 39 Magnet A Cylinder tube gasket NBR 12 40 Magnet B Guide shaft gasket NBR 13 41

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

MXF

Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43 34 26 17 IN 85 OUT 201 141 121

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 5 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 7 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 16 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 3 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 6 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 2 Stations, Symbol: 1, Port Size: 04 (1/2)

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: Internal Pilot, Stations: 10 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: N (NPT)