MGP

to 250st 85 95 10 to 74st 0 0 75 to 100st 18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5

Integrated Controller

146.3 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 24 32 15 to 39 50 40 to 100 42 41 101 to 124 25 20 29 M5 x 0.8 6.5 4 5 75 125 to 200 59 49.5 201 to 400 76 58 22 36 20 to 39 50 40 to 100 36 43 101 to 124 32 25 30 M6 x 1 8.5 5 6 80 125 to 200 53 51.5 201 to 500 70 60 50 Easy to Operate EQY H Series Battery-less Absolute (Step Motor 24 VDC) Dimensions H A B C

Environment

15.9 87 101 to 500 Body Bottom Tapped [mm] Size Stroke range [mm] MA MC MD MH ML MO MR XA XB 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 30 Note 1) Range within which the rod can move.

Air Cylinder

41 41.5 41 44 41 41 41 41 41 49 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 49.5 49 50 49 52.5 49 49.5 49 49.5 49 56 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 58.5 56 61 56 56.5 55.5 57.5 55.5 65 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 20 Auto Switch Mounting Series CA2 Minimum Stroke for Auto Switch Mounting n: Number of auto switches

10

89 30 55 20 19 72 16 M10 x 1.5 10 26 16 5 M26 x 1.5 38 1/2 114 40 124 124 17 15 258 125 54 50 136 41 110 32 60 27 19 97 16 M12 x 1.75 13 27 20 6 M27 x 2.0 38 1/2 120 50 148 148 17 15 314 With Rod Boot [mm] Bore size [mm] d e f l h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 51 to 100 101 to 150 151

CV/MVGQ

8 57.5 18 13 M20 x 1.5 13 26 5 8 15 24 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 15.5 M10 x 1.25 5.5 33.5 45 10 63.5 22 13 M26 x 1.5 17 32 6 8 15 30 19.5 M10 x 1.25 5.5 37.5 45 12 68 22 13 M26 x 1.5 17 32 6 8 15 34.5 19.5 M14 x 1.5 7 46.5 50 14 76 24 16 M32 x 2 22 41 8 10 21.5 42.5 21 Dimensions by Stroke Single Acting/Spring Extend Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Angle Weight (g) Load (kN) Bore size (mm) 32 40 50, 63 80, 100 125 JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 M10 x 1.25 49.5 19.5 70 2.5 24 5 8 8 17 9 0.5 M12 x 1.25 60 20 160 4.4 31 6 11 11 22 13 0.75 0.5 M16 x 1.5 71.5 22 300 11 41 7.5 14 13.5 27 15 1 M20 x 1.5 101 28 1080 31 18 59.5 11.5 24 16 32 18 2 M27 x 2 123 34 1500 38 28 66 13 27 20 41 24 2 Black color Rod

24

200 300 0.5 10 30 31 50 100 101 200 300 Stroke [mm] Stroke [mm] MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 50 50 50, 63 50, 63 Load mass m [kg] Load mass m [kg] 50, 63 50, 63 32, 40 50, 63 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100

MG

300 200 0.5 10 20 30 31 50 100 101 300 200 DStroke (mm) Stroke (mm) -X MGPL32 to 63 MGPL32 to 63 50 50 20Data Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

M A B C D E F G H P U Load [kN] Weight [g] Angle 32 JA30-10-125 M10 x 1.25 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 0.5 40 JA40-12-125 M12 x 1.25 60 20 31 6 11 11 22 13 0.75 4.4 160 50, 63 JA50-16-150 M16 x 1.5 71.5 22 41 7.5 14 13.5 27 15 1 11 300 80, 100 JAH50-20-150 M20 x 1.5 101 28 31 59.5 11.5 24 16 32 18 2 18 1080 125 JA125-27-200 M27 x 2 123 34 38 66 13 27 20 41 24 2 28 1500 * Black color

MB

(mm) l ZZ Note) h Bore (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 1 to 50 1 to 50 51 to 100 51 to 100 101 to 150 101 to 150 151 to 200 151 to 200 201 to 300 201 to 300 301 to 400 301 to 400 401 to 500 401 to 500 501 to 600 501 to 600 601 to 700 601 to 700 701 to 800 701 to 800 801 to 900 801 to

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

M A B C D E F G H P U Load [kN] Weight [g] Angle 32 JA30-10-125 M10 x 1.25 49.5 19.5 24 5 8 8 17 9 0.5 2.5 70 0.5 40 JA40-12-125 M12 x 1.25 60 20 31 6 11 11 22 13 0.75 4.4 160 50, 63 JA50-16-150 M16 x 1.5 71.5 22 41 7.5 14 13.5 27 15 1 11 300 80, 100 JAH50-20-150 M20 x 1.5 101 28 31 59.5 11.5 24 16 32 18 2 18 1080 * Black color Rod clevis: GKM (ISO 8140) l1 [mm] Bore size [mm] Part no.

Cylinder with Lock Series MNB

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239

LEY-OM007

41 19 POM 101 42 20 43 21 44 22 45 23 46 NBR / 16 LEYG-S016 16 LE-D-2-1 2 /P.46 7.4 /P.47 7.5 25 LEYG-S025 25 LE-D-2-2 32 LEYG-S032 32 LE-D-2-3 -16- 4. 4.1.

Rotary Clamp Cylinders

Front matter 1 Model Selection Moment of Intertia 12, 16 20, 25 103 101 102 MK MK2T Allowable moment of intertia [kgm2] Allowable moment of intertia [kgm2] 104 MK2 103 MK 105 16 Standard arm single unit 104 20, 25 Standard arm single unit 12 Standard arm single unit 106 105 50 100 200 50 100 200 Maximum piston speed [mm/s] Maximum piston speed [mm/s] 32, 40 50, 63 101 101 MK2T MK2T MK2 Allowable

Compact Cylinder Series CQS

bumper 2 g Option mass: Double clevis style 92 g Mass/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 250 300 200 175 150 125 25 100 15 20 30 35 40 50 75 10 5 45 12 312 279 246 213 56 180 42 49 63 93 100 113 147 36 29 107 16 397 355 313 271 73 229 56 64 82 128 145 187 47 119 38 136 201 g 20 627 562 498 434 101 114 127 370 88 153 178 306 75 140 63 166 25 794 952 715 636 557

MB1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

Compact Guide Cylinder

mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more 100 mm stroke or less 101 mm stroke or more Bore size 12 7.5 7.5 10 19.5 22 4.5 2 3.5 3.5 6 23.5 26 1 16 9 7.5 10.5 19.5 22.5 4.5 1.5 5 3.5 6.5 23.5 26.5 1 20 13.5 13.5 15 25.5 27 9.5 9.5 11 29.5

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).