VFM300

Note 3) The handle of the selector (2 position) cannot be removed or replaced alone. 5-6-48 5 Port Mechanical Valve Rubber Seal Series VFM300 How to Order S 01 02 0 VFM35 Option Suffix for actuator F Foot bracket (Only internal pilot) Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 1 4 Roller lever 01 Black NPT N02 1 4 One way roller lever

Digital Pressure Switch

Setting Mode 26 Function Selection Mode 28 Function selection mode 28 Default setting 28 F 0 Units selection function 30 F 1 Setting of OUT1 31 F 2 Setting of OUT2 34 F 3 Digital filter setting 36 F 4 Auto-preset function 37 F 5 FUNC terminal setting 39 F 6 Fine adjustment of display value 41 F10 Sub display setting 42 F11 Display resolution setting 48 F80 Power saving mode 49 F81 Security

Digital Pressure Switch

Setting Mode 27 Function Selection Mode 29 Function selection mode 29 Default setting 29 F 0 Units selection function 31 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 5 FUNC terminal setting 40 F 6 Fine adjustment of display value 42 F10 Sub display setting 43 F11 Display resolution setting 49 F80 Power saving mode 50 F81 Security

PSxx-OML0002CN

> [F 2] [F 1] OUT1(2729) 1[-], [F 3] <> [F 3] [F 3] -30No.PS-OML0002CN-G [F 4] <> [F 4] 1000 100 [F 4] [MPa]/[kPa(ZSE)]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm 2]/[bar]/[psi]/[inHg] 26[F 0] -31No.PS-OML0002CN-G [F 5] <> [F 5] [F 5] -32No.PS-OML0002CN-G OUT1 AP1 (OUT1AP1 1AP2) OUT1 OUT1 OUT1 A1L A1H (A1L 1AP2) OUT2 P_1 H_1(n_1 H_1)AP2 (OUT2AP2 1 ) OUT2 OUT2OUT1OUT2

SI unit for DeviceNet TM

Dimensions EX120-SDN1(-X2/-X26/-X77) EX121-SDN1(-X2/-X26/-X77) -43No.EX-OME0015-F EX122-SDN1(-X2/-X26/-X77) EX124D-SDN1(-X2/-X26/-X77) -44No.EX-OME0015-F EX124U-SDN1(-X2/-X26/-X77) -45No.EX-OME0015-F Accesary Waterproof cap Use for unused conduit port (G1/2) when using EX124 Series.

Digital Pressure Switch ( compatible)

OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 35 Same setting as [F 1] OUT1.

Digital Pressure Switch

Setting Mode 24 Function Selection Mode 26 Function selection mode 26 Default setting 26 F 0 Units selection function 28 F 1 Setting of OUT1 29 F 3 Digital filter setting 32 F 4 Auto-preset function 33 F 6 Fine adjustment of display value 35 F10 Sub display setting 36 F11 Display resolution setting 41 F80 Power saving mode 42 F81 Security code 43 F82 Input of line name 45 F90 Setting of all

Fieldbus system (CC-Link compliant)

(Only for EX510-S 01 ) -28No.EX-OMI0001-I No.

VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

5 Port Solenoid Valve, Series VQC

VQC4000 VVQC4000-2A-1 Thread type Nil F T Rc G NPT/NPTF 22 Manifold Specification Sheet Series VQC1000: Base-Mounted Type/Plug-in Unit q How to order manifolds VV5QC 1 1 08 FD1 B C6 F P T Kit / / 1 2 3 8 VV5QC 1 1 08 SDQ B C6 S Kit Fill out for I/O serial kit only.

Fieldbus System

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

Modular Style Regulator with Built-in Pressure Gauge Series ARG

Thread type Type Rc NPT G Symbol Nil N F Accessory (2) Port size Symbol Nil H Description With set nut ARG40 Body size Port size Symbol 20 30 40 01 02 03 04 1/8 1/4 Accessory (1) 3/8 1/2 Symbol Nil B Description With bracket (With nuts) Mounting Angle of Pressure Gauge JIS Symbol G4 G3 G2 G1 Symbol ARG20 to 40 270 180 90 0 Mounting angle MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP (For VQZ100) This is used when changing piping location.

NVZseies

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

3 Way,3 Port Solenoid Valve NVZ Series

Bhmk Pbtc Ass'U Manifold Base Diference Behoeen NVZ77O andNWT3O Screw with o ,3 Botly Ported Type inch (mm) crommet//NVZIOO.OG NVZTOO-OH G11.81(300) L type plug connector.,'NVZOO.OL : M type plug connector//Nvzl OGOM f : With indicator light and surge voltage suppressol o 01.20 Manifold.,/ Top Ported crommeVNW3Z-01-(OG) Nvv3ZI-01-(OH) L VPe plug connector /NvvSz1-01-(OL) M type plug connecior

Vacuum Unit

C C1 L L1 L2 L3 L Individual wiring V V V V F D-sub connector V V P Flat ribbon cable connector V V 8 (Common PV) 6 (Common PS) P Vacuum pump system PN 5/16"(Common PV) 1/4" (Common PS) 10 10 stations 1 Common wiring F/P is available only for solenoid valve wiring. Individual wiring is specified for vacuum switches and sensors.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

Series 10-, 21- AW-B Filter Regulator

K F 10 AW B 30 03 BG JN K F 21 AW B 30 03 BG JN Copper, fluorine and silicone-free + Low particle generation q r t y w e Filter regulator Option/Semi-standard: Select one each for a to g.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!